DE4029075C1 - - Google Patents
Info
- Publication number
- DE4029075C1 DE4029075C1 DE4029075A DE4029075A DE4029075C1 DE 4029075 C1 DE4029075 C1 DE 4029075C1 DE 4029075 A DE4029075 A DE 4029075A DE 4029075 A DE4029075 A DE 4029075A DE 4029075 C1 DE4029075 C1 DE 4029075C1
- Authority
- DE
- Germany
- Prior art keywords
- base plate
- mirror
- piezoceramic
- mirror membrane
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012528 membrane Substances 0.000 claims description 12
- 230000003044 adaptive effect Effects 0.000 claims description 5
- 239000002826 coolant Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Lasers (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4029075A DE4029075C1 (ja) | 1990-09-13 | 1990-09-13 | |
GB9119324A GB2249641B (en) | 1990-09-13 | 1991-09-10 | Tiltable deformable mirror for angle and focus correcton of a laser beam |
ITMI912398A IT1251570B (it) | 1990-09-13 | 1991-09-10 | Dispositivo per correggere angoli e distanze focali |
FR9111250A FR2666907B1 (fr) | 1990-09-13 | 1991-09-12 | Dispositif a miroir deformable pour la correction de l'angle et de la focale. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4029075A DE4029075C1 (ja) | 1990-09-13 | 1990-09-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE4029075C1 true DE4029075C1 (ja) | 1991-12-05 |
Family
ID=6414190
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE4029075A Expired - Lifetime DE4029075C1 (ja) | 1990-09-13 | 1990-09-13 |
Country Status (4)
Country | Link |
---|---|
DE (1) | DE4029075C1 (ja) |
FR (1) | FR2666907B1 (ja) |
GB (1) | GB2249641B (ja) |
IT (1) | IT1251570B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4304059A1 (de) * | 1993-02-11 | 1994-08-18 | Diehl Gmbh & Co | Spiegeleinrichtung mit einem deformierbaren Spiegelelement |
DE10001900A1 (de) * | 2000-01-19 | 2001-08-16 | Diehl Munitionssysteme Gmbh | Deformierbarer Spiegel, insbesondere für eine Laserstrahl-Materialbearbeitungseinrichtung |
DE4236355C2 (de) * | 1992-10-28 | 2001-11-08 | Zeiss Carl | Adaptiver Membranspiegel |
DE4308315B4 (de) * | 1991-11-23 | 2005-01-20 | Diehl Stiftung & Co.Kg | Deformierbarer Spiegel |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1576407A2 (en) | 2002-12-23 | 2005-09-21 | BAE Systems PLC | Deformable-mirror cooling |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2757585B2 (de) * | 1976-12-24 | 1981-02-05 | Office National D'etudes Et De Recherches Aerospatiales O.N.E.R.A., Chatillon- Sous-Bagneux, Hauts-De-Seine (Frankreich) | Einrichtung zum selbsttätigen Ausrichten eines Laserstrahls auf ein Ziel |
DE3036083A1 (de) * | 1980-09-25 | 1982-04-29 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Spiegel mit variabler kruemmung |
US4674848A (en) * | 1986-03-17 | 1987-06-23 | Itek Corporation | Laser mirror having a cooled, deformable surface |
DE3422232C2 (ja) * | 1984-06-15 | 1987-11-26 | Diehl Gmbh & Co, 8500 Nuernberg, De |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4239343A (en) * | 1979-09-04 | 1980-12-16 | General Dynamics Corporation | Actuator configuration for a deformable mirror |
US4425026A (en) * | 1981-06-19 | 1984-01-10 | Baker Manufacturing Company | Refocusing mirror manipulator |
US4408832A (en) * | 1981-12-07 | 1983-10-11 | United Technologies Corporation | Mirror adjusting fixture |
JPS60177316A (ja) * | 1984-02-24 | 1985-09-11 | Ngk Spark Plug Co Ltd | 光偏向装置 |
-
1990
- 1990-09-13 DE DE4029075A patent/DE4029075C1/de not_active Expired - Lifetime
-
1991
- 1991-09-10 GB GB9119324A patent/GB2249641B/en not_active Expired - Fee Related
- 1991-09-10 IT ITMI912398A patent/IT1251570B/it active IP Right Grant
- 1991-09-12 FR FR9111250A patent/FR2666907B1/fr not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2757585B2 (de) * | 1976-12-24 | 1981-02-05 | Office National D'etudes Et De Recherches Aerospatiales O.N.E.R.A., Chatillon- Sous-Bagneux, Hauts-De-Seine (Frankreich) | Einrichtung zum selbsttätigen Ausrichten eines Laserstrahls auf ein Ziel |
DE3036083A1 (de) * | 1980-09-25 | 1982-04-29 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Spiegel mit variabler kruemmung |
DE3422232C2 (ja) * | 1984-06-15 | 1987-11-26 | Diehl Gmbh & Co, 8500 Nuernberg, De | |
US4674848A (en) * | 1986-03-17 | 1987-06-23 | Itek Corporation | Laser mirror having a cooled, deformable surface |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4308315B4 (de) * | 1991-11-23 | 2005-01-20 | Diehl Stiftung & Co.Kg | Deformierbarer Spiegel |
DE4236355C2 (de) * | 1992-10-28 | 2001-11-08 | Zeiss Carl | Adaptiver Membranspiegel |
DE4304059A1 (de) * | 1993-02-11 | 1994-08-18 | Diehl Gmbh & Co | Spiegeleinrichtung mit einem deformierbaren Spiegelelement |
DE10001900A1 (de) * | 2000-01-19 | 2001-08-16 | Diehl Munitionssysteme Gmbh | Deformierbarer Spiegel, insbesondere für eine Laserstrahl-Materialbearbeitungseinrichtung |
DE10001900B4 (de) * | 2000-01-19 | 2004-02-26 | Diehl Munitionssysteme Gmbh & Co. Kg | Deformierbarer Spiegel |
Also Published As
Publication number | Publication date |
---|---|
FR2666907A1 (fr) | 1992-03-20 |
GB2249641B (en) | 1994-03-30 |
GB2249641A (en) | 1992-05-13 |
ITMI912398A1 (it) | 1993-03-10 |
FR2666907B1 (fr) | 1993-11-05 |
GB9119324D0 (en) | 1991-10-23 |
IT1251570B (it) | 1995-05-17 |
ITMI912398A0 (it) | 1991-09-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8100 | Publication of patent without earlier publication of application | ||
D1 | Grant (no unexamined application published) patent law 81 | ||
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: DEUTSCHE AEROSPACE AG, 8000 MUENCHEN, DE |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: DAIMLER-BENZ AEROSPACE AKTIENGESELLSCHAFT, 80804 M |
|
8339 | Ceased/non-payment of the annual fee |