DE3884165T2 - Waschverfahren für Superpräzisionsanlagen. - Google Patents
Waschverfahren für Superpräzisionsanlagen.Info
- Publication number
- DE3884165T2 DE3884165T2 DE88120741T DE3884165T DE3884165T2 DE 3884165 T2 DE3884165 T2 DE 3884165T2 DE 88120741 T DE88120741 T DE 88120741T DE 3884165 T DE3884165 T DE 3884165T DE 3884165 T2 DE3884165 T2 DE 3884165T2
- Authority
- DE
- Germany
- Prior art keywords
- washing process
- precision systems
- super precision
- super
- systems
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005406 washing Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/38—Products with no well-defined composition, e.g. natural products
- C11D3/386—Preparations containing enzymes, e.g. protease or amylase
- C11D3/38627—Preparations containing enzymes, e.g. protease or amylase containing lipase
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/38—Products with no well-defined composition, e.g. natural products
- C11D3/386—Preparations containing enzymes, e.g. protease or amylase
- C11D3/38636—Preparations containing enzymes, e.g. protease or amylase containing enzymes other than protease, amylase, lipase, cellulase, oxidase or reductase
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/38—Products with no well-defined composition, e.g. natural products
- C11D3/386—Preparations containing enzymes, e.g. protease or amylase
- C11D3/38645—Preparations containing enzymes, e.g. protease or amylase containing cellulase
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/40—Specific cleaning or washing processes
- C11D2111/46—Specific cleaning or washing processes applying energy, e.g. irradiation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Detergent Compositions (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62315021A JP2573854B2 (ja) | 1987-12-12 | 1987-12-12 | 超精密装置の超精密洗浄方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3884165D1 DE3884165D1 (de) | 1993-10-21 |
DE3884165T2 true DE3884165T2 (de) | 1994-04-21 |
Family
ID=18060468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE88120741T Expired - Fee Related DE3884165T2 (de) | 1987-12-12 | 1988-12-12 | Waschverfahren für Superpräzisionsanlagen. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5078802A (de) |
EP (1) | EP0320852B1 (de) |
JP (1) | JP2573854B2 (de) |
DE (1) | DE3884165T2 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5030377A (en) * | 1988-11-11 | 1991-07-09 | Kao Corporation | Detergent compositions containing starch debranching enzymes |
AU4818493A (en) * | 1992-09-25 | 1994-04-26 | Unilever Plc | Cleaning process |
EP0709452A1 (de) * | 1994-10-27 | 1996-05-01 | The Procter & Gamble Company | Xylanasenhaltige Reinigungsmittel |
JP2001513139A (ja) * | 1997-03-07 | 2001-08-28 | ザ、プロクター、エンド、ギャンブル、カンパニー | キシラン分解アルカリ性酵素および非植物細胞壁分解酵素を含んでなる洗浄組成物 |
KR100430166B1 (ko) * | 1998-11-16 | 2004-05-03 | 더 프록터 앤드 갬블 캄파니 | 음파 또는 초음파를 사용하는 세정 제품 |
US6682923B1 (en) | 1999-05-12 | 2004-01-27 | Xencor | Thermostable alkaliphilic xylanase |
AU2001267171A1 (en) * | 2000-05-31 | 2001-12-11 | National Research Council Of Canada | Modified xylanases exhibiting increased thermophilicity and alkalophilicity |
US7183248B2 (en) * | 2001-08-23 | 2007-02-27 | Treyco Supply Co. | Enzymatic cleaner having high pH stability |
US7510860B1 (en) | 2001-11-21 | 2009-03-31 | National Research Council Of Canada | Xylanases with enhanced thermophilicity and alkalophilicity |
DE102005008939A1 (de) * | 2005-02-26 | 2006-09-21 | Sms Demag Ag | Verfahren und Vorrichtung zum Reiningen eines Metallbandes |
FR2897198B1 (fr) * | 2006-02-08 | 2008-09-19 | Commissariat Energie Atomique | Structure d'interconnexions et procede de realisation |
US7723712B2 (en) * | 2006-03-17 | 2010-05-25 | Micron Technology, Inc. | Reduced power consumption phase change memory and methods for forming the same |
WO2007115391A1 (en) * | 2006-04-12 | 2007-10-18 | National Research Council Of Cananda | Modification of xylanases to increase thermophilicity, thermostability and alkalophilicity |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2961354A (en) * | 1958-10-28 | 1960-11-22 | Bell Telephone Labor Inc | Surface treatment of semiconductive devices |
DE2130833A1 (de) * | 1971-06-22 | 1973-01-11 | Brinkmann Kg Wilhelm | Verfahren zum reinigen von medizinischen geraeten |
US4690773A (en) * | 1983-10-24 | 1987-09-01 | Bausch & Lomb Incorporated | Microbial enzymatic contact lens cleaner and methods of use |
USRE32672E (en) * | 1985-09-09 | 1988-05-24 | Allergan, Inc. | Method for simultaneously cleaning and disinfecting contact lenses using a mixture of peroxide and proteolytic enzyme |
US4736759A (en) * | 1986-02-21 | 1988-04-12 | Robert A. Coberly | Apparatus for cleaning rinsing and drying substrates |
US4749511A (en) * | 1986-07-31 | 1988-06-07 | Genencor, Inc. | Contact lens cleaning solutions containing endoproteinase lys-C |
US4921630A (en) * | 1986-12-24 | 1990-05-01 | Alcon Laboratories, Inc. | Contact lens cleaning compositions containing an enzyme and a carboxy vinyl polymer |
-
1987
- 1987-12-12 JP JP62315021A patent/JP2573854B2/ja not_active Expired - Lifetime
-
1988
- 1988-12-12 DE DE88120741T patent/DE3884165T2/de not_active Expired - Fee Related
- 1988-12-12 US US07/283,130 patent/US5078802A/en not_active Expired - Fee Related
- 1988-12-12 EP EP88120741A patent/EP0320852B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2573854B2 (ja) | 1997-01-22 |
US5078802A (en) | 1992-01-07 |
EP0320852A2 (de) | 1989-06-21 |
DE3884165D1 (de) | 1993-10-21 |
EP0320852B1 (de) | 1993-09-15 |
JPH01155628A (ja) | 1989-06-19 |
EP0320852A3 (en) | 1989-11-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |