DE50214778D1 - Schaltung zur messung von wegstrecken - Google Patents

Schaltung zur messung von wegstrecken

Info

Publication number
DE50214778D1
DE50214778D1 DE50214778T DE50214778T DE50214778D1 DE 50214778 D1 DE50214778 D1 DE 50214778D1 DE 50214778 T DE50214778 T DE 50214778T DE 50214778 T DE50214778 T DE 50214778T DE 50214778 D1 DE50214778 D1 DE 50214778D1
Authority
DE
Germany
Prior art keywords
pathways
measuring
circuit
measuring pathways
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50214778T
Other languages
German (de)
English (en)
Inventor
Ulrich Kleine
Falk Roewer
Klaus Salzwedel
Felix Mednikov
Martin Sellen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micro Epsilon Messtechnik GmbH and Co KG
Original Assignee
Micro Epsilon Messtechnik GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Epsilon Messtechnik GmbH and Co KG filed Critical Micro Epsilon Messtechnik GmbH and Co KG
Priority to DE50214778T priority Critical patent/DE50214778D1/de
Application granted granted Critical
Publication of DE50214778D1 publication Critical patent/DE50214778D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/202—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Amplifiers (AREA)
DE50214778T 2001-09-19 2002-09-19 Schaltung zur messung von wegstrecken Expired - Lifetime DE50214778D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50214778T DE50214778D1 (de) 2001-09-19 2002-09-19 Schaltung zur messung von wegstrecken

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10146287 2001-09-19
DE50214778T DE50214778D1 (de) 2001-09-19 2002-09-19 Schaltung zur messung von wegstrecken
PCT/DE2002/003507 WO2003027613A1 (de) 2001-09-19 2002-09-19 Schaltung zur messung von wegstrecken

Publications (1)

Publication Number Publication Date
DE50214778D1 true DE50214778D1 (de) 2010-12-30

Family

ID=7699625

Family Applications (2)

Application Number Title Priority Date Filing Date
DE50214778T Expired - Lifetime DE50214778D1 (de) 2001-09-19 2002-09-19 Schaltung zur messung von wegstrecken
DE10243631A Ceased DE10243631A1 (de) 2001-09-19 2002-09-19 Schaltung zur Messung von Wegstrecken

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE10243631A Ceased DE10243631A1 (de) 2001-09-19 2002-09-19 Schaltung zur Messung von Wegstrecken

Country Status (5)

Country Link
US (1) US7061230B2 (enExample)
EP (1) EP1427996B1 (enExample)
JP (2) JP2005504286A (enExample)
DE (2) DE50214778D1 (enExample)
WO (1) WO2003027613A1 (enExample)

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DE10348343B3 (de) * 2003-10-17 2005-02-03 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Schaltungsanordnung zur induktiven Wegmessung
WO2010045662A2 (en) 2008-10-15 2010-04-22 Azoteq (Pty) Ltd Parasitic capacitance cancellation in capacitive measurement applications
US20140002069A1 (en) * 2012-06-27 2014-01-02 Kenneth Stoddard Eddy current probe
WO2014197611A1 (en) * 2013-06-04 2014-12-11 Eagle Harbor Technologies, Inc. Analog integrator system and method
US9655221B2 (en) 2013-08-19 2017-05-16 Eagle Harbor Technologies, Inc. High frequency, repetitive, compact toroid-generation for radiation production
US10892140B2 (en) 2018-07-27 2021-01-12 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
US10020800B2 (en) 2013-11-14 2018-07-10 Eagle Harbor Technologies, Inc. High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
US10978955B2 (en) 2014-02-28 2021-04-13 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
CN116633324A (zh) 2013-11-14 2023-08-22 鹰港科技有限公司 高压纳秒脉冲发生器
US9706630B2 (en) 2014-02-28 2017-07-11 Eagle Harbor Technologies, Inc. Galvanically isolated output variable pulse generator disclosure
US11539352B2 (en) 2013-11-14 2022-12-27 Eagle Harbor Technologies, Inc. Transformer resonant converter
US10790816B2 (en) 2014-01-27 2020-09-29 Eagle Harbor Technologies, Inc. Solid-state replacement for tube-based modulators
US10483089B2 (en) 2014-02-28 2019-11-19 Eagle Harbor Technologies, Inc. High voltage resistive output stage circuit
WO2016138546A2 (en) 2015-02-27 2016-09-01 Azoteq (Pty) Ltd Inductance sensing
US11542927B2 (en) 2015-05-04 2023-01-03 Eagle Harbor Technologies, Inc. Low pressure dielectric barrier discharge plasma thruster
US10903047B2 (en) 2018-07-27 2021-01-26 Eagle Harbor Technologies, Inc. Precise plasma control system
US11430635B2 (en) 2018-07-27 2022-08-30 Eagle Harbor Technologies, Inc. Precise plasma control system
US11004660B2 (en) 2018-11-30 2021-05-11 Eagle Harbor Technologies, Inc. Variable output impedance RF generator
EP3580841A4 (en) 2017-02-07 2020-12-16 Eagle Harbor Technologies, Inc. TRANSFORMER-RESONANCE CONVERTER
JP6902167B2 (ja) 2017-08-25 2021-07-14 イーグル ハーバー テクノロジーズ, インク.Eagle Harbor Technologies, Inc. ナノ秒パルスを使用する任意波形の発生
US11302518B2 (en) 2018-07-27 2022-04-12 Eagle Harbor Technologies, Inc. Efficient energy recovery in a nanosecond pulser circuit
US11810761B2 (en) 2018-07-27 2023-11-07 Eagle Harbor Technologies, Inc. Nanosecond pulser ADC system
US11532457B2 (en) 2018-07-27 2022-12-20 Eagle Harbor Technologies, Inc. Precise plasma control system
US10607814B2 (en) 2018-08-10 2020-03-31 Eagle Harbor Technologies, Inc. High voltage switch with isolated power
US11222767B2 (en) 2018-07-27 2022-01-11 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
KR102499709B1 (ko) 2018-08-10 2023-02-16 이글 하버 테크놀로지스, 인코포레이티드 RF 플라즈마 반응기용 플라즈마 시스(sheath) 제어
WO2021134000A1 (en) 2019-12-24 2021-07-01 Eagle Harbor Technologies, Inc. Nanosecond pulser rf isolation for plasma systems
US12456604B2 (en) 2019-12-24 2025-10-28 Eagle Harbor Technologies, Inc. Nanosecond pulser RF isolation for plasma systems
US10796887B2 (en) 2019-01-08 2020-10-06 Eagle Harbor Technologies, Inc. Efficient nanosecond pulser with source and sink capability for plasma control applications
TWI778449B (zh) 2019-11-15 2022-09-21 美商鷹港科技股份有限公司 高電壓脈衝電路
US11967484B2 (en) 2020-07-09 2024-04-23 Eagle Harbor Technologies, Inc. Ion current droop compensation
US11824542B1 (en) 2022-06-29 2023-11-21 Eagle Harbor Technologies, Inc. Bipolar high voltage pulser
KR20250084155A (ko) 2022-09-29 2025-06-10 이글 하버 테크놀로지스, 인코포레이티드 고전압 플라즈마 제어

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DE3543935A1 (de) * 1985-12-12 1987-06-19 Siemens Ag Induktiver naeherungsschalter
US5148166A (en) * 1990-04-06 1992-09-15 General Electric Company Third order sigma delta oversampled analog-to-digital converter network with low component sensitivity
DE4017843A1 (de) * 1990-06-02 1991-12-05 Bosch Gmbh Robert Sensorschaltung
JP3337241B2 (ja) * 1991-07-26 2002-10-21 テキサス インスツルメンツ インコーポレイテツド 改良型多重チャンネル・センサーインターフェース回路とその製造方法
DE4225968A1 (de) * 1992-08-06 1994-02-10 Micro Epsilon Messtechnik Berührungslos arbeitendes Wegmeßsystem und Verfahren zur berührungslosen Wegmessung
JP3302826B2 (ja) * 1994-05-20 2002-07-15 三菱電機株式会社 センサ駆動回路
US5712563A (en) * 1994-06-13 1998-01-27 Honda Giken Kogyo Kabushiki Kaisha Steering torque sensor utilizing a displacement detector having a pulse power supply
US5729163A (en) * 1994-10-18 1998-03-17 The Boeing Company Synchronous AC to DC conversion of differential AC signals
WO1998059216A1 (de) * 1997-06-21 1998-12-30 Micro-Epsilon Messtechnik Gmbh & Co. Kg Wirbelstromsensor
US6073043A (en) * 1997-12-22 2000-06-06 Cormedica Corporation Measuring position and orientation using magnetic fields
JP2967413B1 (ja) * 1998-04-20 1999-10-25 株式会社千葉精密 回転差動容量型角度変換器
SG104277A1 (en) * 2001-09-24 2004-06-21 Inst Of Microelectronics Circuit for measuring changes in capacitor gap using a switched capacitor technique

Also Published As

Publication number Publication date
US7061230B2 (en) 2006-06-13
EP1427996B1 (de) 2010-11-17
US20040201376A1 (en) 2004-10-14
DE10243631A1 (de) 2003-04-24
WO2003027613A1 (de) 2003-04-03
EP1427996A1 (de) 2004-06-16
JP4796605B2 (ja) 2011-10-19
JP2005504286A (ja) 2005-02-10
JP2008275634A (ja) 2008-11-13

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