FR2412385A1 - Machine a scier des barreaux de silicium - Google Patents

Machine a scier des barreaux de silicium

Info

Publication number
FR2412385A1
FR2412385A1 FR7738932A FR7738932A FR2412385A1 FR 2412385 A1 FR2412385 A1 FR 2412385A1 FR 7738932 A FR7738932 A FR 7738932A FR 7738932 A FR7738932 A FR 7738932A FR 2412385 A1 FR2412385 A1 FR 2412385A1
Authority
FR
France
Prior art keywords
machine
bar
sawing machine
silicon bar
bar sawing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7738932A
Other languages
English (en)
Other versions
FR2412385B1 (fr
Inventor
Claude Tremeau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Avionics SAS
Original Assignee
Crouzet SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Crouzet SA filed Critical Crouzet SA
Priority to FR7738932A priority Critical patent/FR2412385A1/fr
Priority to GB7848594A priority patent/GB2011833A/en
Priority to US05/970,144 priority patent/US4209005A/en
Priority to DE19782854551 priority patent/DE2854551A1/de
Priority to IT31038/78A priority patent/IT1102341B/it
Publication of FR2412385A1 publication Critical patent/FR2412385A1/fr
Application granted granted Critical
Publication of FR2412385B1 publication Critical patent/FR2412385B1/fr
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/647With means to convey work relative to tool station
    • Y10T83/6492Plural passes of diminishing work piece through tool station
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/647With means to convey work relative to tool station
    • Y10T83/654With work-constraining means on work conveyor [i.e., "work-carrier"]
    • Y10T83/6545With means to guide work-carrier in nonrectilinear path
    • Y10T83/6547About axis fixed relative to tool station
    • Y10T83/6548Infeed
    • Y10T83/655About vertical axis
    • Y10T83/6552Cut normal to axis
    • Y10T83/6553Work-guide tube
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/647With means to convey work relative to tool station
    • Y10T83/654With work-constraining means on work conveyor [i.e., "work-carrier"]
    • Y10T83/6545With means to guide work-carrier in nonrectilinear path
    • Y10T83/6547About axis fixed relative to tool station
    • Y10T83/6548Infeed
    • Y10T83/6555Cut normal to axis
    • Y10T83/6556Oscillating work-carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Sawing (AREA)

Abstract

MACHINE-OUTIL DESTINEE A DECOUPER DES BARREAUX EN TRANCHES FINES AU MOYEN D'UNE SCIE CIRCULAIRE ET COMPORTANT UN BLOC PORTE-BARREAUX COMPRENANT DES MOYENS D'AVANCE EN PAS A PAS ET DES MOYENS DE CHARGEMENT DUDIT BARREAU EN POSITION VERTICALE, CARACTERISEE PAR LE FAIT QUE LE BLOC PORTE-BARREAUX PEUT ETRE DESOLIDARISE DU CHASSIS DE LA MACHINE AU MOYEN D'UN COUSSIN D'AIR AFIN DE FACILITER SON PIVOTEMENT PAR ACTION MANUELLE. LE DISPOSITIF OBJET DE L'INVENTION PERMET DE REALISER DES MACHINES-OUTILS TELLES QUE DES SCIES A SCIER DES BARREAUX DE SILICIUM.
FR7738932A 1977-12-22 1977-12-22 Machine a scier des barreaux de silicium Granted FR2412385A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR7738932A FR2412385A1 (fr) 1977-12-22 1977-12-22 Machine a scier des barreaux de silicium
GB7848594A GB2011833A (en) 1977-12-22 1978-12-14 Machine tool for cutting metal bars into portions
US05/970,144 US4209005A (en) 1977-12-22 1978-12-18 Apparatus for cutting silicon having a pivoted work carriage utilizing an air bearing
DE19782854551 DE2854551A1 (de) 1977-12-22 1978-12-18 Maschine zum zerschneiden von stangen in scheiben
IT31038/78A IT1102341B (it) 1977-12-22 1978-12-20 Macchina per la tranciatura in spezzoni di barre metalliche

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7738932A FR2412385A1 (fr) 1977-12-22 1977-12-22 Machine a scier des barreaux de silicium

Publications (2)

Publication Number Publication Date
FR2412385A1 true FR2412385A1 (fr) 1979-07-20
FR2412385B1 FR2412385B1 (fr) 1980-06-06

Family

ID=9199257

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7738932A Granted FR2412385A1 (fr) 1977-12-22 1977-12-22 Machine a scier des barreaux de silicium

Country Status (5)

Country Link
US (1) US4209005A (fr)
DE (1) DE2854551A1 (fr)
FR (1) FR2412385A1 (fr)
GB (1) GB2011833A (fr)
IT (1) IT1102341B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0269997A2 (fr) * 1986-11-28 1988-06-08 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH Procédé et dispositif de correction de la direction de coupe pour scier des tiges ou blocs de cristal

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8607645D0 (en) * 1986-03-27 1986-04-30 British Aerospace Sheet material machining system
DE3680205D1 (de) * 1986-04-17 1991-08-14 Meyer & Burger Ag Maschf Verfahren zum trennen eines stabes in teilstuecke, trennschleifmaschine zur durchfuehrung dieses verfahrens und verwendung dieser trennschleifmaschine.
US4903681A (en) * 1987-02-24 1990-02-27 Tokyo Seimitus Co., Ltd. Method and apparatus for cutting a cylindrical material
US4974578A (en) * 1989-08-17 1990-12-04 Silicon Technology Corporation Housing for mounting a spindle of an internal diameter saw blade
US5379894A (en) * 1993-03-25 1995-01-10 Ivy Hill Corporation Paperboard package
US5964024A (en) * 1997-06-25 1999-10-12 Norkol/Fibercore, Inc. Roll cutter
US6202526B1 (en) * 1997-09-02 2001-03-20 U.S. Natural Resources Shape sawing machine
DE19905750B4 (de) * 1999-02-11 2005-07-21 Siltronic Ag Innenlochsäge und Verfahren zum Schutz der Spannkante und zur Reinigung des Sägeblatts einer Innenlochsäge
CN111203588A (zh) * 2020-01-15 2020-05-29 广州迅磊科技有限公司 一种阀门加工用刻痕装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3039235A (en) * 1961-01-31 1962-06-19 Hamco Mach & Elect Co Cutting apparatus
FR1353607A (fr) * 1963-01-17 1964-02-28 Citroen Sa Andre Perfectionnements apportés aux machiens ou appareils dans lesquels un objet pesant plan doit être déplacé sur une plaque fixe
FR1379900A (fr) * 1962-12-13 1964-11-27 Glanzstoff Ag Procédé pour mesurer des pièces minuscules en cours d'usinage
DE2052896A1 (de) * 1969-10-29 1971-05-06 Caphn Engineering Co Ltd , Ipswich, Suffolk (Großbritannien) Schneidevorrichtung

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1506448A (en) * 1975-08-04 1978-04-05 Caplin Eng Co Ltd Indexing mechanisms and machine tools incorporating the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3039235A (en) * 1961-01-31 1962-06-19 Hamco Mach & Elect Co Cutting apparatus
FR1379900A (fr) * 1962-12-13 1964-11-27 Glanzstoff Ag Procédé pour mesurer des pièces minuscules en cours d'usinage
FR1353607A (fr) * 1963-01-17 1964-02-28 Citroen Sa Andre Perfectionnements apportés aux machiens ou appareils dans lesquels un objet pesant plan doit être déplacé sur une plaque fixe
DE2052896A1 (de) * 1969-10-29 1971-05-06 Caphn Engineering Co Ltd , Ipswich, Suffolk (Großbritannien) Schneidevorrichtung

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0269997A2 (fr) * 1986-11-28 1988-06-08 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH Procédé et dispositif de correction de la direction de coupe pour scier des tiges ou blocs de cristal
EP0269997A3 (en) * 1986-11-28 1990-01-31 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Process for sawing crystal rods or blocks into thin wafers using an annular blade saw

Also Published As

Publication number Publication date
IT1102341B (it) 1985-10-07
DE2854551A1 (de) 1979-06-28
IT7831038A0 (it) 1978-12-20
GB2011833A (en) 1979-07-18
FR2412385B1 (fr) 1980-06-06
US4209005A (en) 1980-06-24

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Legal Events

Date Code Title Description
ST Notification of lapse