DE3884165T2 - Waschverfahren für Superpräzisionsanlagen. - Google Patents

Waschverfahren für Superpräzisionsanlagen.

Info

Publication number
DE3884165T2
DE3884165T2 DE88120741T DE3884165T DE3884165T2 DE 3884165 T2 DE3884165 T2 DE 3884165T2 DE 88120741 T DE88120741 T DE 88120741T DE 3884165 T DE3884165 T DE 3884165T DE 3884165 T2 DE3884165 T2 DE 3884165T2
Authority
DE
Germany
Prior art keywords
washing process
precision systems
super precision
super
systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88120741T
Other languages
English (en)
Other versions
DE3884165D1 (de
Inventor
Tadayuki Imanaka
Shoji Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIKKO BIO TECHNICA CO
Original Assignee
NIKKO BIO TECHNICA CO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIKKO BIO TECHNICA CO filed Critical NIKKO BIO TECHNICA CO
Application granted granted Critical
Publication of DE3884165D1 publication Critical patent/DE3884165D1/de
Publication of DE3884165T2 publication Critical patent/DE3884165T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/38—Products with no well-defined composition, e.g. natural products
    • C11D3/386—Preparations containing enzymes, e.g. protease or amylase
    • C11D3/38627—Preparations containing enzymes, e.g. protease or amylase containing lipase
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/38—Products with no well-defined composition, e.g. natural products
    • C11D3/386—Preparations containing enzymes, e.g. protease or amylase
    • C11D3/38636—Preparations containing enzymes, e.g. protease or amylase containing enzymes other than protease, amylase, lipase, cellulase, oxidase or reductase
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/38—Products with no well-defined composition, e.g. natural products
    • C11D3/386—Preparations containing enzymes, e.g. protease or amylase
    • C11D3/38645—Preparations containing enzymes, e.g. protease or amylase containing cellulase
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/40—Specific cleaning or washing processes
    • C11D2111/46—Specific cleaning or washing processes applying energy, e.g. irradiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Detergent Compositions (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
DE88120741T 1987-12-12 1988-12-12 Waschverfahren für Superpräzisionsanlagen. Expired - Fee Related DE3884165T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62315021A JP2573854B2 (ja) 1987-12-12 1987-12-12 超精密装置の超精密洗浄方法

Publications (2)

Publication Number Publication Date
DE3884165D1 DE3884165D1 (de) 1993-10-21
DE3884165T2 true DE3884165T2 (de) 1994-04-21

Family

ID=18060468

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88120741T Expired - Fee Related DE3884165T2 (de) 1987-12-12 1988-12-12 Waschverfahren für Superpräzisionsanlagen.

Country Status (4)

Country Link
US (1) US5078802A (de)
EP (1) EP0320852B1 (de)
JP (1) JP2573854B2 (de)
DE (1) DE3884165T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5030377A (en) * 1988-11-11 1991-07-09 Kao Corporation Detergent compositions containing starch debranching enzymes
ES2102677T3 (es) * 1992-09-25 1997-08-01 Unilever Nv Procedimiento de limpieza.
EP0709452A1 (de) * 1994-10-27 1996-05-01 The Procter & Gamble Company Xylanasenhaltige Reinigungsmittel
AU2198097A (en) * 1997-03-07 1998-09-22 Procter & Gamble Company, The Cleaning compositions comprising xylan degrading alkaline enzyme and non-plant cell walls degrading enzyme
DE69918855T2 (de) 1998-11-16 2005-07-21 The Procter & Gamble Company, Cincinnati Reinigungsprodukt, welches schall- oder ultraschallwellen verwendet
US6682923B1 (en) 1999-05-12 2004-01-27 Xencor Thermostable alkaliphilic xylanase
WO2001092487A2 (en) * 2000-05-31 2001-12-06 National Research Council Of Canada Modified xylanases exhibiting increased thermophilicity and alkalophilicity
US7183248B2 (en) * 2001-08-23 2007-02-27 Treyco Supply Co. Enzymatic cleaner having high pH stability
US7510860B1 (en) 2001-11-21 2009-03-31 National Research Council Of Canada Xylanases with enhanced thermophilicity and alkalophilicity
DE102005008939A1 (de) * 2005-02-26 2006-09-21 Sms Demag Ag Verfahren und Vorrichtung zum Reiningen eines Metallbandes
FR2897198B1 (fr) * 2006-02-08 2008-09-19 Commissariat Energie Atomique Structure d'interconnexions et procede de realisation
US7723712B2 (en) * 2006-03-17 2010-05-25 Micron Technology, Inc. Reduced power consumption phase change memory and methods for forming the same
WO2007115391A1 (en) * 2006-04-12 2007-10-18 National Research Council Of Cananda Modification of xylanases to increase thermophilicity, thermostability and alkalophilicity

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2961354A (en) * 1958-10-28 1960-11-22 Bell Telephone Labor Inc Surface treatment of semiconductive devices
DE2130833A1 (de) * 1971-06-22 1973-01-11 Brinkmann Kg Wilhelm Verfahren zum reinigen von medizinischen geraeten
US4690773A (en) * 1983-10-24 1987-09-01 Bausch & Lomb Incorporated Microbial enzymatic contact lens cleaner and methods of use
USRE32672E (en) * 1985-09-09 1988-05-24 Allergan, Inc. Method for simultaneously cleaning and disinfecting contact lenses using a mixture of peroxide and proteolytic enzyme
US4736759A (en) * 1986-02-21 1988-04-12 Robert A. Coberly Apparatus for cleaning rinsing and drying substrates
US4749511A (en) * 1986-07-31 1988-06-07 Genencor, Inc. Contact lens cleaning solutions containing endoproteinase lys-C
US4921630A (en) * 1986-12-24 1990-05-01 Alcon Laboratories, Inc. Contact lens cleaning compositions containing an enzyme and a carboxy vinyl polymer

Also Published As

Publication number Publication date
JPH01155628A (ja) 1989-06-19
EP0320852A3 (en) 1989-11-02
EP0320852A2 (de) 1989-06-21
DE3884165D1 (de) 1993-10-21
US5078802A (en) 1992-01-07
EP0320852B1 (de) 1993-09-15
JP2573854B2 (ja) 1997-01-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee