DE3855042T2 - Beugunsgitter und Methode zu seiner Herstellung - Google Patents

Beugunsgitter und Methode zu seiner Herstellung

Info

Publication number
DE3855042T2
DE3855042T2 DE3855042T DE3855042T DE3855042T2 DE 3855042 T2 DE3855042 T2 DE 3855042T2 DE 3855042 T DE3855042 T DE 3855042T DE 3855042 T DE3855042 T DE 3855042T DE 3855042 T2 DE3855042 T2 DE 3855042T2
Authority
DE
Germany
Prior art keywords
diffraction grating
photosensitive layer
groove
sin
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3855042T
Other languages
German (de)
English (en)
Other versions
DE3855042D1 (de
Inventor
Hiroyuki Asakura
Kiyokazu Hagiwara
Masanori Iida
Koichi Murase
Minoru Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62331978A external-priority patent/JPH01172902A/ja
Priority claimed from JP62331972A external-priority patent/JPH01172901A/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE3855042D1 publication Critical patent/DE3855042D1/de
Publication of DE3855042T2 publication Critical patent/DE3855042T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
DE3855042T 1987-12-28 1988-12-28 Beugunsgitter und Methode zu seiner Herstellung Expired - Fee Related DE3855042T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62331978A JPH01172902A (ja) 1987-12-28 1987-12-28 回折格子
JP62331972A JPH01172901A (ja) 1987-12-28 1987-12-28 回折格子の製造方法

Publications (2)

Publication Number Publication Date
DE3855042D1 DE3855042D1 (de) 1996-04-04
DE3855042T2 true DE3855042T2 (de) 1996-10-02

Family

ID=26574030

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3855042T Expired - Fee Related DE3855042T2 (de) 1987-12-28 1988-12-28 Beugunsgitter und Methode zu seiner Herstellung

Country Status (5)

Country Link
US (1) US5007709A (enExample)
EP (2) EP0323238B1 (enExample)
KR (1) KR920001246B1 (enExample)
CA (1) CA1321495C (enExample)
DE (1) DE3855042T2 (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5182659A (en) * 1991-02-20 1993-01-26 Holographix, Inc. Holographic recording and scanning system and method
EP0618473A3 (en) * 1993-03-31 1995-03-15 Kuraray Co Video setup with two-dimensional diffraction grating.
WO1998006676A1 (en) 1996-08-13 1998-02-19 Nippon Sheet Glass Co., Ltd. LASER MACHINING METHOD FOR GlASS SUBSTRATE, DIFFRACTION TYPE OPTICAL DEVICE FABRICATED BY THE MACHINING METHOD, AND METHOD OF MANUFACTURING OPTICAL DEVICE
DE19652563A1 (de) 1996-12-17 1998-06-18 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
KR20000026880A (ko) * 1998-10-23 2000-05-15 김영남 회절격자를 이용한 불연속 노광렌즈 및 그제조방법
BR9914872A (pt) * 1998-10-30 2001-07-03 Corning Inc Sintonização de comprimento de onda de grade foto-induzida
CA2272008A1 (en) 1999-05-11 2000-11-11 Francois Trepanier Device and method for recording an interference pattern in a photosensitive medium
US6693745B1 (en) 1999-09-14 2004-02-17 Corning Incorporated Athermal and high throughput gratings
DE50000086D1 (de) * 2000-01-18 2002-02-21 Acterna Eningen Gmbh Optisches Reflexionsgitter und Verfahren zu seiner Optimierung sowie optisches Spektrometer
US6577786B1 (en) * 2000-06-02 2003-06-10 Digital Lightwave, Inc. Device and method for optical performance monitoring in an optical communications network
US20060216478A1 (en) * 2000-07-26 2006-09-28 Shimadzu Corporation Grating, negative and replica gratings of the grating, and method of manufacturing the same
JP2002098820A (ja) * 2000-09-21 2002-04-05 Nippon Sheet Glass Co Ltd 反射型回折格子
KR100417570B1 (ko) * 2001-08-17 2004-02-05 손광현 이중 접합 홀로그램 회절격자층을 갖는 재귀반사체
JP4475501B2 (ja) * 2003-10-09 2010-06-09 インターナショナル・ビジネス・マシーンズ・コーポレーション 分光素子、回折格子、複合回折格子、カラー表示装置、および分波器
DE102004016638A1 (de) * 2004-03-30 2005-10-20 Zeiss Carl Beugungsgitter, insbesondere Reflexionsgitter
WO2007075675A2 (en) * 2005-12-22 2007-07-05 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College High precision code plates and geophones
US7677146B2 (en) * 2006-05-10 2010-03-16 3M Innovative Properties Company Cutting tool using one or more machined tool tips in a continuous or interrupted cut fast tool servo
US7628100B2 (en) * 2007-01-05 2009-12-08 3M Innovative Properties Company Cutting tool using one or more machined tool tips with diffractive features in a continuous or interrupted cut fast tool servo
US7669508B2 (en) * 2007-10-29 2010-03-02 3M Innovative Properties Company Cutting tool using one or more machined tool tips with diffractive features
US20090147361A1 (en) * 2007-12-07 2009-06-11 3M Innovative Properties Company Microreplicated films having diffractive features on macro-scale features
JP5827120B2 (ja) * 2008-04-02 2015-12-02 スリーエム イノベイティブ プロパティズ カンパニー 導光フィルム及び導光フィルムを製作するための方法
JP2011519054A (ja) * 2008-04-02 2011-06-30 スリーエム イノベイティブ プロパティズ カンパニー 重ねられた機構を有する光学フィルムを製作するための方法及びシステム
ES2621820T3 (es) * 2009-04-20 2017-07-05 Bae Systems Plc Rejilla de relieve superficial en una guía de ondas óptica con una superficie reflectante y una capa dieléctrica adaptada a la superficie
CN101718884B (zh) * 2009-11-05 2011-05-18 中国科学院长春光学精密机械与物理研究所 平面全息光栅制作中光栅基底的零级光定位方法
DE102012110630A1 (de) 2012-11-06 2014-05-08 Ovd Kinegram Ag Mehrschichtkörper sowie Verfahren zur Herstellung eines Sicherheitselements
WO2019244274A1 (ja) * 2018-06-20 2019-12-26 株式会社島津製作所 マスター回折格子の製造装置及び製造方法
CN108680979A (zh) * 2018-06-21 2018-10-19 中国人民解放军63908部队 二维正弦光栅抗偏振敏感sers基底及其加工方法
CN109164525A (zh) * 2018-10-26 2019-01-08 上海理工大学 一种低刻线密度的全息凹面光栅曝光光路

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU492267B1 (en) * 1973-11-13 1976-05-13 Theuniversity Of Tasmania Diffraction grating
GB1506400A (en) * 1975-12-08 1978-04-05 Rank Organisation Ltd Diffraction gratings
US4402571A (en) * 1981-02-17 1983-09-06 Polaroid Corporation Method for producing a surface relief pattern
DE3370078D1 (en) * 1982-11-04 1987-04-09 Sumitomo Electric Industries Process for fabricating integrated optics

Also Published As

Publication number Publication date
KR920001246B1 (ko) 1992-02-08
US5007709A (en) 1991-04-16
KR890010590A (ko) 1989-08-09
DE3855042D1 (de) 1996-04-04
EP0323238A3 (en) 1990-12-19
EP0682272A3 (enExample) 1995-12-20
EP0323238A2 (en) 1989-07-05
EP0323238B1 (en) 1996-02-28
CA1321495C (en) 1993-08-24
EP0682272A2 (en) 1995-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee