DE50001205D1 - Substratparallel arbeitendes mikrorelais - Google Patents

Substratparallel arbeitendes mikrorelais

Info

Publication number
DE50001205D1
DE50001205D1 DE50001205T DE50001205T DE50001205D1 DE 50001205 D1 DE50001205 D1 DE 50001205D1 DE 50001205 T DE50001205 T DE 50001205T DE 50001205 T DE50001205 T DE 50001205T DE 50001205 D1 DE50001205 D1 DE 50001205D1
Authority
DE
Germany
Prior art keywords
micro relay
substrate parallel
parallel working
working micro
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50001205T
Other languages
English (en)
Inventor
Ralf Struempler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ABB Research Ltd Switzerland
Original Assignee
ABB Research Ltd Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ABB Research Ltd Switzerland filed Critical ABB Research Ltd Switzerland
Priority to DE50001205T priority Critical patent/DE50001205D1/de
Application granted granted Critical
Publication of DE50001205D1 publication Critical patent/DE50001205D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
    • H01H9/30—Means for extinguishing or preventing arc between current-carrying parts
    • H01H9/34—Stationary parts for restricting or subdividing the arc, e.g. barrier plate

Landscapes

  • Micromachines (AREA)
  • Relay Circuits (AREA)
  • Contacts (AREA)
  • Structure Of Printed Boards (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
DE50001205T 1999-03-20 2000-03-17 Substratparallel arbeitendes mikrorelais Expired - Lifetime DE50001205D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50001205T DE50001205D1 (de) 1999-03-20 2000-03-17 Substratparallel arbeitendes mikrorelais

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19912669A DE19912669A1 (de) 1999-03-20 1999-03-20 Substratparallel arbeitendes Mikrorelais
PCT/CH2000/000152 WO2000057445A1 (de) 1999-03-20 2000-03-17 Substratparallel arbeitendes mikrorelais
DE50001205T DE50001205D1 (de) 1999-03-20 2000-03-17 Substratparallel arbeitendes mikrorelais

Publications (1)

Publication Number Publication Date
DE50001205D1 true DE50001205D1 (de) 2003-03-13

Family

ID=7901818

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19912669A Withdrawn DE19912669A1 (de) 1999-03-20 1999-03-20 Substratparallel arbeitendes Mikrorelais
DE50001205T Expired - Lifetime DE50001205D1 (de) 1999-03-20 2000-03-17 Substratparallel arbeitendes mikrorelais

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19912669A Withdrawn DE19912669A1 (de) 1999-03-20 1999-03-20 Substratparallel arbeitendes Mikrorelais

Country Status (5)

Country Link
US (1) US6613993B1 (de)
EP (1) EP1163692B1 (de)
AT (1) ATE232331T1 (de)
DE (2) DE19912669A1 (de)
WO (1) WO2000057445A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10040867A1 (de) 2000-08-21 2002-05-23 Abb Research Ltd Mikroschalter
US6917268B2 (en) * 2001-12-31 2005-07-12 International Business Machines Corporation Lateral microelectromechanical system switch
US20040027029A1 (en) * 2002-08-07 2004-02-12 Innovative Techology Licensing, Llc Lorentz force microelectromechanical system (MEMS) and a method for operating such a MEMS
ES2258735T3 (es) * 2002-11-19 2006-09-01 Baolab Microsystems S.L. Dispositivo electrooptico miniaturizado y usos correspondientes.
US20050156191A1 (en) * 2004-01-21 2005-07-21 Sumitomo Electric Industries, Ltd. Actuator structure and optical device
JP4540443B2 (ja) * 2004-10-21 2010-09-08 富士通コンポーネント株式会社 静電リレー
KR100748747B1 (ko) 2006-02-17 2007-08-13 현대자동차주식회사 비접촉 ｒｆ ｍｅｍｓ 스위치
DE102007035633B4 (de) 2007-07-28 2012-10-04 Protron Mikrotechnik Gmbh Verfahren zur Herstellung mikromechanischer Strukturen sowie mikromechanische Struktur
WO2009148677A2 (en) * 2008-03-11 2009-12-10 The Regents Of The University Of California Microelectromechanical system (mems) resonant switches and applications for power converters and amplifiers
FR2950194B1 (fr) * 2009-09-11 2011-09-02 Commissariat Energie Atomique Actionneur electromecanique a electrodes interdigitees
EP2780925B1 (de) * 2011-12-21 2018-09-05 Siemens Aktiengesellschaft Schütz
KR101276369B1 (ko) * 2012-01-10 2013-06-18 현대중공업 주식회사 배선용 차단기
CN103956299A (zh) * 2014-03-31 2014-07-30 苏州锟恩电子科技有限公司 一种微机械rf开关

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
DE4126107C2 (de) 1991-08-07 1993-12-16 Bosch Gmbh Robert Beschleunigungssensor und Verfahren zur Herstellung
DE4205029C1 (en) * 1992-02-19 1993-02-11 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate
DE4229068C2 (de) 1992-09-01 1994-06-16 Bosch Gmbh Robert Beschleunigungsschalter und Verfahren zur Herstellung
FR2706075B1 (fr) 1993-06-02 1995-07-21 Lewiner Jacques Dispositif de commande du type actionneur à pièce mobile conservant son orientation au cours du mouvement.
KR100252009B1 (ko) * 1997-09-25 2000-04-15 윤종용 마이크로 진동구조물과 그 공진주파수 조절방법 및 이를 이용한 마이크로 엑츄에이터
DE19800189C2 (de) * 1998-01-05 2000-05-18 Stefan Vogel Mikromechanischer Schalter

Also Published As

Publication number Publication date
WO2000057445A1 (de) 2000-09-28
DE19912669A1 (de) 2000-09-21
US6613993B1 (en) 2003-09-02
EP1163692B1 (de) 2003-02-05
ATE232331T1 (de) 2003-02-15
EP1163692A1 (de) 2001-12-19

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