DE3932443C1 - - Google Patents

Info

Publication number
DE3932443C1
DE3932443C1 DE3932443A DE3932443A DE3932443C1 DE 3932443 C1 DE3932443 C1 DE 3932443C1 DE 3932443 A DE3932443 A DE 3932443A DE 3932443 A DE3932443 A DE 3932443A DE 3932443 C1 DE3932443 C1 DE 3932443C1
Authority
DE
Germany
Prior art keywords
temperature
differential pressure
measuring
measuring device
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3932443A
Other languages
German (de)
English (en)
Inventor
Peter Dipl.-Ing. 7500 Karlsruhe De Gerst
Wulf 7869 Boellen De Springhart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Priority to DE3932443A priority Critical patent/DE3932443C1/de
Priority to DE90118312T priority patent/DE59003595D1/de
Priority to EP90118312A priority patent/EP0420105B1/de
Priority to FI904735A priority patent/FI100274B/fi
Priority to JP2257618A priority patent/JP2515425B2/ja
Application granted granted Critical
Publication of DE3932443C1 publication Critical patent/DE3932443C1/de
Priority to US07/719,674 priority patent/US5097712A/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE3932443A 1989-09-28 1989-09-28 Expired - Fee Related DE3932443C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE3932443A DE3932443C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-09-28 1989-09-28
DE90118312T DE59003595D1 (de) 1989-09-28 1990-09-24 Differenzdruckmessgerät mit Selbstüberwachung.
EP90118312A EP0420105B1 (de) 1989-09-28 1990-09-24 Differenzdruckmessgerät mit Selbstüberwachung
FI904735A FI100274B (fi) 1989-09-28 1990-09-26 Paine-eromittari
JP2257618A JP2515425B2 (ja) 1989-09-28 1990-09-28 差圧測定装置
US07/719,674 US5097712A (en) 1989-09-28 1991-06-24 Differential pressure measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3932443A DE3932443C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-09-28 1989-09-28

Publications (1)

Publication Number Publication Date
DE3932443C1 true DE3932443C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-20

Family

ID=6390424

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3932443A Expired - Fee Related DE3932443C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-09-28 1989-09-28
DE90118312T Expired - Lifetime DE59003595D1 (de) 1989-09-28 1990-09-24 Differenzdruckmessgerät mit Selbstüberwachung.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE90118312T Expired - Lifetime DE59003595D1 (de) 1989-09-28 1990-09-24 Differenzdruckmessgerät mit Selbstüberwachung.

Country Status (5)

Country Link
US (1) US5097712A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0420105B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP2515425B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (2) DE3932443C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FI (1) FI100274B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4124662A1 (de) * 1991-07-25 1993-01-28 Fibronix Sensoren Gmbh Relativdrucksensor
DE19633630A1 (de) * 1996-08-21 1998-02-26 Endress Hauser Gmbh Co Auswerteeinheit eines Differenzdrucksensors
DE10117142A1 (de) * 2001-04-05 2002-10-10 Endress & Hauser Gmbh & Co Kg Kapazitiver Differenz-Drucksensor
US6564486B1 (en) 1998-07-29 2003-05-20 Submedia, Llc Apparatus for displaying images to viewers in motion
DE102010062622A1 (de) * 2010-12-08 2012-06-14 Ifm Electronic Gmbh Verfahren zur Selbstüberwachung einer keramischen Druckmesszelle eines kapazitiven Drucksensors und eine Auswerteschaltung zur Durchführung des Verfahrens

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4110447A1 (de) * 1991-03-29 1992-10-01 Philips Patentverwaltung Differenzdruckmessgeraet
EP0812414B2 (en) * 1995-02-28 2006-06-14 Rosemount Inc. Pressure transmitter with remote seal diaphragm and correction for temperature and vertical position ( also diaphragm stiffness )
DE19722549A1 (de) * 1997-05-30 1998-12-03 Bosch Gmbh Robert Elektrische Meßeinrichtung bzw. elektrisches Meßverfahren zur Erzeugung eines elektrischen Signals
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
US6612175B1 (en) 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
KR100411476B1 (ko) * 2001-09-24 2003-12-18 주식회사코닉스 정전 용량식 진공센서의 제조방법 및 그 진공 센서를이용한 진공 검출장치
DE10229702A1 (de) * 2002-07-02 2004-01-29 Endress + Hauser Gmbh + Co. Kg Transmitter
FR2867054B1 (fr) * 2004-03-04 2006-09-15 Future Medical System Systeme d'endoscopie et connecteur a detecteur de pression destine a un tel systeme
US7295131B2 (en) * 2005-01-07 2007-11-13 Rosemount Inc. Diagnostic system for detecting rupture or thinning of diaphragms
US7365973B2 (en) * 2006-01-19 2008-04-29 American Power Conversion Corporation Cooling system and method
JP2008008688A (ja) * 2006-06-27 2008-01-17 Yamatake Corp 容量式圧力センサ
DE102009054882A1 (de) * 2009-12-17 2011-06-22 Endress + Hauser GmbH + Co. KG, 79689 Messvorrichtung
JP5548531B2 (ja) * 2010-06-17 2014-07-16 アズビル株式会社 デュアル物理量センサ
EP2432249A1 (en) 2010-07-02 2012-03-21 Knowles Electronics Asia PTE. Ltd. Microphone
DE102010063066B4 (de) * 2010-12-14 2016-06-02 Endress + Hauser Gmbh + Co. Kg Verfahren und Vorrichtung zum Überwachen eines Druckmessaufnehmers in Prozessanlagen
DE102014119407A1 (de) 2014-12-22 2016-06-23 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor und Differenzdruckmessaufnehmer mit einem solchen Differenzdrucksensor
CN110703015B (zh) * 2019-09-27 2021-12-07 西安西电物联技术有限公司 一种基于差压的电容器监测方法
CN110906990B (zh) * 2019-11-14 2021-05-25 天津航空机电有限公司 基于文丘里管的差压式流量温度传感器结构及测量方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3504329C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-02-08 1987-11-19 Philips Patentverwaltung Gmbh, 2000 Hamburg, De
DE3340834C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1983-11-11 1988-05-26 Philips Patentverwaltung Gmbh, 2000 Hamburg, De
DE3414896C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-04-19 1988-06-01 Philips Patentverwaltung Gmbh, 2000 Hamburg, De
DE3705321A1 (de) * 1987-02-19 1988-09-01 Linde Ag Geraet zur messung von druckdifferenzen
DE3321580C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1983-06-15 1989-03-02 Philips Patentverwaltung Gmbh, 2000 Hamburg, De
DE3839864A1 (de) * 1987-11-27 1989-06-08 Hitachi Ltd Messwertgeber fuer differenzdruck

Family Cites Families (22)

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Publication number Priority date Publication date Assignee Title
US3355949A (en) * 1964-08-17 1967-12-05 Albert A Elwood Crystal temperature and pressure transucer
US3646538A (en) * 1969-10-27 1972-02-29 Rosemount Eng Co Ltd Transducer circuitry for converting a capacitance signal to a dc current signal
DE2021479A1 (de) * 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
US3715638A (en) * 1971-05-10 1973-02-06 Bendix Corp Temperature compensator for capacitive pressure transducers
US3783374A (en) * 1972-04-07 1974-01-01 Sundstrand Data Control Capacitance difference detector circuit
DE2364027A1 (de) * 1973-12-21 1975-07-03 Siemens Ag Differenzdruckmesszelle mit elektrischem abgriff
JPS5233575A (en) * 1975-09-09 1977-03-14 Fuji Electric Co Ltd Differential pressure measuring device
US4177496A (en) * 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
GB1563894A (en) * 1976-03-12 1980-04-02 Kavlico Corp Capacitive pressure transducer and method for making same
JPS5829862B2 (ja) * 1977-05-14 1983-06-25 富士電機株式会社 圧力測定装置
JPS55103416A (en) * 1979-02-02 1980-08-07 Hitachi Ltd Fault detector for plant state detector
GB2048488B (en) * 1979-04-26 1983-04-27 Rosemount Eng Co Ltd Differential pressure sensing apparatus
DE3238430A1 (de) * 1982-10-16 1984-04-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdrucksensor
US4598381A (en) * 1983-03-24 1986-07-01 Rosemount Inc. Pressure compensated differential pressure sensor and method
DE3404329A1 (de) * 1984-02-08 1985-08-08 Deutsche Gesellschaft für Wiederaufarbeitung von Kernbrennstoffen mbH, 3000 Hannover Lager fuer radioaktive abfaelle und abgebrannte brennelemente
WO1985004474A1 (en) * 1984-03-30 1985-10-10 Rosemount Inc. Pressure compensated differential pressure sensor and method
US4735098A (en) * 1985-11-19 1988-04-05 Kavlico Corporation Dual diaphragm differential pressure transducer
US4680971A (en) * 1985-11-19 1987-07-21 Kavlico Corporation Dual diaphragm differential pressure transducer
US4872349A (en) * 1986-10-31 1989-10-10 General Electric Company Microcomputerized force transducer
JPH061228B2 (ja) * 1987-08-13 1994-01-05 富士電機株式会社 静電容量式圧力検出器
US4866640A (en) * 1987-08-20 1989-09-12 Granville-Phillips Company Temperature compensation for pressure gauge
JPH0526485Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-11-27 1993-07-05

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3321580C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1983-06-15 1989-03-02 Philips Patentverwaltung Gmbh, 2000 Hamburg, De
DE3340834C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1983-11-11 1988-05-26 Philips Patentverwaltung Gmbh, 2000 Hamburg, De
DE3414896C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-04-19 1988-06-01 Philips Patentverwaltung Gmbh, 2000 Hamburg, De
DE3504329C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-02-08 1987-11-19 Philips Patentverwaltung Gmbh, 2000 Hamburg, De
DE3705321A1 (de) * 1987-02-19 1988-09-01 Linde Ag Geraet zur messung von druckdifferenzen
DE3839864A1 (de) * 1987-11-27 1989-06-08 Hitachi Ltd Messwertgeber fuer differenzdruck

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4124662A1 (de) * 1991-07-25 1993-01-28 Fibronix Sensoren Gmbh Relativdrucksensor
DE19633630A1 (de) * 1996-08-21 1998-02-26 Endress Hauser Gmbh Co Auswerteeinheit eines Differenzdrucksensors
EP0826953A3 (de) * 1996-08-21 1998-07-22 Endress + Hauser GmbH + Co. Auswerteeinheit eines kapazitiven Drucksensor
US5969258A (en) * 1996-08-21 1999-10-19 Endress & Hauser Gmbh & Co. Evaluation unit of a differential-pressure sensor
US6564486B1 (en) 1998-07-29 2003-05-20 Submedia, Llc Apparatus for displaying images to viewers in motion
US6807760B2 (en) 1998-07-29 2004-10-26 Submedia, Llc Apparatus for displaying images to viewers in motion
DE10117142A1 (de) * 2001-04-05 2002-10-10 Endress & Hauser Gmbh & Co Kg Kapazitiver Differenz-Drucksensor
US6925884B2 (en) 2001-04-05 2005-08-09 Endress + Hauser Gmbh + Co. Kg Capacitive differential pressure sensor
DE102010062622A1 (de) * 2010-12-08 2012-06-14 Ifm Electronic Gmbh Verfahren zur Selbstüberwachung einer keramischen Druckmesszelle eines kapazitiven Drucksensors und eine Auswerteschaltung zur Durchführung des Verfahrens

Also Published As

Publication number Publication date
JP2515425B2 (ja) 1996-07-10
FI904735A0 (fi) 1990-09-26
EP0420105A2 (de) 1991-04-03
FI100274B (fi) 1997-10-31
EP0420105B1 (de) 1993-11-24
DE59003595D1 (de) 1994-01-05
JPH03122536A (ja) 1991-05-24
US5097712A (en) 1992-03-24
EP0420105A3 (en) 1991-09-04

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Legal Events

Date Code Title Description
8100 Publication of the examined application without publication of unexamined application
D1 Grant (no unexamined application published) patent law 81
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ENDRESS + HAUSER GMBH + CO, 79689 MAULBURG, DE

8339 Ceased/non-payment of the annual fee