DE3820225C1 - - Google Patents
Info
- Publication number
- DE3820225C1 DE3820225C1 DE3820225A DE3820225A DE3820225C1 DE 3820225 C1 DE3820225 C1 DE 3820225C1 DE 3820225 A DE3820225 A DE 3820225A DE 3820225 A DE3820225 A DE 3820225A DE 3820225 C1 DE3820225 C1 DE 3820225C1
- Authority
- DE
- Germany
- Prior art keywords
- workpiece
- machine according
- contour
- measuring
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3820225A DE3820225C1 (US07993877-20110809-P00003.png) | 1988-06-14 | 1988-06-14 | |
EP19890110657 EP0346819A3 (de) | 1988-06-14 | 1989-06-13 | Verfahren und Vorrichtung zur berührungslosen Vermessung und ggf. abtragenden Bearbeitung von Oberflächen |
JP1153532A JPH02118407A (ja) | 1988-06-14 | 1989-06-14 | 表面の非接触測定法 |
US07/625,640 US5067282A (en) | 1988-06-14 | 1990-12-07 | Method and apparatus for non-contact measuring and, in case, abrasive working of surfaces |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3820225A DE3820225C1 (US07993877-20110809-P00003.png) | 1988-06-14 | 1988-06-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3820225C1 true DE3820225C1 (US07993877-20110809-P00003.png) | 1989-07-13 |
Family
ID=6356523
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3820225A Expired DE3820225C1 (US07993877-20110809-P00003.png) | 1988-06-14 | 1988-06-14 |
Country Status (4)
Country | Link |
---|---|
US (1) | US5067282A (US07993877-20110809-P00003.png) |
EP (1) | EP0346819A3 (US07993877-20110809-P00003.png) |
JP (1) | JPH02118407A (US07993877-20110809-P00003.png) |
DE (1) | DE3820225C1 (US07993877-20110809-P00003.png) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10315218A1 (de) * | 2003-04-01 | 2004-10-14 | Nagel Maschinen- Und Werkzeugfabrik Gmbh | Verfahren und Vorrichtung zur Feinbearbeitung einer Oberfläche eines Werkstücks |
CN113933029A (zh) * | 2021-10-15 | 2022-01-14 | 中国工程物理研究院激光聚变研究中心 | 一种离轴非球面元件的加工检测系统和制造方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5430537A (en) * | 1993-09-03 | 1995-07-04 | Dynamics Research Corporation | Light beam distance encoder |
US5649849A (en) * | 1995-03-24 | 1997-07-22 | Eastman Kodak Company | Method and apparatus for realtime monitoring and feedback control of the shape of a continuous planetary polishing surface |
US6923711B2 (en) | 2000-10-17 | 2005-08-02 | Speedfam-Ipec Corporation | Multizone carrier with process monitoring system for chemical-mechanical planarization tool |
NL1018943C2 (nl) * | 2001-09-13 | 2003-03-14 | Tno | Werkwijze en inrichting voor het polijsten van een werkstukoppervlak. |
NL1022293C2 (nl) * | 2002-12-31 | 2004-07-15 | Tno | Inrichting en werkwijze voor het vervaardigen of bewerken van optische elementen en/of optische vormelementen, alsmede dergelijke elementen. |
JP2006047148A (ja) * | 2004-08-05 | 2006-02-16 | Mitsutoyo Corp | 形状測定装置、形状測定方法、形状解析装置、形状解析プログラム、記録媒体 |
JP4938231B2 (ja) * | 2004-10-25 | 2012-05-23 | ルネサスエレクトロニクス株式会社 | 平坦度測定器 |
US20070117217A1 (en) * | 2005-06-16 | 2007-05-24 | The Regents Of The University Of California | Large scale parallel immuno-based allergy test and device for evanescent field excitation of fluorescence |
US20080011058A1 (en) * | 2006-03-20 | 2008-01-17 | The Regents Of The University Of California | Piezoresistive cantilever based nanoflow and viscosity sensor for microchannels |
US8191403B2 (en) * | 2007-03-27 | 2012-06-05 | Richmond Chemical Corporation | Petroleum viscosity measurement and communication system and method |
FR3023011B1 (fr) * | 2014-06-27 | 2017-10-20 | Thales Sa | Procede de fabrication d'un miroir |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3004386C2 (de) * | 1979-02-09 | 1986-07-24 | Institut kosmičeskich issledovanij Akademii Nauk SSSR, Moskau/Moskva | Verfahren zum Bearbeiten einer unzulässige Formabweichungen aufweisenden Oberfläche von optischen Teilen, beispielsweise Spiegeln von Telskopen, und Vorrichtung zur Durchführung dieses Verfahrens |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4365301A (en) * | 1980-09-12 | 1982-12-21 | The United States Of America As Represented By The United States Department Of Energy | Positional reference system for ultraprecision machining |
DE3430499C2 (de) * | 1984-08-18 | 1986-08-14 | Fa. Carl Zeiss, 7920 Heidenheim | Verfahren und Einrichtung zum Läppen oder Polieren von optischen Werkstücken |
DE3612157A1 (de) * | 1985-04-26 | 1986-11-06 | VEB Feinmeßzeugfabrik Suhl, DDR 6000 Suhl | Interferometrisch-inkrementale vorrichtung zur ebenheitsmessung |
US4794736A (en) * | 1985-12-27 | 1989-01-03 | Citizen Watch Co., Ltd. | Arrangement for mechanically and accurately processing a workpiece with a position detecting pattern or patterns |
-
1988
- 1988-06-14 DE DE3820225A patent/DE3820225C1/de not_active Expired
-
1989
- 1989-06-13 EP EP19890110657 patent/EP0346819A3/de not_active Withdrawn
- 1989-06-14 JP JP1153532A patent/JPH02118407A/ja active Pending
-
1990
- 1990-12-07 US US07/625,640 patent/US5067282A/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3004386C2 (de) * | 1979-02-09 | 1986-07-24 | Institut kosmičeskich issledovanij Akademii Nauk SSSR, Moskau/Moskva | Verfahren zum Bearbeiten einer unzulässige Formabweichungen aufweisenden Oberfläche von optischen Teilen, beispielsweise Spiegeln von Telskopen, und Vorrichtung zur Durchführung dieses Verfahrens |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10315218A1 (de) * | 2003-04-01 | 2004-10-14 | Nagel Maschinen- Und Werkzeugfabrik Gmbh | Verfahren und Vorrichtung zur Feinbearbeitung einer Oberfläche eines Werkstücks |
DE10315218B4 (de) * | 2003-04-01 | 2010-12-30 | Nagel Maschinen- Und Werkzeugfabrik Gmbh | Verfahren und Vorrichtung zur Feinbearbeitung einer Oberfläche eines Werkstücks |
CN113933029A (zh) * | 2021-10-15 | 2022-01-14 | 中国工程物理研究院激光聚变研究中心 | 一种离轴非球面元件的加工检测系统和制造方法 |
Also Published As
Publication number | Publication date |
---|---|
EP0346819A3 (de) | 1991-11-27 |
JPH02118407A (ja) | 1990-05-02 |
US5067282A (en) | 1991-11-26 |
EP0346819A2 (de) | 1989-12-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8100 | Publication of patent without earlier publication of application | ||
D1 | Grant (no unexamined application published) patent law 81 | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |