DE69814296D1 - Ventilvorrichtung - Google Patents

Ventilvorrichtung

Info

Publication number
DE69814296D1
DE69814296D1 DE69814296T DE69814296T DE69814296D1 DE 69814296 D1 DE69814296 D1 DE 69814296D1 DE 69814296 T DE69814296 T DE 69814296T DE 69814296 T DE69814296 T DE 69814296T DE 69814296 D1 DE69814296 D1 DE 69814296D1
Authority
DE
Germany
Prior art keywords
valve device
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69814296T
Other languages
English (en)
Other versions
DE69814296T2 (de
Inventor
Hidenao Suzuki
Kuniaki Horie
Kiwamu Tsukamoto
Yuji Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69814296D1 publication Critical patent/DE69814296D1/de
Publication of DE69814296T2 publication Critical patent/DE69814296T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/005—Circulation means for a separate heat transfer fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y10T137/6579—Circulating fluid in heat exchange relationship
DE69814296T 1997-10-20 1998-10-13 Ventilvorrichtung Expired - Fee Related DE69814296T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9304902A JPH11125344A (ja) 1997-10-20 1997-10-20 弁装置
JP30490297 1997-10-20

Publications (2)

Publication Number Publication Date
DE69814296D1 true DE69814296D1 (de) 2003-06-12
DE69814296T2 DE69814296T2 (de) 2004-02-19

Family

ID=17938673

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69814296T Expired - Fee Related DE69814296T2 (de) 1997-10-20 1998-10-13 Ventilvorrichtung

Country Status (6)

Country Link
US (1) US6116267A (de)
EP (1) EP0911561B1 (de)
JP (1) JPH11125344A (de)
KR (1) KR100516857B1 (de)
DE (1) DE69814296T2 (de)
TW (1) TW368579B (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11125344A (ja) * 1997-10-20 1999-05-11 Ebara Corp 弁装置
KR100649852B1 (ko) * 1999-09-09 2006-11-24 동경 엘렉트론 주식회사 기화기 및 이것을 이용한 반도체 제조 시스템
DE10025189B4 (de) * 2000-05-20 2011-12-08 Helmut Bälz GmbH Armatur mit verbesserter Belastbarkeit
US6622983B2 (en) * 2000-08-25 2003-09-23 Lawrence Hall Particle control valve
DK200100281A (da) * 2001-02-21 2002-08-22 Flowcon Int As Membranventil med reguleringsmiddel
US7017604B2 (en) * 2001-06-06 2006-03-28 Newberg Douglas A Thermally insulating interfaces
JP4763936B2 (ja) * 2001-09-07 2011-08-31 アドバンス電気工業株式会社 バルブにおけるガスパージ方法及び構造
AU2002953538A0 (en) * 2002-12-23 2003-01-16 Pickering, Graham Clean line heated valve
US6907897B2 (en) * 2003-06-26 2005-06-21 Planar Systems, Inc. Diaphragm valve for high-temperature precursor supply in atomic layer deposition
US6941963B2 (en) * 2003-06-26 2005-09-13 Planar Systems, Inc. High-speed diaphragm valve for atomic layer deposition
US7021330B2 (en) * 2003-06-26 2006-04-04 Planar Systems, Inc. Diaphragm valve with reliability enhancements for atomic layer deposition
DE10337689B4 (de) * 2003-08-16 2005-10-13 Dieter Schulz Konstantdruckventil, Verfahren zum Absperren eines Volumenstromes durch ein solches Konstantdruckventil und Verwendung eines Konstantdruckventiles
JP4307228B2 (ja) * 2003-12-04 2009-08-05 三菱電機株式会社 ガス流量制御弁の組立方法
JP2009084625A (ja) * 2007-09-28 2009-04-23 Tokyo Electron Ltd 原料ガスの供給システム及び成膜装置
JP5205213B2 (ja) * 2008-10-24 2013-06-05 株式会社フジキン 流体制御器
DE202009014840U1 (de) * 2009-11-03 2011-03-17 Stöhr Armaturen GmbH & Co. KG Ventil
JP4798407B2 (ja) * 2010-05-21 2011-10-19 株式会社Ｉｈｉ ガラス溶融炉の給電装置
DE102013001179A1 (de) 2012-02-01 2013-08-01 Vat Holding Ag Anordnung mit zumindest einem Ventil
US20140174551A1 (en) * 2012-08-28 2014-06-26 Westport Power Inc. Variable Gas Pressure Regulator
WO2015002855A1 (en) * 2013-07-03 2015-01-08 Swagelok Company Heated fluid delivery with thermal management
JP6441672B2 (ja) * 2014-12-26 2018-12-19 旭有機材株式会社 バルブ
JP6959743B2 (ja) 2017-02-22 2021-11-05 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
CN110612413B (zh) 2017-03-03 2022-02-22 斯瓦戈洛克公司 具有热调节通道的流体系统部件
USD886237S1 (en) 2018-09-04 2020-06-02 Swagelok Company Thermal trace valve body
US11585456B2 (en) * 2019-01-07 2023-02-21 Fisher Controls International Llc Valve assemblies with integrated temperature control
CN110026443B (zh) * 2019-05-31 2021-08-27 深圳市点金贵金属精炼有限公司 一种制备金属丝的设备
JP7466508B2 (ja) 2021-09-06 2024-04-12 株式会社鷺宮製作所 流量調整弁及び冷却装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2823696A (en) * 1954-01-04 1958-02-18 Crane Co Fluid cooled diaphragm valve
US3491789A (en) * 1966-07-28 1970-01-27 Nupro Co Bellows valve
US3647344A (en) * 1970-03-16 1972-03-07 Monsanto Co Apparatus for controlling back pressure in an extruder
BE795182A (fr) * 1972-02-24 1973-05-29 Thyssen Niederrhein Ag Obturateur a clapet pour agencement de collecte d'eponge de fer
DE2511566C3 (de) * 1975-03-17 1978-07-06 Alfred 7220 Schwenningen Hirt Pneumatisch betätigbares Dosierventil insbesondere für schnell und intensiv bindende Kontaktkleber
US4715400A (en) * 1983-03-09 1987-12-29 Xomox Corporation Valve and method of making same
GB8816499D0 (en) * 1988-07-12 1988-08-17 C J S Sciences Ltd Valve
JPH0464788A (ja) * 1990-06-29 1992-02-28 Fujikin:Kk 恒温バルブ
JPH06123381A (ja) * 1992-10-12 1994-05-06 Hitachi Ltd ガス供給系用部品
JPH07198063A (ja) * 1993-12-28 1995-08-01 Benkan Corp Ｃｖｄ装置の真空排気弁
JP3343313B2 (ja) * 1995-06-30 2002-11-11 株式会社フジキン ダイヤフラム弁
JP3701367B2 (ja) * 1996-02-22 2005-09-28 Ｓｍｃ株式会社 ポペット弁
JPH11125344A (ja) * 1997-10-20 1999-05-11 Ebara Corp 弁装置

Also Published As

Publication number Publication date
EP0911561B1 (de) 2003-05-07
DE69814296T2 (de) 2004-02-19
US6116267A (en) 2000-09-12
KR100516857B1 (ko) 2007-01-18
KR19990037209A (ko) 1999-05-25
EP0911561A1 (de) 1999-04-28
JPH11125344A (ja) 1999-05-11
TW368579B (en) 1999-09-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee