DE3874470D1 - Verfahren zur serienproduktion von kapazitiven druckaufnehmern. - Google Patents

Verfahren zur serienproduktion von kapazitiven druckaufnehmern.

Info

Publication number
DE3874470D1
DE3874470D1 DE8888306903T DE3874470T DE3874470D1 DE 3874470 D1 DE3874470 D1 DE 3874470D1 DE 8888306903 T DE8888306903 T DE 8888306903T DE 3874470 T DE3874470 T DE 3874470T DE 3874470 D1 DE3874470 D1 DE 3874470D1
Authority
DE
Germany
Prior art keywords
pressure sensors
capacitive pressure
serial production
serial
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888306903T
Other languages
English (en)
Other versions
DE3874470T2 (de
Inventor
Frank Chen
David Edward Blackaby
Tony William Rogers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Technologies Corp
Original Assignee
Hamilton Standard Controls Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamilton Standard Controls Inc filed Critical Hamilton Standard Controls Inc
Application granted granted Critical
Publication of DE3874470D1 publication Critical patent/DE3874470D1/de
Publication of DE3874470T2 publication Critical patent/DE3874470T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE8888306903T 1987-08-06 1988-07-27 Verfahren zur serienproduktion von kapazitiven druckaufnehmern. Expired - Fee Related DE3874470T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB878718639A GB8718639D0 (en) 1987-08-06 1987-08-06 Capacitive pressure sensors

Publications (2)

Publication Number Publication Date
DE3874470D1 true DE3874470D1 (de) 1992-10-15
DE3874470T2 DE3874470T2 (de) 1993-03-25

Family

ID=10621913

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888306903T Expired - Fee Related DE3874470T2 (de) 1987-08-06 1988-07-27 Verfahren zur serienproduktion von kapazitiven druckaufnehmern.

Country Status (5)

Country Link
US (1) US4908921A (de)
EP (2) EP0310225B1 (de)
DE (1) DE3874470T2 (de)
FI (1) FI91328C (de)
GB (2) GB8718639D0 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5155061A (en) * 1991-06-03 1992-10-13 Allied-Signal Inc. Method for fabricating a silicon pressure sensor incorporating silicon-on-insulator structures
SE515191C2 (sv) * 1992-05-05 2001-06-25 Volvo Ab Förfarande för tillverkning av en anordning för mätning av tryck jämte anordning för mätning av tryck
FR2701564B1 (fr) * 1993-02-12 1995-05-19 Suisse Electronique Microtech Capteur de mesure de pression absolue de type capacitif et procédé de fabrication d'une pluralité de tels capteurs.
DE4321804A1 (de) * 1993-06-30 1995-01-12 Ranco Inc Verfahren zur Herstellung von Kleinbauelementen
SE9304145D0 (sv) * 1993-12-10 1993-12-10 Pharmacia Lkb Biotech Sätt att tillverka hålrumsstrukturer
DE4446704C1 (de) * 1994-12-12 1996-04-11 Mannesmann Ag Verfahren zum anodischen Bonden
DE4446703C2 (de) * 1994-12-12 1996-10-17 Mannesmann Ag Anordnung zum anodischen Bonden
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
AU2629901A (en) 2000-01-06 2001-07-16 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (mems)
GB2363251B (en) * 2000-06-08 2002-05-22 Hsu Sheng Husiung A method of manufacturing diodes with ceramic base and dice structure
WO2002089907A1 (en) * 2001-05-07 2002-11-14 Cochlear Limited Process for manufacturing electrically conductive components
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
DE10341093A1 (de) * 2003-09-05 2005-04-14 Siemens Ag Probenmodul mit Reservebatterie
JP4441927B2 (ja) * 2004-10-12 2010-03-31 セイコーエプソン株式会社 静電容量検出装置
US7470971B2 (en) * 2005-05-13 2008-12-30 Sarnoff Corporation Anodically bonded ultra-high-vacuum cell
EP2673661B1 (de) 2011-02-07 2022-08-03 ION Geophysical Corporation Verfahren und vorrichtung zur erfassung von unterwassersignalen
CN106164636B (zh) * 2014-02-01 2019-10-22 埃斯梅斯公司 用于监测并且调节流体流量的芯片器件及其制造方法
US11033898B2 (en) 2014-02-01 2021-06-15 Ezmems Ltd. Fluidic microelectromechanical sensors/devices and fabrication methods thereof

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117365A (en) * 1961-06-27 1964-01-14 Vitramon Inc Method of making a stacked capacitor
CA1094229A (en) * 1976-11-08 1981-01-20 Henry Guckel Electrostatically deformable thin silicon membranes
US4184189A (en) * 1978-08-14 1980-01-15 Motorola, Inc. Capacitive pressure sensor and method of making it
FR2462490A1 (fr) * 1979-08-03 1981-02-13 Centre Techn Ind Mecanique Dispositif de revetement electrolytique
US4261086A (en) * 1979-09-04 1981-04-14 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
US4390925A (en) * 1981-08-26 1983-06-28 Leeds & Northrup Company Multiple-cavity variable capacitance pressure transducer
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
FI842307A (fi) * 1984-06-07 1985-12-08 Vaisala Oy Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion.
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4586109A (en) * 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
JPS6259828A (ja) * 1985-09-11 1987-03-16 Fuji Electric Co Ltd 静電容量式圧力センサ

Also Published As

Publication number Publication date
DE3874470T2 (de) 1993-03-25
GB2211990A (en) 1989-07-12
GB2211990B (en) 1991-09-11
EP0478093A3 (en) 1992-04-15
FI91328C (fi) 1994-06-10
EP0310225B1 (de) 1992-09-09
EP0478093A2 (de) 1992-04-01
GB8718639D0 (en) 1987-09-09
US4908921A (en) 1990-03-20
GB8817916D0 (en) 1988-09-01
FI883523A (fi) 1989-02-07
FI883523A0 (fi) 1988-07-27
FI91328B (fi) 1994-02-28
EP0310225A2 (de) 1989-04-05
EP0310225A3 (en) 1989-09-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: UNITED TECHNOLOGIES CORP., HARTFORD, CONN., US

8339 Ceased/non-payment of the annual fee