DE3883804D1 - Verfahren und Vorrichtung für das Schneiden eines zylindrischen Materials. - Google Patents

Verfahren und Vorrichtung für das Schneiden eines zylindrischen Materials.

Info

Publication number
DE3883804D1
DE3883804D1 DE88102589T DE3883804T DE3883804D1 DE 3883804 D1 DE3883804 D1 DE 3883804D1 DE 88102589 T DE88102589 T DE 88102589T DE 3883804 T DE3883804 T DE 3883804T DE 3883804 D1 DE3883804 D1 DE 3883804D1
Authority
DE
Germany
Prior art keywords
cutting
cylindrical material
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88102589T
Other languages
English (en)
Other versions
DE3883804T2 (de
Inventor
Katsuo Honda
Shuich Tsukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62040766A external-priority patent/JPS63207616A/ja
Priority claimed from JP62040765A external-priority patent/JPS63207615A/ja
Priority claimed from JP62040764A external-priority patent/JPS63207614A/ja
Priority claimed from JP63001052A external-priority patent/JPH01176511A/ja
Priority claimed from JP63001053A external-priority patent/JPH01176512A/ja
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Application granted granted Critical
Publication of DE3883804D1 publication Critical patent/DE3883804D1/de
Publication of DE3883804T2 publication Critical patent/DE3883804T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
    • B26D1/01—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work
    • B26D1/12—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis
    • B26D1/14—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis with a circular cutting member, e.g. disc cutter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/04—Processes
    • Y10T83/0405—With preparatory or simultaneous ancillary treatment of work
    • Y10T83/0443—By fluid application
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/202—With product handling means
    • Y10T83/2092—Means to move, guide, or permit free fall or flight of product
    • Y10T83/2183—Product mover including gripper means
    • Y10T83/2185—Suction gripper
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/748—With work immobilizer
    • Y10T83/7487—Means to clamp work
    • Y10T83/7527—With equalizer or self-aligning jaw
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/748—With work immobilizer
    • Y10T83/7487—Means to clamp work
    • Y10T83/754—Clamp driven by yieldable means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/748—With work immobilizer
    • Y10T83/7487—Means to clamp work
    • Y10T83/7553—Including means to retain clamp jaw in position
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/748—With work immobilizer
    • Y10T83/7487—Means to clamp work
    • Y10T83/7573—Including clamping face of specific structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mining & Mineral Resources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE88102589T 1987-02-24 1988-02-22 Verfahren und Vorrichtung für das Schneiden eines zylindrischen Materials. Expired - Fee Related DE3883804T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP62040766A JPS63207616A (ja) 1987-02-24 1987-02-24 インゴツト切断装置
JP62040765A JPS63207615A (ja) 1987-02-24 1987-02-24 インゴツト切断装置
JP62040764A JPS63207614A (ja) 1987-02-24 1987-02-24 インゴツト切断方法
JP63001052A JPH01176511A (ja) 1988-01-06 1988-01-06 柱状体材料の切断方法及び装置
JP63001053A JPH01176512A (ja) 1988-01-06 1988-01-06 柱状体材料の切断装置

Publications (2)

Publication Number Publication Date
DE3883804D1 true DE3883804D1 (de) 1993-10-14
DE3883804T2 DE3883804T2 (de) 1994-01-20

Family

ID=27518050

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88102589T Expired - Fee Related DE3883804T2 (de) 1987-02-24 1988-02-22 Verfahren und Vorrichtung für das Schneiden eines zylindrischen Materials.

Country Status (4)

Country Link
US (1) US4903681A (de)
EP (1) EP0280245B1 (de)
KR (1) KR930005466B1 (de)
DE (1) DE3883804T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE68919373T2 (de) * 1988-02-15 1995-03-30 Tokyo Seimitsu Co Ltd Verfahren und Vorrichtung für die Nachbearbeitung auf Innenlochfeinbearbeitungsmaschinen.
JPH0612768B2 (ja) * 1990-05-18 1994-02-16 信越半導体株式会社 内周刃スライサーによる単結晶インゴットの切断方法及び装置
DE4134110A1 (de) * 1991-10-15 1993-04-22 Wacker Chemitronic Verfahren zum rotationssaegen sproedharter werkstoffe, insbesondere solcher mit durchmessern ueber 200 mm in duenne scheiben vermittels innenlochsaege und vorrichtung zur durchfuehrung des verfahrens
JP2903916B2 (ja) * 1992-11-30 1999-06-14 信越半導体株式会社 半導体インゴット加工方法
JP2789983B2 (ja) * 1993-01-28 1998-08-27 信越半導体株式会社 加工誤差補正装置
DK12893A (da) * 1993-02-04 1994-08-05 Smidth & Co As F L Fremgangsmåde til fremstilling af normal såvel som ultrafin cement
JPH08290353A (ja) * 1995-04-19 1996-11-05 Komatsu Electron Metals Co Ltd 半導体単結晶インゴット切断治具
US6139591A (en) * 1998-03-04 2000-10-31 Tokyo Seimitsu Co., Ltd. Wafer separating and cleaning apparatus and process
US6588302B1 (en) * 2000-08-16 2003-07-08 Orbital Technologies, Inc. Orbiting blade coaxial cable cutter/stripper
JP4323129B2 (ja) * 2002-02-15 2009-09-02 株式会社ディスコ 板状物の搬送機構
US8181825B2 (en) 2005-02-08 2012-05-22 Nestec S.A. Hygienic beverage mixing and whipping assembly
DE102005050649A1 (de) * 2005-10-20 2007-04-26 Deutsche Solar Ag Vorrichtung und Verfahren zum Fixieren von Nichteisenmetall-Blöcken
US20080188011A1 (en) * 2007-01-26 2008-08-07 Silicon Genesis Corporation Apparatus and method of temperature conrol during cleaving processes of thick film materials
KR100725227B1 (ko) * 2007-03-09 2007-06-07 에스엠엘씨디(주) 실리콘 잉곳 절단장치용 메인롤러 그루브 형성장치
US8425279B2 (en) * 2008-09-30 2013-04-23 Misubishi Polycrystalline Silicon America Corporation (MIPSA) Apparatus for manufacturing seeds for polycrystalline silicon manufacture
DE102012224280A1 (de) * 2012-12-21 2014-06-26 J. Schmalz Gmbh Spannvorrichtung
JP6938087B2 (ja) * 2017-09-21 2021-09-22 株式会社ディスコ 切削ブレードの装着機構

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB120697A (en) * 1917-10-10 1918-11-11 Pilkington Brothers Ltd Improvements in or relating to Apparatus for Grinding and/or Polishing Plate Glass.
US2701723A (en) * 1954-05-28 1955-02-08 Broderna Ekbergs Platslagerifa Holder and centering device for workpieces
DE1148480B (de) * 1961-07-13 1963-05-09 Siemens Ag Einrichtung zum Zersaegen von Koerpern aus sproedem Material in Scheiben, insbesondere von stabfoermigen Halbleiterkristallen
US3664320A (en) * 1969-07-23 1972-05-23 Mary E Allen Contour vise
US3804397A (en) * 1971-08-19 1974-04-16 Gco Automatic positioning vacuum cup
US3844269A (en) * 1972-07-25 1974-10-29 R Rater Apparatus for sawing rock
US3855738A (en) * 1972-11-09 1974-12-24 Ibm Crystal indexing fixture
US3910620A (en) * 1974-04-15 1975-10-07 American Chain & Cable Co High temperature vacuum pad lift
US3941364A (en) * 1974-06-05 1976-03-02 Eldorado Tool And Manufacturing Corporation Adjustable shaft rest assembly
US4110937A (en) * 1977-07-25 1978-09-05 Bein Kenneth E Holding means for gem stones
US4088312A (en) * 1977-09-27 1978-05-09 Nasa Variable contour securing system
FR2412385A1 (fr) * 1977-12-22 1979-07-20 Crouzet Sa Machine a scier des barreaux de silicium
SE444526B (sv) * 1978-01-23 1986-04-21 Western Electric Co Sett att i lege och plan placera en substratbricka
US4420909B2 (en) * 1981-11-10 1997-06-10 Silicon Technology Wafering system
SU1079373A1 (ru) * 1983-02-04 1984-03-15 Предприятие П/Я В-2265 Вакуумный патрон
US4684113A (en) * 1984-09-28 1987-08-04 The Boeing Company Universal holding fixture
EP0242489B1 (de) * 1986-04-17 1991-07-10 Maschinenfabrik Meyer & Burger AG Verfahren zum Trennen eines Stabes in Teilstücke, Trennschleifmaschine zur Durchführung dieses Verfahrens und Verwendung dieser Trennschleifmaschine

Also Published As

Publication number Publication date
DE3883804T2 (de) 1994-01-20
EP0280245A2 (de) 1988-08-31
KR880009747A (ko) 1988-10-04
EP0280245A3 (en) 1990-10-24
KR930005466B1 (ko) 1993-06-22
EP0280245B1 (de) 1993-09-08
US4903681A (en) 1990-02-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee