DE4305458C2 - Phasenmoduliertes Interferometer - Google Patents
Phasenmoduliertes InterferometerInfo
- Publication number
- DE4305458C2 DE4305458C2 DE19934305458 DE4305458A DE4305458C2 DE 4305458 C2 DE4305458 C2 DE 4305458C2 DE 19934305458 DE19934305458 DE 19934305458 DE 4305458 A DE4305458 A DE 4305458A DE 4305458 C2 DE4305458 C2 DE 4305458C2
- Authority
- DE
- Germany
- Prior art keywords
- phase
- interferometer
- measuring
- frequency
- arrangement according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 claims description 13
- 230000010363 phase shift Effects 0.000 claims description 11
- 238000011156 evaluation Methods 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 9
- 238000001228 spectrum Methods 0.000 claims description 3
- 238000007796 conventional method Methods 0.000 claims description 2
- 230000001419 dependent effect Effects 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 230000007704 transition Effects 0.000 claims 1
- 239000000835 fiber Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
- G01B9/02028—Two or more reference or object arms in one interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/02051—Integrated design, e.g. on-chip or monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/40—Non-mechanical variable delay line
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J2001/4242—Modulated light, e.g. for synchronizing source and detector circuit
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/0249—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods with modulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
2 Phasenmodulator
3 Laserdiode
4 Detektor
5 Meßstrecke
6 Generator
7 Frequenzteiler
8 Bandpaßfilter
9 Komparator
10 Richtungsdiskriminator
11 Auswerterechner
ω₁, ω₂ Modulationsfrequenzen
ϕ₁, ϕ₂ Amplituden
ωF Filterfrequenz
fo Grundfrequenz
Claims (7)
- - am Phasenmodulator (2) zwei sinusförmige Ansteuersignale mit unterschiedlichen Modulationsfrequenzen (ω₁, ω₂) und Amplituden (ϕ₁, ϕ₂) anliegen, die phasen,- und frequenzstarr gekoppelt sind, und
- - dem Detektor (4) ein Bandpaßfilter (8) nachgeordnet ist, das aus dem Frequenzspektrum des Überlagerungssignales eine Filterfrequenz (ωF) ausfiltert, die der Bedingung ωF = (2m-1)ω₁ = 2nω₂ mit m,n = 1,2,3 . . . und ω₁<ω₂genügt, so daß bei geeigneter Wahl eines von den Amplituden (ϕ₁, ϕ₂) abhängigen Ar beitspunktes ein Signal der StrukturS = const · cos (ωFt - kx)entsteht, das mit üblichen Verfahren zur Bestimmung der Phasenverschiebung ausge wertet wird und bei dem t die Zeit, k die Wellenzahl und x die zu messende Distanz bedeuten.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19934305458 DE4305458C2 (de) | 1993-02-23 | 1993-02-23 | Phasenmoduliertes Interferometer |
DE19934306884 DE4306884C2 (de) | 1993-02-23 | 1993-03-05 | Phasenmoduliertes Interferometer |
DE19934325758 DE4325758A1 (de) | 1993-02-23 | 1993-07-31 | Phasenmoduliertes Interferometer III |
AT93119046T ATE148554T1 (de) | 1993-02-23 | 1993-11-25 | Phasenmoduliertes interferometer |
DE59305343T DE59305343D1 (de) | 1993-02-23 | 1993-11-25 | Phasenmoduliertes Interferometer |
EP93119046A EP0612976B1 (de) | 1993-02-23 | 1993-11-25 | Phasenmoduliertes Interferometer |
US08/189,931 US5459571A (en) | 1993-02-23 | 1994-02-01 | Multiple control frequency phase modulator in phase modulated interferometer precision distance measuring system |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19934305458 DE4305458C2 (de) | 1993-02-23 | 1993-02-23 | Phasenmoduliertes Interferometer |
DE19934306884 DE4306884C2 (de) | 1993-02-23 | 1993-03-05 | Phasenmoduliertes Interferometer |
DE19934325758 DE4325758A1 (de) | 1993-02-23 | 1993-07-31 | Phasenmoduliertes Interferometer III |
Publications (2)
Publication Number | Publication Date |
---|---|
DE4305458A1 DE4305458A1 (de) | 1994-08-25 |
DE4305458C2 true DE4305458C2 (de) | 1997-05-28 |
Family
ID=27204795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19934305458 Expired - Fee Related DE4305458C2 (de) | 1993-02-23 | 1993-02-23 | Phasenmoduliertes Interferometer |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE4305458C2 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9320500D0 (en) * | 1993-10-05 | 1993-11-24 | Rensihaw Plc | Interferometric distance measuring apparatus |
EP1064517B1 (de) * | 1998-03-27 | 2004-09-29 | LITEF GmbH | Verfahren und einrichtung zur absoluten interferometrischen längenmessung |
DE102005035173B4 (de) * | 2005-07-27 | 2016-08-11 | Menlo Systems Gmbh | Interferometer, insbesondere für die Bestimmung und Stabillisierung der relativen Phase kurzer Pulse |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3040514A1 (de) * | 1980-10-28 | 1982-07-22 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren und anordnung zur signalauswertung eines lichtleitfaserrotationssensors |
GB2233445A (en) * | 1989-06-24 | 1991-01-09 | British Aerospace | Ring resonator gyro |
-
1993
- 1993-02-23 DE DE19934305458 patent/DE4305458C2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE4305458A1 (de) | 1994-08-25 |
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Legal Events
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