DE3869031D1 - Detektor fuer geladene teilchen. - Google Patents

Detektor fuer geladene teilchen.

Info

Publication number
DE3869031D1
DE3869031D1 DE8888115653T DE3869031T DE3869031D1 DE 3869031 D1 DE3869031 D1 DE 3869031D1 DE 8888115653 T DE8888115653 T DE 8888115653T DE 3869031 T DE3869031 T DE 3869031T DE 3869031 D1 DE3869031 D1 DE 3869031D1
Authority
DE
Germany
Prior art keywords
particle detector
loaded particle
loaded
detector
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888115653T
Other languages
English (en)
Inventor
Satoru Fukuhara
Hiroyuki Shinada
Hideo Todokoro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3869031D1 publication Critical patent/DE3869031D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24435—Microchannel plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24564—Measurements of electric or magnetic variables, e.g. voltage, current, frequency

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Electron Tubes For Measurement (AREA)
DE8888115653T 1987-09-25 1988-09-23 Detektor fuer geladene teilchen. Expired - Lifetime DE3869031D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62238918A JPS6482445A (en) 1987-09-25 1987-09-25 Charged particle detector

Publications (1)

Publication Number Publication Date
DE3869031D1 true DE3869031D1 (de) 1992-04-16

Family

ID=17037209

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888115653T Expired - Lifetime DE3869031D1 (de) 1987-09-25 1988-09-23 Detektor fuer geladene teilchen.

Country Status (4)

Country Link
US (1) US4868394A (de)
EP (1) EP0308953B1 (de)
JP (1) JPS6482445A (de)
DE (1) DE3869031D1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4958079A (en) * 1989-02-21 1990-09-18 Galileo Electro-Optics Corps. Detector for scanning electron microscopy apparatus
US4988867A (en) * 1989-11-06 1991-01-29 Galileo Electro-Optics Corp. Simultaneous positive and negative ion detector
JP2567736B2 (ja) * 1990-11-30 1996-12-25 理化学研究所 イオン散乱分析装置
EP0490154A3 (en) * 1990-12-07 1992-09-30 Siemens Aktiengesellschaft Method for determining the charge of a sample region
US5557105A (en) * 1991-06-10 1996-09-17 Fujitsu Limited Pattern inspection apparatus and electron beam apparatus
EP0518633B1 (de) * 1991-06-10 1997-11-12 Fujitsu Limited Apparat zur Musterüberprüfung und Elektronenstrahlgerät
US5391874A (en) * 1993-08-17 1995-02-21 Galileo Electro-Optics Corporation Flexible lead assembly for microchannel plate-based detector
JP3431228B2 (ja) * 1993-09-21 2003-07-28 株式会社東芝 荷電粒子検出装置及び荷電粒子照射装置
US5475228A (en) * 1994-11-28 1995-12-12 University Of Puerto Rico Unipolar blocking method and apparatus for monitoring electrically charged particles
JPH09106777A (ja) * 1995-10-11 1997-04-22 Hamamatsu Photonics Kk 電子顕微鏡用電子増倍器
US7531812B2 (en) * 2003-10-27 2009-05-12 Politechnika Wroclawska Method and system for the directional detection of electrons in a scanning electron microscope
JP4429750B2 (ja) * 2004-01-30 2010-03-10 日本電子株式会社 マイクロチャンネルプレートを用いた検出器
US7148485B2 (en) * 2004-05-28 2006-12-12 Hewlett-Packard Development Company, L.P. Low-energy charged particle detector
US20080017811A1 (en) * 2006-07-18 2008-01-24 Collart Erik J H Beam stop for an ion implanter
CN105470093B (zh) * 2015-11-30 2017-07-14 中国科学院长春光学精密机械与物理研究所 双角电荷分割型阳极

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US29500A (en) * 1860-08-07 Machine foe
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
USRE29500E (en) * 1970-08-31 1977-12-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Scanning charged beam particle beam microscope
GB1447983A (en) * 1973-01-10 1976-09-02 Nat Res Dev Detector for electron microscopes
FR2220871B1 (de) * 1973-07-27 1978-01-20 Jeol Ltd
DE3236273A1 (de) * 1982-09-30 1984-04-05 Siemens AG, 1000 Berlin und 8000 München Spektrometerobjektiv mit parallelen objektiv- und spektrometerfeldern fuer die potentialmesstechnik

Also Published As

Publication number Publication date
EP0308953A1 (de) 1989-03-29
JPS6482445A (en) 1989-03-28
US4868394A (en) 1989-09-19
EP0308953B1 (de) 1992-03-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee