DE3789058D1 - Abdichtbarer tragbarer Behälter mit einem System zum Filtrieren von Teilchen. - Google Patents

Abdichtbarer tragbarer Behälter mit einem System zum Filtrieren von Teilchen.

Info

Publication number
DE3789058D1
DE3789058D1 DE87309507T DE3789058T DE3789058D1 DE 3789058 D1 DE3789058 D1 DE 3789058D1 DE 87309507 T DE87309507 T DE 87309507T DE 3789058 T DE3789058 T DE 3789058T DE 3789058 D1 DE3789058 D1 DE 3789058D1
Authority
DE
Germany
Prior art keywords
portable container
filtering particles
sealable
sealable portable
filtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE87309507T
Other languages
English (en)
Other versions
DE3789058T2 (de
Inventor
Mihir Parikh
Anthony Charles Bonora
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASYST TECHNOLOGIES
Asyst Technologies Inc
Original Assignee
ASYST TECHNOLOGIES
Asyst Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASYST TECHNOLOGIES, Asyst Technologies Inc filed Critical ASYST TECHNOLOGIES
Publication of DE3789058D1 publication Critical patent/DE3789058D1/de
Application granted granted Critical
Publication of DE3789058T2 publication Critical patent/DE3789058T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE19873789058 1987-10-28 1987-10-28 Abdichtbarer tragbarer Behälter mit einem System zum Filtrieren von Teilchen. Expired - Lifetime DE3789058T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19870309507 EP0313693B1 (de) 1987-10-28 1987-10-28 Abdichtbarer tragbarer Behälter mit einem System zum Filtrieren von Teilchen

Publications (2)

Publication Number Publication Date
DE3789058D1 true DE3789058D1 (de) 1994-03-24
DE3789058T2 DE3789058T2 (de) 1994-07-07

Family

ID=8198077

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19873789058 Expired - Lifetime DE3789058T2 (de) 1987-10-28 1987-10-28 Abdichtbarer tragbarer Behälter mit einem System zum Filtrieren von Teilchen.

Country Status (2)

Country Link
EP (1) EP0313693B1 (de)
DE (1) DE3789058T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3216205B2 (ja) * 1992-03-27 2001-10-09 神鋼電機株式会社 半導体製造システムにおけるｉｄ認識装置
JP3191392B2 (ja) * 1992-04-07 2001-07-23 神鋼電機株式会社 クリーンルーム用密閉式コンテナ
US5398481A (en) * 1992-05-19 1995-03-21 Ebara Corporation Vacuum processing system
JP3277550B2 (ja) * 1992-05-21 2002-04-22 神鋼電機株式会社 可搬式密閉コンテナ用ガスパージユニット
DE4326308C1 (de) * 1993-08-05 1994-10-20 Jenoptik Jena Gmbh Transportvorrichtung für Magazine zur Aufnahme scheibenförmiger Objekte
DE19540963C2 (de) * 1995-11-03 1999-05-20 Jenoptik Jena Gmbh Transportbehälter für scheibenförmige Objekte
US7328727B2 (en) 2004-04-18 2008-02-12 Entegris, Inc. Substrate container with fluid-sealing flow passageway
KR101494024B1 (ko) 2007-02-28 2015-02-16 엔테그리스, 아이엔씨. 기판 컨테이너를 위한 퍼지 시스템

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3483828D1 (de) * 1983-09-28 1991-02-07 Hewlett Packard Co Verarbeitungssystem fuer integrierte schaltkreise.
US4674939A (en) * 1984-07-30 1987-06-23 Asyst Technologies Sealed standard interface apparatus
JPH0638443B2 (ja) * 1985-12-23 1994-05-18 アシスト テクノロジーズ インコーポレーテッド 処理しようとする物品を収容する持ち運びできる容器

Also Published As

Publication number Publication date
EP0313693A1 (de) 1989-05-03
EP0313693B1 (de) 1994-02-09
DE3789058T2 (de) 1994-07-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition