DE3925391A1 - Thermosaeule - Google Patents
ThermosaeuleInfo
- Publication number
- DE3925391A1 DE3925391A1 DE3925391A DE3925391A DE3925391A1 DE 3925391 A1 DE3925391 A1 DE 3925391A1 DE 3925391 A DE3925391 A DE 3925391A DE 3925391 A DE3925391 A DE 3925391A DE 3925391 A1 DE3925391 A1 DE 3925391A1
- Authority
- DE
- Germany
- Prior art keywords
- thermopile
- chip
- thermopile according
- silicon
- band
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 27
- 239000010703 silicon Substances 0.000 claims abstract description 26
- 230000005855 radiation Effects 0.000 claims abstract description 16
- 239000004020 conductor Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 239000004071 soot Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 8
- 238000010276 construction Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 8
- 235000010210 aluminium Nutrition 0.000 description 7
- 239000012528 membrane Substances 0.000 description 5
- 239000006096 absorbing agent Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 210000004072 lung Anatomy 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000010561 standard procedure Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910003336 CuNi Inorganic materials 0.000 description 1
- NHWNVPNZGGXQQV-UHFFFAOYSA-J [Si+4].[O-]N=O.[O-]N=O.[O-]N=O.[O-]N=O Chemical compound [Si+4].[O-]N=O.[O-]N=O.[O-]N=O.[O-]N=O NHWNVPNZGGXQQV-UHFFFAOYSA-J 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3925391A DE3925391A1 (de) | 1989-08-01 | 1989-08-01 | Thermosaeule |
| DE4091364A DE4091364C1 (enrdf_load_stackoverflow) | 1989-08-01 | 1990-07-27 | |
| DE90DE9000578D DE4091364D2 (en) | 1989-08-01 | 1990-07-27 | Thermosaeulen-strahlungsdetektor |
| PCT/DE1990/000578 WO1991002229A1 (de) | 1989-08-01 | 1990-07-27 | Thermosäulen-strahlungsdetektor |
| EP90910570A EP0485401A1 (de) | 1989-08-01 | 1990-07-27 | Thermosäulen-strahlungsdetektor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3925391A DE3925391A1 (de) | 1989-08-01 | 1989-08-01 | Thermosaeule |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3925391A1 true DE3925391A1 (de) | 1991-02-07 |
Family
ID=6386259
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3925391A Withdrawn DE3925391A1 (de) | 1989-08-01 | 1989-08-01 | Thermosaeule |
| DE90DE9000578D Expired - Lifetime DE4091364D2 (en) | 1989-08-01 | 1990-07-27 | Thermosaeulen-strahlungsdetektor |
| DE4091364A Expired - Fee Related DE4091364C1 (enrdf_load_stackoverflow) | 1989-08-01 | 1990-07-27 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE90DE9000578D Expired - Lifetime DE4091364D2 (en) | 1989-08-01 | 1990-07-27 | Thermosaeulen-strahlungsdetektor |
| DE4091364A Expired - Fee Related DE4091364C1 (enrdf_load_stackoverflow) | 1989-08-01 | 1990-07-27 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0485401A1 (enrdf_load_stackoverflow) |
| DE (3) | DE3925391A1 (enrdf_load_stackoverflow) |
| WO (1) | WO1991002229A1 (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1296122A3 (de) * | 2001-09-10 | 2003-06-11 | PerkinElmer Optoelectronics GmbH | Sensor zum berührungslosen Messen einer Temperatur |
| EP0693677B1 (de) * | 1994-07-22 | 2005-04-06 | Pfeiffer, Ulrich | Stromversorgungseinrichtung, insbesondere für elektrisch betriebene Messinstrumente |
| WO2005121728A3 (de) * | 2004-06-09 | 2006-04-27 | Perkinelmer Optoelectronics | Sensorelement |
| CN112964396A (zh) * | 2021-02-08 | 2021-06-15 | 中国科学院力学研究所 | 一种基于辐射测温的量热计 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2760530B1 (fr) * | 1997-03-07 | 1999-04-16 | Setaram Societe D Etudes D Aut | Dispositif de mesure des proprietes thermiques et/ou reactionnelles d'un ou plusieurs echantillons de matiere |
| DE10033589A1 (de) * | 2000-07-11 | 2002-01-31 | Bosch Gmbh Robert | Mikrostrukturierter Thermosensor |
| DE102010042108B4 (de) | 2010-01-18 | 2013-10-17 | Heimann Sensor Gmbh | Thermopile-Infrarot-Sensor in monolithischer Si-Mikromechanik |
| US10794768B2 (en) | 2016-06-21 | 2020-10-06 | Heimann Sensor Gmbh | Thermopile infrared individual sensor for measuring temperature or detecting gas |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2064584A5 (enrdf_load_stackoverflow) * | 1969-09-30 | 1971-07-23 | Labo Electronique Physique | |
| US4558342A (en) * | 1983-05-31 | 1985-12-10 | Rockwell International Corporation | Thermoelectric infrared detector array |
-
1989
- 1989-08-01 DE DE3925391A patent/DE3925391A1/de not_active Withdrawn
-
1990
- 1990-07-27 DE DE90DE9000578D patent/DE4091364D2/de not_active Expired - Lifetime
- 1990-07-27 DE DE4091364A patent/DE4091364C1/de not_active Expired - Fee Related
- 1990-07-27 WO PCT/DE1990/000578 patent/WO1991002229A1/de not_active Application Discontinuation
- 1990-07-27 EP EP90910570A patent/EP0485401A1/de not_active Withdrawn
Non-Patent Citations (1)
| Title |
|---|
| J.Vac.Sci.Techn.A, Bd. 5, 1987, S. 2454-2457 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0693677B1 (de) * | 1994-07-22 | 2005-04-06 | Pfeiffer, Ulrich | Stromversorgungseinrichtung, insbesondere für elektrisch betriebene Messinstrumente |
| EP1296122A3 (de) * | 2001-09-10 | 2003-06-11 | PerkinElmer Optoelectronics GmbH | Sensor zum berührungslosen Messen einer Temperatur |
| WO2005121728A3 (de) * | 2004-06-09 | 2006-04-27 | Perkinelmer Optoelectronics | Sensorelement |
| US8215831B2 (en) | 2004-06-09 | 2012-07-10 | Excelitas Technologies Gmbh & Co. Kg | Sensor element |
| CN112964396A (zh) * | 2021-02-08 | 2021-06-15 | 中国科学院力学研究所 | 一种基于辐射测温的量热计 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0485401A1 (de) | 1992-05-20 |
| DE4091364D2 (en) | 1992-01-30 |
| DE4091364C1 (enrdf_load_stackoverflow) | 1993-07-15 |
| WO1991002229A1 (de) | 1991-02-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE4102524C2 (de) | Infrarotsensor | |
| EP0966660B1 (de) | Thermopile-sensor und strahlungsthermometer mit einem thermopile-sensor | |
| DE60117929T2 (de) | Infrarotdetektorelement und Temperaturmessgerät | |
| DE69123575T2 (de) | Thermischer infrarotdetektor des bolometertyps mit halbleiterfilm | |
| DE60027952T2 (de) | Infrarotdetektor und Verfahren zu seiner Herstellung | |
| DE69313337T2 (de) | Infrarotsensor und Verfahren für dessen Herstellung | |
| DE69210735T2 (de) | Ungekühlter Infrarot-Detektor und Herstellungsverfahren dazu | |
| DE69129104T2 (de) | Fühlvorrichtung zur messung des charakteristischen wertes eines zu messenden elementes unter verwendung der veränderungen des thermischen widerstands | |
| DE2204153C3 (de) | Temperaturmeßfühler für sehr tiefe Temperaturen | |
| DE112011101444T5 (de) | Temperatursensoreinrichtung und Strahlungsthermometer, der diese Vorrichtung verwendet, Herstellungsverfahren für Temperatursensorvorrichtungen, Mehrlagen-Dünnfilm-Thermosäule, die einen Fotoresistfilm und ein Strahlungsthermometer unter Benutzung dieser Thermosäule verwendet, sowie Herstellungsverfahren einer mehrlagigen Dünnfilm-Thermosäule | |
| EP0087514B1 (de) | Infrarotdetektor | |
| DE10053326A1 (de) | Mikromechanisches Bauelement und Herstellungsverfahren | |
| WO2004102140A1 (de) | Infrarotsensor mit optimierter flächennutzung | |
| DE102009045302A1 (de) | Mikrostrukturierter Sensor zur Detektion von IR-Strahlung | |
| DE3925391A1 (de) | Thermosaeule | |
| DE4221037C2 (de) | Thermischer Strahlungssensor | |
| DE69515139T2 (de) | Strahlungsdetektor | |
| DE10033589A1 (de) | Mikrostrukturierter Thermosensor | |
| DE10113190B4 (de) | Feuchtesensor nach dem Taupunktprinzip auf Basis einer dünnen Membran | |
| DD147872B1 (de) | Strahlungsdetektor fuer absolutmessungen | |
| DE19708053A1 (de) | Verfahren und Sensoranordnung zur Dedektion von Kondensationen an Oberflächen | |
| DE19804487C2 (de) | Thermoelektrischer Detektor zur Detektion von kontinuierlicher und gepulster Strahlung und Verfahren zur Herstellung | |
| EP3963300B1 (de) | Differentialkalorimeter mit hoher sensitivität | |
| DE19516480C1 (de) | Mikrosensor zur Bestimmung von Wärmestromdichten und Wärmedurchgangszahlen | |
| EP0025529B1 (de) | Bolometrischer Strahlungsempfänger und Verfahren zu seiner Herstellung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8143 | Lapsed due to claiming internal priority |