DE3820783C2 - - Google Patents

Info

Publication number
DE3820783C2
DE3820783C2 DE19883820783 DE3820783A DE3820783C2 DE 3820783 C2 DE3820783 C2 DE 3820783C2 DE 19883820783 DE19883820783 DE 19883820783 DE 3820783 A DE3820783 A DE 3820783A DE 3820783 C2 DE3820783 C2 DE 3820783C2
Authority
DE
Germany
Prior art keywords
optics
image
adjustment
arrangement according
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE19883820783
Other languages
German (de)
English (en)
Other versions
DE3820783A1 (de
Inventor
Manfred 7800 Freiburg De Knothe
Horst Prof. Dipl.-Phys. Dr. 7815 Kirchzarten De Preier
Wolfgang Dipl.-Phys. 7844 Neuenburg De Riedel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to DE19883820783 priority Critical patent/DE3820783A1/de
Publication of DE3820783A1 publication Critical patent/DE3820783A1/de
Application granted granted Critical
Publication of DE3820783C2 publication Critical patent/DE3820783C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0237—Adjustable, e.g. focussing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Head (AREA)
DE19883820783 1988-06-20 1988-06-20 Optische anordnung zur korrektur einer astigmatischen abbildung Granted DE3820783A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19883820783 DE3820783A1 (de) 1988-06-20 1988-06-20 Optische anordnung zur korrektur einer astigmatischen abbildung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19883820783 DE3820783A1 (de) 1988-06-20 1988-06-20 Optische anordnung zur korrektur einer astigmatischen abbildung

Publications (2)

Publication Number Publication Date
DE3820783A1 DE3820783A1 (de) 1990-01-04
DE3820783C2 true DE3820783C2 (cs) 1990-04-26

Family

ID=6356842

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19883820783 Granted DE3820783A1 (de) 1988-06-20 1988-06-20 Optische anordnung zur korrektur einer astigmatischen abbildung

Country Status (1)

Country Link
DE (1) DE3820783A1 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200057003A (ko) * 2017-09-20 2020-05-25 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치를 위한 제어 시스템

Also Published As

Publication number Publication date
DE3820783A1 (de) 1990-01-04

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee