DE3833602C2 - - Google Patents

Info

Publication number
DE3833602C2
DE3833602C2 DE3833602A DE3833602A DE3833602C2 DE 3833602 C2 DE3833602 C2 DE 3833602C2 DE 3833602 A DE3833602 A DE 3833602A DE 3833602 A DE3833602 A DE 3833602A DE 3833602 C2 DE3833602 C2 DE 3833602C2
Authority
DE
Germany
Prior art keywords
image
photodiode
section
spectral
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3833602A
Other languages
German (de)
English (en)
Other versions
DE3833602A1 (de
Inventor
Klaus-Peter Dipl.-Phys. Dr. 2807 Achim De Nick
Christoph Dipl.-Phys. Dr. 4156 Willich De Carlhoff
Claus-Juergen Dipl.-Phys. Dr. 4300 Essen De Lorenzen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fried Krupp AG
Original Assignee
Fried Krupp AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fried Krupp AG filed Critical Fried Krupp AG
Priority to DE3833602A priority Critical patent/DE3833602A1/de
Priority to EP89116342A priority patent/EP0362562B1/de
Priority to ES89116342T priority patent/ES2047076T3/es
Priority to US07/411,820 priority patent/US4993834A/en
Priority to CA000613768A priority patent/CA1329019C/en
Priority to JP1257205A priority patent/JPH02147926A/ja
Publication of DE3833602A1 publication Critical patent/DE3833602A1/de
Application granted granted Critical
Publication of DE3833602C2 publication Critical patent/DE3833602C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/20—Rowland circle spectrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • G01J2001/4446—Type of detector
    • G01J2001/446—Photodiode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • G01J2001/4446—Type of detector
    • G01J2001/448—Array [CCD]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G01J2003/045—Sequential slits; Multiple slits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1295—Plural entry slits, e.g. for different incidences

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
DE3833602A 1988-10-03 1988-10-03 Spektrometer zur gleichzeitigen intensitaetsmessung in verschiedenen spektralbereichen Granted DE3833602A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE3833602A DE3833602A1 (de) 1988-10-03 1988-10-03 Spektrometer zur gleichzeitigen intensitaetsmessung in verschiedenen spektralbereichen
EP89116342A EP0362562B1 (de) 1988-10-03 1989-09-05 Spektrometer zur gleichzeitigen Intensitätsmessung in verschiedenen Spektralbereichen
ES89116342T ES2047076T3 (es) 1988-10-03 1989-09-05 Espectrometro para la medida simultanea de la intensidad en diferentes margenes espectrales.
US07/411,820 US4993834A (en) 1988-10-03 1989-09-25 Spectrometer for the simultaneous measurement of intensity in various spectral regions
CA000613768A CA1329019C (en) 1988-10-03 1989-09-27 Spectrometer for the simultaneous measurement of intensity in various spectral regions
JP1257205A JPH02147926A (ja) 1988-10-03 1989-10-03 ポリクロメータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3833602A DE3833602A1 (de) 1988-10-03 1988-10-03 Spektrometer zur gleichzeitigen intensitaetsmessung in verschiedenen spektralbereichen

Publications (2)

Publication Number Publication Date
DE3833602A1 DE3833602A1 (de) 1990-02-15
DE3833602C2 true DE3833602C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-12

Family

ID=6364286

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3833602A Granted DE3833602A1 (de) 1988-10-03 1988-10-03 Spektrometer zur gleichzeitigen intensitaetsmessung in verschiedenen spektralbereichen

Country Status (6)

Country Link
US (1) US4993834A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0362562B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH02147926A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA1329019C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3833602A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ES (1) ES2047076T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4100478A1 (de) * 1991-01-07 1992-07-09 Vision 2 D Messtechnik Gmbh System zum messen eines spektrums von sichtbarem, uv- und vuv-licht, bestehend aus einem spektrographen, einem lichtleiterbuendel und einem detektor
DE19509157A1 (de) * 1995-03-14 1996-09-19 Meinrad Maechler Optisches System mit großen Meßbereichen
DE10137428A1 (de) * 2001-07-27 2003-02-20 Karlsruhe Forschzent Vorrichtung zur Messung eines Spektrums

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GB9027831D0 (en) * 1990-12-21 1991-02-13 Philips Electronic Associated Spectrometer
JP2985323B2 (ja) * 1991-03-04 1999-11-29 株式会社日立製作所 パターン検査方法及びその装置
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DE19820861B4 (de) * 1998-05-09 2004-09-16 Bruker Axs Gmbh Simultanes Röntgenfluoreszenz-Spektrometer
US6057925A (en) * 1998-08-28 2000-05-02 Optical Coating Laboratory, Inc. Compact spectrometer device
DE19861479B4 (de) * 1998-11-21 2016-02-25 Spectro Analytical Instruments Gmbh Simultanes Doppelgitter-Spektrometer mit Halbleiterzeilensensoren oder Photoelektronenvervielfachern
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EP0362562A2 (de) 1990-04-11
CA1329019C (en) 1994-05-03
EP0362562A3 (de) 1991-05-08
ES2047076T3 (es) 1994-02-16
DE3833602A1 (de) 1990-02-15
US4993834A (en) 1991-02-19
EP0362562B1 (de) 1993-12-15
JPH02147926A (ja) 1990-06-06

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