DE3938302C2 - - Google Patents
Info
- Publication number
- DE3938302C2 DE3938302C2 DE3938302A DE3938302A DE3938302C2 DE 3938302 C2 DE3938302 C2 DE 3938302C2 DE 3938302 A DE3938302 A DE 3938302A DE 3938302 A DE3938302 A DE 3938302A DE 3938302 C2 DE3938302 C2 DE 3938302C2
- Authority
- DE
- Germany
- Prior art keywords
- diodes
- bias
- signal charge
- image sensor
- charges
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000002347 injection Methods 0.000 claims description 101
- 239000007924 injection Substances 0.000 claims description 101
- 230000005540 biological transmission Effects 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 27
- 239000004065 semiconductor Substances 0.000 claims description 15
- 239000007787 solid Substances 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 6
- 230000006870 function Effects 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 239000004020 conductor Substances 0.000 description 7
- 229920005591 polysilicon Polymers 0.000 description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 210000003608 fece Anatomy 0.000 description 3
- 230000036316 preload Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 241001663154 Electron Species 0.000 description 1
- 241001235534 Graphis <ascomycete fungus> Species 0.000 description 1
- 101100400378 Mus musculus Marveld2 gene Proteins 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000010871 livestock manure Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000003334 potential effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14831—Area CCD imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29014888 | 1988-11-18 | ||
| JP1015511A JP2777162B2 (ja) | 1989-01-25 | 1989-01-25 | 固体撮像装置の駆動方法 |
| JP1266160A JPH03129771A (ja) | 1989-10-16 | 1989-10-16 | 固体撮像装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3938302A1 DE3938302A1 (de) | 1990-05-23 |
| DE3938302C2 true DE3938302C2 (US07291463-20071106-C00074.png) | 1992-03-12 |
Family
ID=27281038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3938302A Granted DE3938302A1 (de) | 1988-11-18 | 1989-11-17 | Festkoerper-bildsensor |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US5063449A (US07291463-20071106-C00074.png) |
| KR (1) | KR0127300B1 (US07291463-20071106-C00074.png) |
| DE (1) | DE3938302A1 (US07291463-20071106-C00074.png) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5235426A (en) * | 1988-08-24 | 1993-08-10 | Oki Electric Industry Co., Ltd. | Solid state image sensing device having no field isolation layer |
| JP2604905B2 (ja) * | 1990-11-29 | 1997-04-30 | 宇宙開発事業団 | 固体撮像装置 |
| US5298777A (en) * | 1991-02-12 | 1994-03-29 | Gold Star Electron Co., Ltd. | CCD image sensor of interlaced scanning type |
| US5307169A (en) * | 1991-05-07 | 1994-04-26 | Olympus Optical Co., Ltd. | Solid-state imaging device using high relative dielectric constant material as insulating film |
| US5502488A (en) * | 1991-05-07 | 1996-03-26 | Olympus Optical Co., Ltd. | Solid-state imaging device having a low impedance structure |
| JPH06164826A (ja) * | 1992-11-24 | 1994-06-10 | Toshiba Corp | 固体撮像装置とその駆動方法 |
| US5504527A (en) * | 1994-06-28 | 1996-04-02 | Eastman Kodak Company | Image sensor with improved charge transfer inefficiency characteristics |
| US6300977B1 (en) * | 1995-04-07 | 2001-10-09 | Ifire Technology Inc. | Read-out circuit for active matrix imaging arrays |
| JP4300635B2 (ja) * | 1999-07-22 | 2009-07-22 | コニカミノルタホールディングス株式会社 | 固体撮像装置 |
| WO2002030109A1 (fr) * | 2000-10-03 | 2002-04-11 | Sony Corporation | Dispositif et procede de formation d"images |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63133667A (ja) * | 1986-11-26 | 1988-06-06 | Ricoh Co Ltd | 密着形光電変換装置 |
| JPS63148778A (ja) * | 1986-12-11 | 1988-06-21 | Sony Corp | 固体撮像素子 |
| US4912560A (en) * | 1988-01-29 | 1990-03-27 | Kabushiki Kaisha Toshiba | Solid state image sensing device |
| US4908518A (en) * | 1989-02-10 | 1990-03-13 | Eastman Kodak Company | Interline transfer CCD image sensing device with electrode structure for each pixel |
-
1989
- 1989-11-16 US US07/437,260 patent/US5063449A/en not_active Expired - Lifetime
- 1989-11-17 DE DE3938302A patent/DE3938302A1/de active Granted
- 1989-11-18 KR KR1019890016770A patent/KR0127300B1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE3938302A1 (de) | 1990-05-23 |
| KR900008677A (ko) | 1990-06-03 |
| KR0127300B1 (ko) | 1998-04-02 |
| US5063449A (en) | 1991-11-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8320 | Willingness to grant licences declared (paragraph 23) | ||
| 8339 | Ceased/non-payment of the annual fee |