DE3852779D1 - Poliertuch. - Google Patents

Poliertuch.

Info

Publication number
DE3852779D1
DE3852779D1 DE3852779T DE3852779T DE3852779D1 DE 3852779 D1 DE3852779 D1 DE 3852779D1 DE 3852779 T DE3852779 T DE 3852779T DE 3852779 T DE3852779 T DE 3852779T DE 3852779 D1 DE3852779 D1 DE 3852779D1
Authority
DE
Germany
Prior art keywords
polishing cloth
polishing
cloth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3852779T
Other languages
English (en)
Other versions
DE3852779T2 (de
Inventor
Shoji Noro
Shigemi Mukaiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Corp
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Asahi Kasei Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd, Asahi Kasei Kogyo KK filed Critical Asahi Chemical Industry Co Ltd
Publication of DE3852779D1 publication Critical patent/DE3852779D1/de
Application granted granted Critical
Publication of DE3852779T2 publication Critical patent/DE3852779T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/02—Backings, e.g. foils, webs, mesh fabrics
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L13/00—Implements for cleaning floors, carpets, furniture, walls, or wall coverings
    • A47L13/10—Scrubbing; Scouring; Cleaning; Polishing
    • A47L13/16—Cloths; Pads; Sponges
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L13/00—Implements for cleaning floors, carpets, furniture, walls, or wall coverings
    • A47L13/10—Scrubbing; Scouring; Cleaning; Polishing
    • A47L13/28—Polishing implements
DE3852779T 1987-05-15 1988-05-16 Poliertuch. Expired - Fee Related DE3852779T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62118685A JPS63283857A (ja) 1987-05-15 1987-05-15 研磨布

Publications (2)

Publication Number Publication Date
DE3852779D1 true DE3852779D1 (de) 1995-03-02
DE3852779T2 DE3852779T2 (de) 1995-08-31

Family

ID=14742658

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3852779T Expired - Fee Related DE3852779T2 (de) 1987-05-15 1988-05-16 Poliertuch.

Country Status (5)

Country Link
US (1) US4842678A (de)
EP (1) EP0291100B1 (de)
JP (1) JPS63283857A (de)
KR (1) KR910006346B1 (de)
DE (1) DE3852779T2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01193166A (ja) * 1988-01-28 1989-08-03 Showa Denko Kk 半導体ウェハ鏡面研磨用パッド
DE3926673A1 (de) * 1989-08-11 1991-02-14 Wacker Chemitronic Verfahren und vorrichtung zur poliertuchaufbereitung beim chemomechanischen polieren, insbesondere von halbleiterscheiben
JPH06124948A (ja) * 1992-08-31 1994-05-06 Sony Corp 配線形成方法
TW367551B (en) * 1993-06-17 1999-08-21 Freescale Semiconductor Inc Polishing pad and a process for polishing
DE69430762D1 (de) * 1994-05-10 2002-07-11 Asahi Chemical Ind Herstellungsverfahren eines Fluorharz Schaums
US5814409A (en) * 1994-05-10 1998-09-29 Asahi Kasei Kogyo Kabushiki Kaisha Expanded fluorine type resin products and a preparation process thereof
US5562530A (en) * 1994-08-02 1996-10-08 Sematech, Inc. Pulsed-force chemical mechanical polishing
US5783497A (en) * 1994-08-02 1998-07-21 Sematech, Inc. Forced-flow wafer polisher
JP3317330B2 (ja) * 1995-12-27 2002-08-26 信越半導体株式会社 半導体鏡面ウェーハの製造方法
JP4041166B2 (ja) * 1996-10-22 2008-01-30 オウェンス コーニング ペルフルオロ化エーテルを使用した非クロロフルオロカーボン気泡性レゾール発泡体の製造
US5876268A (en) * 1997-01-03 1999-03-02 Minnesota Mining And Manufacturing Company Method and article for the production of optical quality surfaces on glass
US5910471A (en) * 1997-03-07 1999-06-08 Minnesota Mining And Manufacturing Company Abrasive article for providing a clear surface finish on glass
BR9808152A (pt) * 1997-03-07 2000-03-28 Minnesota Mining & Mfg Artigo abrasivo, sistema para polimento de vidro, processo para o polimento de uma peça e de um artigo de vidro, e, aparelho compreendendo um tubo de raios catódicos
US6231629B1 (en) 1997-03-07 2001-05-15 3M Innovative Properties Company Abrasive article for providing a clear surface finish on glass
US5888119A (en) * 1997-03-07 1999-03-30 Minnesota Mining And Manufacturing Company Method for providing a clear surface finish on glass
US6277464B1 (en) * 1997-05-16 2001-08-21 Pall Corporation Polymeric integral net
US5817706A (en) * 1997-08-27 1998-10-06 Owens Corning Fiberglas Technology, Inc. Manufacture of non-CFC cellular resol foams using perflurinated ethers
US6121143A (en) * 1997-09-19 2000-09-19 3M Innovative Properties Company Abrasive articles comprising a fluorochemical agent for wafer surface modification
US6066030A (en) * 1999-03-04 2000-05-23 International Business Machines Corporation Electroetch and chemical mechanical polishing equipment
US7637801B2 (en) * 2000-09-28 2009-12-29 Sharp Kabushiki Kaisha Method of making solar cell
JP4554799B2 (ja) * 2000-11-08 2010-09-29 聰 井上 フッ素樹脂をベースとした研磨工具
US6846225B2 (en) * 2000-11-29 2005-01-25 Psiloquest, Inc. Selective chemical-mechanical polishing properties of a cross-linked polymer and specific applications therefor
US20050266226A1 (en) * 2000-11-29 2005-12-01 Psiloquest Chemical mechanical polishing pad and method for selective metal and barrier polishing
JP4875810B2 (ja) * 2001-08-10 2012-02-15 日立造船株式会社 フッ素樹脂ボンド研磨用砥石および製造方法
US7651761B2 (en) * 2001-11-13 2010-01-26 Toyo Tire & Rubber Co., Ltd. Grinding pad and method of producing the same
KR101047933B1 (ko) * 2002-11-27 2011-07-11 도요 고무 고교 가부시키가이샤 연마 패드 및 반도체 장치의 제조 방법
JP3885800B2 (ja) * 2004-01-15 2007-02-28 ダイキン工業株式会社 摺動部材及びその製造方法
US7578023B2 (en) 2004-04-30 2009-08-25 3M Innovative Properties Company Applicator pad
US7514480B2 (en) * 2005-06-21 2009-04-07 Arkema Inc. Low level radiation treatment for improving polymer properties
US7445847B2 (en) * 2006-05-25 2008-11-04 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad
JP6067481B2 (ja) * 2013-05-23 2017-01-25 株式会社東芝 研磨パッド、研磨方法、および研磨パッドの製造方法
DE102013008984A1 (de) * 2013-05-28 2014-12-04 Carl Freudenberg Kg Reinigungstuch
US10946495B2 (en) * 2015-01-30 2021-03-16 Cmc Materials, Inc. Low density polishing pad
CA2977036A1 (en) * 2015-02-27 2016-09-01 3M Innovative Properties Company Scrubbing article and method of making same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE636018A (de) * 1962-08-13 1900-01-01
US3504457A (en) * 1966-07-05 1970-04-07 Geoscience Instr Corp Polishing apparatus
JPS572343A (en) * 1980-06-04 1982-01-07 Furukawa Electric Co Ltd:The Foam of crosslinked vinyl chloride resin and its preparation
US4600469A (en) * 1984-12-21 1986-07-15 Honeywell Inc. Method for polishing detector material
US4645561A (en) * 1986-01-06 1987-02-24 Ampex Corporation Metal-polishing composition and process
EP0254705A3 (de) * 1986-07-25 1990-03-14 Fina Research S.A. Verfahren zur Herstellung von vernetztem Polyolefinschaumstoff sowie das damit erhaltene Produkt
DE3883463T2 (de) * 1987-08-25 1993-12-09 Rodel Inc Material mit invertierter Zellstruktur für Schleif-, Läpp-, Form- und Poliervorgänge.

Also Published As

Publication number Publication date
EP0291100A2 (de) 1988-11-17
JPS63283857A (ja) 1988-11-21
KR910006346B1 (ko) 1991-08-21
US4842678A (en) 1989-06-27
EP0291100A3 (en) 1990-12-19
JPH048186B2 (de) 1992-02-14
DE3852779T2 (de) 1995-08-31
KR880013660A (ko) 1988-12-21
EP0291100B1 (de) 1995-01-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee