DE3851087D1 - Differentialdruck-Dichtungsapparatur und Verfahren. - Google Patents

Differentialdruck-Dichtungsapparatur und Verfahren.

Info

Publication number
DE3851087D1
DE3851087D1 DE3851087T DE3851087T DE3851087D1 DE 3851087 D1 DE3851087 D1 DE 3851087D1 DE 3851087 T DE3851087 T DE 3851087T DE 3851087 T DE3851087 T DE 3851087T DE 3851087 D1 DE3851087 D1 DE 3851087D1
Authority
DE
Germany
Prior art keywords
differential pressure
sealing apparatus
pressure sealing
differential
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3851087T
Other languages
English (en)
Other versions
DE3851087T2 (de
Inventor
Yukio Inokuti
Yo Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP15645787A external-priority patent/JPS643373A/ja
Priority claimed from JP19449987A external-priority patent/JPH0672301B2/ja
Priority claimed from JP63063704A external-priority patent/JPH0735581B2/ja
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK, Kawasaki Steel Corp filed Critical Ulvac Inc
Publication of DE3851087D1 publication Critical patent/DE3851087D1/de
Application granted granted Critical
Publication of DE3851087T2 publication Critical patent/DE3851087T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
    • C21D9/54—Furnaces for treating strips or wire
    • C21D9/56—Continuous furnaces for strip or wire
    • C21D9/562—Details
    • C21D9/565—Sealing arrangements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
DE19883851087 1987-05-20 1988-05-18 Differentialdruck-Dichtungsapparatur und Verfahren. Expired - Fee Related DE3851087T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP12101687 1987-05-20
JP15645787A JPS643373A (en) 1987-06-25 1987-06-25 Pressure difference sealing device
JP19449987A JPH0672301B2 (ja) 1987-05-20 1987-08-05 差圧シ−ル装置
JP63063704A JPH0735581B2 (ja) 1988-03-18 1988-03-18 差圧シール装置

Publications (2)

Publication Number Publication Date
DE3851087D1 true DE3851087D1 (de) 1994-09-22
DE3851087T2 DE3851087T2 (de) 1994-12-01

Family

ID=27464354

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19883851087 Expired - Fee Related DE3851087T2 (de) 1987-05-20 1988-05-18 Differentialdruck-Dichtungsapparatur und Verfahren.

Country Status (2)

Country Link
EP (1) EP0291952B1 (de)
DE (1) DE3851087T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1285604B1 (it) * 1996-03-12 1998-06-18 Gd Spa Metodo ed unita' per l'alimentazione in continuo di un materiale in nastro ad una macchina utilizzatrice
ATE262052T1 (de) * 1998-03-27 2004-04-15 Empa Vakuumbandbeschichtungsanlage
US6250222B1 (en) 1998-09-22 2001-06-26 Agfa-Gevaert Apparatus for the continuous treatment of sheet material under reduced pressure
US6341955B1 (en) * 1998-10-23 2002-01-29 Kawasaki Steel Corporation Sealing apparatus in continuous heat-treatment furnace and sealing method
DE502004010406D1 (de) 2004-05-25 2009-12-31 Applied Materials Gmbh & Co Kg Schleusenventil, insbesondere für eine bandbehandlungsanlage
KR100807709B1 (ko) * 2006-04-07 2008-02-28 어플라이드 매터리얼스 게엠베하 운트 컴퍼니 카게 밴드 처리 장치용 에어로크 밸브
DE102009052873B4 (de) 2009-11-13 2017-08-17 THEVA DüNNSCHICHTTECHNIK GMBH Vorrichtung zum kontinuierlichen bewegten Einschleusen eines Bandsubstrats ins Hochvakuum

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US289026A (en) * 1883-11-27 Roller for crushing and pulverizing clay
US2972330A (en) * 1956-02-15 1961-02-21 Nat Steel Corp Vacuum seal for coating apparatus
BE792701A (de) * 1971-12-14 1973-03-30 Arbed
JPS5849635B2 (ja) * 1979-02-21 1983-11-05 三菱重工業株式会社 真空シ−ル装置及び設備
JPS58131470A (ja) * 1982-01-29 1983-08-05 Fuji Photo Film Co Ltd ロ−ラ−式シ−ル装置

Also Published As

Publication number Publication date
EP0291952A2 (de) 1988-11-23
DE3851087T2 (de) 1994-12-01
EP0291952B1 (de) 1994-08-17
EP0291952A3 (en) 1990-05-09

Similar Documents

Publication Publication Date Title
DE3879820D1 (de) Verpackungssystem und verfahren.
DE3876197D1 (de) Verpackungsverfahren und -apparat.
DE68915734T2 (de) Siegelapparat und -verfahren für Beutel.
ZA88268B (en) Seal arrangement for fluid filters;and method
DE3850792D1 (de) Verfahren und Vorrichtung zum Filtrieren.
DE3674656D1 (de) Verfahren und vorrichtung zum filtern.
DE3672111D1 (de) Gasdurchlaessiges verpackungsmaterial und verfahren zu dessen herstellung.
DK516883A (da) Fremgangsmaade og anlaeg til diffraktionstomografi
DE3781313T2 (de) Verfahren und vorrichtung.
DK107888D0 (da) Metode og indretning til trykfiltrering
DE3774543D1 (de) Verfahren und apparat zum vakuumverpacken.
DE3575991D1 (de) Vorrichtung und verfahren zum belueften von zimmern.
DE69110405D1 (de) Druckverschliessvorrichtung und Verfahren.
DE3771416D1 (de) Verfahren und vorrichtung zum mikroloeten.
DE3782908D1 (de) Automatisches verpackungsverfahren und apparat.
DE3776225D1 (de) Verfahren und vorrichtung zum ziehen von rohren.
NO884080D0 (no) Tetningsanordning.
DE3851087D1 (de) Differentialdruck-Dichtungsapparatur und Verfahren.
DE69013059D1 (de) Verfahren und Vorrichtung zum zeitweiligen Abdichten von Rohrleitungen.
DE68921462D1 (de) Reifenrillenvorrichtung und verfahren.
DE69010862D1 (de) Verfahren und Gerät zum Herstellen von Schächten und Tunneln.
DE3873846T2 (de) Behandlungsapparat und verfahren.
DE3668687D1 (de) Verfahren und vorrichtung zum zeitweiligen verschliessen von grossrohrleitungen.
ATE45702T1 (de) Vorrichtung und verfahren zum abdichten.
DE3587363D1 (de) Verfahren und geraet zur wiedererkennung.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee