DE3831593C2 - - Google Patents

Info

Publication number
DE3831593C2
DE3831593C2 DE3831593A DE3831593A DE3831593C2 DE 3831593 C2 DE3831593 C2 DE 3831593C2 DE 3831593 A DE3831593 A DE 3831593A DE 3831593 A DE3831593 A DE 3831593A DE 3831593 C2 DE3831593 C2 DE 3831593C2
Authority
DE
Germany
Prior art keywords
arrangement
amplifier
output
circuit
evaluation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3831593A
Other languages
German (de)
English (en)
Other versions
DE3831593A1 (de
Inventor
Hans-Juergen Prof. Dr.-Ing. Gevatter
Ying Dipl.-Ing. Yu
Henning Dipl.-Ing. Gaus
Hartmut Dr. 1000 Berlin De Grethen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE3831593A priority Critical patent/DE3831593A1/de
Publication of DE3831593A1 publication Critical patent/DE3831593A1/de
Application granted granted Critical
Publication of DE3831593C2 publication Critical patent/DE3831593C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Amplifiers (AREA)
DE3831593A 1988-09-15 1988-09-15 Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung Granted DE3831593A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE3831593A DE3831593A1 (de) 1988-09-15 1988-09-15 Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3831593A DE3831593A1 (de) 1988-09-15 1988-09-15 Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung

Publications (2)

Publication Number Publication Date
DE3831593A1 DE3831593A1 (de) 1990-03-22
DE3831593C2 true DE3831593C2 (da) 1993-02-04

Family

ID=6363118

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3831593A Granted DE3831593A1 (de) 1988-09-15 1988-09-15 Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung

Country Status (1)

Country Link
DE (1) DE3831593A1 (da)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19715078A1 (de) * 1997-04-11 1998-10-15 Univ Ilmenau Tech Verfahren zur kapazitiven Weg- und Winkelmessung
DE19855896B4 (de) * 1998-05-11 2004-05-06 Mitsubishi Denki K.K. Kapazitätsdetektierschaltung

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
DE4127460C2 (de) * 1991-08-20 1994-04-14 Dornier Gmbh Sensor
DE9205416U1 (de) * 1992-04-21 1993-05-19 Kampfrath, Gerit, Dr. Dynamischer Beschleunigungssensor
FR2700614B1 (fr) * 1993-01-19 1995-04-14 Sextant Avionique Accéléromètre capacitif à circuit de correction de l'effet perturbateur de capacités parasites.
JP3139305B2 (ja) * 1994-08-24 2001-02-26 株式会社村田製作所 容量型加速度センサ
US5744968A (en) * 1996-04-30 1998-04-28 Motorola Inc. Ratiometric circuit
DE102007027652B4 (de) 2007-06-15 2013-06-20 Litef Gmbh Betriebsverfahren und Schaltungsanordnung für einen kapazitiven mikromechanischen Sensor mit analoger Rückstellung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2454103A1 (fr) * 1979-04-11 1980-11-07 Sagem Perfectionnements aux accelerometres pendulaires asservis
DE3143114A1 (de) * 1980-11-07 1982-07-15 Mestra AG, 4153 Reinach Verfahren und schaltung zur messung von kapazitaeten

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19715078A1 (de) * 1997-04-11 1998-10-15 Univ Ilmenau Tech Verfahren zur kapazitiven Weg- und Winkelmessung
DE19855896B4 (de) * 1998-05-11 2004-05-06 Mitsubishi Denki K.K. Kapazitätsdetektierschaltung

Also Published As

Publication number Publication date
DE3831593A1 (de) 1990-03-22

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee