DE4494863T1 - Verfahren und Vorrichtung zum chemischen Erzeugen von Anschlußerhebungen auf Halbleiterscheiben - Google Patents
Verfahren und Vorrichtung zum chemischen Erzeugen von Anschlußerhebungen auf HalbleiterscheibenInfo
- Publication number
- DE4494863T1 DE4494863T1 DE4494863T DE4494863T DE4494863T1 DE 4494863 T1 DE4494863 T1 DE 4494863T1 DE 4494863 T DE4494863 T DE 4494863T DE 4494863 T DE4494863 T DE 4494863T DE 4494863 T1 DE4494863 T1 DE 4494863T1
- Authority
- DE
- Germany
- Prior art keywords
- elevations
- connection
- semiconductor wafers
- chemical production
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/1683—Control of electrolyte composition, e.g. measurement, adjustment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI933128A FI98667C (fi) | 1993-07-08 | 1993-07-08 | Menetelmä ja laite kontaktinystyjen muodostamiseksi kemiallisesti puolijohdekiekoille |
PCT/FI1994/000313 WO1995002257A1 (en) | 1993-07-08 | 1994-07-06 | Method and apparatus for chemically generating terminal bumps on semiconductor wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
DE4494863T1 true DE4494863T1 (de) | 1996-08-22 |
Family
ID=8538297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE4494863T Withdrawn DE4494863T1 (de) | 1993-07-08 | 1994-07-06 | Verfahren und Vorrichtung zum chemischen Erzeugen von Anschlußerhebungen auf Halbleiterscheiben |
Country Status (4)
Country | Link |
---|---|
US (1) | US5804456A (de) |
DE (1) | DE4494863T1 (de) |
FI (1) | FI98667C (de) |
WO (1) | WO1995002257A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020152955A1 (en) * | 1999-12-30 | 2002-10-24 | Yezdi Dordi | Apparatus and method for depositing an electroless solution |
US7189313B2 (en) * | 2002-05-09 | 2007-03-13 | Applied Materials, Inc. | Substrate support with fluid retention band |
US6955747B2 (en) * | 2002-09-23 | 2005-10-18 | International Business Machines Corporation | Cam driven paddle assembly for a plating cell |
US7654221B2 (en) * | 2003-10-06 | 2010-02-02 | Applied Materials, Inc. | Apparatus for electroless deposition of metals onto semiconductor substrates |
US7827930B2 (en) | 2004-01-26 | 2010-11-09 | Applied Materials, Inc. | Apparatus for electroless deposition of metals onto semiconductor substrates |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1052646A (de) * | ||||
US3934054A (en) * | 1969-08-25 | 1976-01-20 | Electro Chemical Engineering Gmbh | Electroless metal plating |
US4152467A (en) * | 1978-03-10 | 1979-05-01 | International Business Machines Corporation | Electroless copper plating process with dissolved oxygen maintained in bath |
US4205099A (en) * | 1978-04-14 | 1980-05-27 | Sprague Electric Company | Method for making terminal bumps on semiconductor wafers |
US4262044A (en) * | 1980-05-16 | 1981-04-14 | Kuczma Jr John J | Method for the electroless nickel plating of long bodies |
US4622917A (en) * | 1982-09-27 | 1986-11-18 | Etd Technology, Inc. | Apparatus and method for electroless plating |
US5077099B1 (en) * | 1990-03-14 | 1997-12-02 | Macdermid Inc | Electroless copper plating process and apparatus |
US5198089A (en) * | 1991-10-29 | 1993-03-30 | National Semiconductor Corporation | Plating tank |
JPH07211669A (ja) * | 1994-01-12 | 1995-08-11 | Fujitsu Ltd | めっき装置及びめっき方法 |
-
1993
- 1993-07-08 FI FI933128A patent/FI98667C/fi active
-
1994
- 1994-07-06 US US08/578,691 patent/US5804456A/en not_active Expired - Fee Related
- 1994-07-06 WO PCT/FI1994/000313 patent/WO1995002257A1/en active Application Filing
- 1994-07-06 DE DE4494863T patent/DE4494863T1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
FI98667C (fi) | 1997-07-25 |
FI98667B (fi) | 1997-04-15 |
WO1995002257A1 (en) | 1995-01-19 |
FI933128A (fi) | 1995-01-09 |
US5804456A (en) | 1998-09-08 |
FI933128A0 (fi) | 1993-07-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8141 | Disposal/no request for examination |