DE4396720D2 - Verfahren und Anlage zur Schichtabscheidung - Google Patents

Verfahren und Anlage zur Schichtabscheidung

Info

Publication number
DE4396720D2
DE4396720D2 DE4396720A DE4396720A DE4396720D2 DE 4396720 D2 DE4396720 D2 DE 4396720D2 DE 4396720 A DE4396720 A DE 4396720A DE 4396720 A DE4396720 A DE 4396720A DE 4396720 D2 DE4396720 D2 DE 4396720D2
Authority
DE
Germany
Prior art keywords
plant
layer deposition
deposition
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE4396720A
Other languages
English (en)
Other versions
DE4396720C1 (de
Inventor
Francois Dr Ing Dupont
Erich Dr Bergmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of DE4396720D2 publication Critical patent/DE4396720D2/de
Application granted granted Critical
Publication of DE4396720C1 publication Critical patent/DE4396720C1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0073—Reactive sputtering by exposing the substrates to reactive gases intermittently
    • C23C14/0078—Reactive sputtering by exposing the substrates to reactive gases intermittently by moving the substrates between spatially separate sputtering and reaction stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE4396720A 1992-12-23 1993-12-23 Verfahren und Anlage zur Schichtabscheidung und Verwendung der Anlage Expired - Lifetime DE4396720C1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH392492 1992-12-23
PCT/CH1993/000291 WO1994014996A1 (de) 1992-12-23 1993-12-23 Verfahren und anlage zur schichtabscheidung

Publications (2)

Publication Number Publication Date
DE4396720D2 true DE4396720D2 (de) 1995-01-26
DE4396720C1 DE4396720C1 (de) 2003-07-17

Family

ID=4266426

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4396720A Expired - Lifetime DE4396720C1 (de) 1992-12-23 1993-12-23 Verfahren und Anlage zur Schichtabscheidung und Verwendung der Anlage

Country Status (3)

Country Link
JP (1) JP3679113B2 (de)
DE (1) DE4396720C1 (de)
WO (1) WO1994014996A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19725930C2 (de) * 1997-06-16 2002-07-18 Eberhard Moll Gmbh Dr Verfahren und Anlage zum Behandeln von Substraten mittels Ionen aus einer Niedervoltbogenentladung
DE10347521A1 (de) * 2002-12-04 2004-06-24 Leybold Optics Gmbh Verfahren zur Herstellung Multilayerschicht und Vorrichtung zur Durchführung des Verfahrens
WO2004050944A2 (de) * 2002-12-04 2004-06-17 Leybold Optics Gmbh Verfahren zur herstellung einer multilayerschicht und vorrichtung zur durchführung des verfahrens
SE529426C2 (sv) * 2006-03-21 2007-08-07 Sandvik Intellectual Property Apparat och metod för eggbeläggning i kontinuerlig deponeringslinje

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH631743A5 (de) * 1977-06-01 1982-08-31 Balzers Hochvakuum Verfahren zum aufdampfen von material in einer vakuumaufdampfanlage.
JPS5845892B2 (ja) * 1980-06-23 1983-10-13 大阪真空化学株式会社 スパツタ蒸着装置
DE3027688C2 (de) * 1980-07-22 1982-04-01 Fried. Krupp Gmbh, 4300 Essen Verfahren zur Herstellung eines verschleißfesten Verbundwerkstoffes
DE3426795A1 (de) * 1984-07-20 1986-01-23 Battelle-Institut E.V., 6000 Frankfurt Verfahren zur herstellung von hochverschleissfesten titannitrid-schichten
DE3503398A1 (de) * 1985-02-01 1986-08-07 W.C. Heraeus Gmbh, 6450 Hanau Sputteranlage zum reaktiven beschichten eines substrates mit hartstoffen
DE3503397A1 (de) * 1985-02-01 1986-08-07 W.C. Heraeus Gmbh, 6450 Hanau Sputteranlage zum reaktiven beschichten eines substrates mit hartstoffen
JPH0819518B2 (ja) * 1986-06-02 1996-02-28 株式会社シンクロン 薄膜形成方法および装置
DE3709177A1 (de) * 1987-03-20 1988-09-29 Leybold Ag Verfahren und vorrichtung zur regelung der reaktiven schichtabscheidung auf substraten mittels magnetronkatoden
EP0306612B2 (de) * 1987-08-26 1996-02-28 Balzers Aktiengesellschaft Verfahren zur Aufbringung von Schichten auf Substraten
US4851095A (en) * 1988-02-08 1989-07-25 Optical Coating Laboratory, Inc. Magnetron sputtering apparatus and process
CH680369A5 (de) * 1989-11-22 1992-08-14 Balzers Hochvakuum
DE4011515C1 (en) * 1990-04-10 1990-12-13 W.C. Heraeus Gmbh, 6450 Hanau, De Coating substrate with metal (alloy) - by magnetic sputtering, with substrate mounted on surface held at negative voltage
EP0496053B1 (de) * 1991-01-21 1995-07-26 Balzers Aktiengesellschaft Beschichtetes hochverschleissfestes Werkzeug und physikalisches Beschichtungsverfahren zur Beschichtung von hochverschleissfesten Werkzeugen
DE4115616C2 (de) * 1991-03-16 1994-11-24 Leybold Ag Hartstoff-Mehrlagenschichtsystem für Werkzeuge

Also Published As

Publication number Publication date
JPH07507600A (ja) 1995-08-24
JP3679113B2 (ja) 2005-08-03
WO1994014996A1 (de) 1994-07-07
DE4396720C1 (de) 2003-07-17

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8127 New person/name/address of the applicant

Owner name: UNAXIS BALZERS AG, BALZERS, LI

8607 Notification of search results after publication
8304 Grant after examination procedure
8327 Change in the person/name/address of the patent owner

Owner name: OC OERLIKON BALZERS AG, BALZERS, LI

8327 Change in the person/name/address of the patent owner

Owner name: OERLIKON TRADING AG, TRUEBBACH, TRUEBBACH, CH

8328 Change in the person/name/address of the agent

Representative=s name: DERZEIT KEIN VERTRETER BESTELLT

R071 Expiry of right
R071 Expiry of right