DE3781551D1 - Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden. - Google Patents
Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden.Info
- Publication number
- DE3781551D1 DE3781551D1 DE8787201244T DE3781551T DE3781551D1 DE 3781551 D1 DE3781551 D1 DE 3781551D1 DE 8787201244 T DE8787201244 T DE 8787201244T DE 3781551 T DE3781551 T DE 3781551T DE 3781551 D1 DE3781551 D1 DE 3781551D1
- Authority
- DE
- Germany
- Prior art keywords
- excavations
- objects
- coating
- cavity
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP87201244A EP0298157B1 (de) | 1987-06-29 | 1987-06-29 | Verfahren und Vorrichtung zur Beschichtung von Aushöhlungen von Gegenständen |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3781551D1 true DE3781551D1 (de) | 1992-10-08 |
DE3781551T2 DE3781551T2 (de) | 1993-04-08 |
Family
ID=8197632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787201244T Expired - Fee Related DE3781551T2 (de) | 1987-06-29 | 1987-06-29 | Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5026466A (de) |
EP (1) | EP0298157B1 (de) |
JP (1) | JPS6473072A (de) |
AT (1) | ATE80184T1 (de) |
DE (1) | DE3781551T2 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5393575A (en) * | 1992-03-03 | 1995-02-28 | Esterlis; Moisei | Method for carrying out surface processes |
JPH0673538A (ja) * | 1992-05-26 | 1994-03-15 | Kobe Steel Ltd | アークイオンプレーティング装置 |
US5730847A (en) * | 1993-03-15 | 1998-03-24 | Kabushiki Kaisha Kobeseikosho | Arc ion plating device and arc ion plating system |
EP0658634B1 (de) * | 1993-12-17 | 1999-03-10 | KABUSHIKI KAISHA KOBE SEIKO SHO also known as Kobe Steel Ltd. | Vorrichtung zur Bogenbeschichtung im Vakuum |
US5895559A (en) * | 1996-04-08 | 1999-04-20 | Christy; Ronald | Cathodic arc cathode |
US5972185A (en) * | 1997-08-30 | 1999-10-26 | United Technologies Corporation | Cathodic arc vapor deposition apparatus (annular cathode) |
US6193853B1 (en) * | 1999-02-25 | 2001-02-27 | Cametoid Limited | Magnetron sputtering method and apparatus |
US20020110700A1 (en) * | 2001-02-12 | 2002-08-15 | Hein Gerald F. | Process for forming decorative films and resulting products |
WO2003057939A2 (en) * | 2002-01-14 | 2003-07-17 | Varco Ltd. | Cathode for vacuum arc evaporators |
ATE386334T1 (de) * | 2002-04-22 | 2008-03-15 | Pivot A S | Bogenbeschichtung mit drehkathoden |
US7052736B2 (en) * | 2002-06-11 | 2006-05-30 | Southwest Research Institute | Method for depositing coatings on the interior surfaces of tubular structures |
US7351480B2 (en) * | 2002-06-11 | 2008-04-01 | Southwest Research Institute | Tubular structures with coated interior surfaces |
US7867366B1 (en) * | 2004-04-28 | 2011-01-11 | Alameda Applied Sciences Corp. | Coaxial plasma arc vapor deposition apparatus and method |
US7444955B2 (en) * | 2004-05-19 | 2008-11-04 | Sub-One Technology, Inc. | Apparatus for directing plasma flow to coat internal passageways |
US7300684B2 (en) | 2004-07-15 | 2007-11-27 | Sub-One Technology, Inc. | Method and system for coating internal surfaces of prefabricated process piping in the field |
US7608151B2 (en) * | 2005-03-07 | 2009-10-27 | Sub-One Technology, Inc. | Method and system for coating sections of internal surfaces |
US7541069B2 (en) * | 2005-03-07 | 2009-06-02 | Sub-One Technology, Inc. | Method and system for coating internal surfaces using reverse-flow cycling |
US7879203B2 (en) * | 2006-12-11 | 2011-02-01 | General Electric Company | Method and apparatus for cathodic arc ion plasma deposition |
JP4878020B2 (ja) * | 2007-09-27 | 2012-02-15 | 株式会社神戸製鋼所 | 真空アーク蒸発源 |
KR101660557B1 (ko) | 2009-02-18 | 2016-09-27 | 카운슬 오브 사이언티픽 앤드 인더스트리얼 리서치 | 성형 물품의 내부 표면 상에 보호 코팅으로서 다이아몬드상 카본을 증착하는 방법 |
US20120312233A1 (en) * | 2011-06-10 | 2012-12-13 | Ge Yi | Magnetically Enhanced Thin Film Coating Method and Apparatus |
US10304665B2 (en) | 2011-09-07 | 2019-05-28 | Nano-Product Engineering, LLC | Reactors for plasma-assisted processes and associated methods |
US20150101924A1 (en) * | 2013-10-16 | 2015-04-16 | General Electric Company | Assembly and method of coating an interior surface of an object |
US20150114828A1 (en) * | 2013-10-31 | 2015-04-30 | General Electric Company | Systems and method of coating an interior surface of an object |
US9111734B2 (en) | 2013-10-31 | 2015-08-18 | General Electric Company | Systems and method of coating an interior surface of an object |
KR101440316B1 (ko) * | 2014-04-30 | 2014-09-18 | 주식회사 유니벡 | 박막 코팅을 위한 진공 챔버 내부 아크 스팟 생성장치 |
CN104451562B (zh) * | 2014-12-08 | 2017-02-22 | 沈阳工业大学 | 一种长管件内壁镀膜的电弧离子镀装置 |
US9765424B2 (en) | 2015-02-25 | 2017-09-19 | Engineering And Software System Solutions, Inc. | Method of refurbishing high value articles |
WO2018226966A1 (en) * | 2017-06-08 | 2018-12-13 | Board Of Trustees Of Michigan State University | Magnetic-field-assisted plasma coating system |
CN108085640B (zh) * | 2017-10-31 | 2023-05-12 | 东莞市汇成真空科技有限公司 | 大型罐体内壁镀膜用真空阴极电弧镀膜机 |
CN107858653B (zh) * | 2017-10-31 | 2023-05-12 | 东莞市汇成真空科技有限公司 | 一种电弧靶升降抬头机构 |
US11834204B1 (en) | 2018-04-05 | 2023-12-05 | Nano-Product Engineering, LLC | Sources for plasma assisted electric propulsion |
CN108930018B (zh) * | 2018-08-09 | 2020-06-02 | 南通大学 | 一种细长管状零件内表面真空镀膜装置 |
CN109338292B (zh) * | 2018-11-15 | 2020-06-23 | 温州职业技术学院 | 一种管件内壁真空镀膜装置及生产工艺 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3491015A (en) * | 1967-04-04 | 1970-01-20 | Automatic Fire Control Inc | Method of depositing elemental material from a low pressure electrical discharge |
US3793179A (en) * | 1971-07-19 | 1974-02-19 | L Sablev | Apparatus for metal evaporation coating |
US3783231A (en) * | 1972-03-22 | 1974-01-01 | V Gorbunov | Apparatus for vacuum-evaporation of metals under the action of an electric arc |
DE2346738A1 (de) * | 1973-09-17 | 1975-04-24 | Bbc Brown Boveri & Cie | Verfahren zum aufbringen duenner schichten auf flaechenhafte gebilde |
DE2820301B2 (de) * | 1978-05-10 | 1980-11-06 | Messerschmitt-Boelkow-Blohm Gmbh, 8000 Muenchen | Anordnung zur Innenbeschichtung von Rohren |
SU711787A1 (ru) * | 1978-06-17 | 1980-10-07 | Предприятие П/Я В-8851 | Электродуговой испаритель металлов |
US4419202A (en) * | 1980-12-22 | 1983-12-06 | The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland | Metal coatings |
US4609564C2 (en) * | 1981-02-24 | 2001-10-09 | Masco Vt Inc | Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase |
US4505947A (en) * | 1982-07-14 | 1985-03-19 | The Standard Oil Company (Ohio) | Method for the deposition of coatings upon substrates utilizing a high pressure, non-local thermal equilibrium arc plasma |
AT376460B (de) * | 1982-09-17 | 1984-11-26 | Kljuchko Gennady V | Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen |
US4468309A (en) * | 1983-04-22 | 1984-08-28 | White Engineering Corporation | Method for resisting galling |
US4673477A (en) * | 1984-03-02 | 1987-06-16 | Regents Of The University Of Minnesota | Controlled vacuum arc material deposition, method and apparatus |
JPS60187669A (ja) * | 1984-06-22 | 1985-09-25 | Nippon Tungsten Co Ltd | 線爆溶射方法 |
US4724058A (en) * | 1984-08-13 | 1988-02-09 | Vac-Tec Systems, Inc. | Method and apparatus for arc evaporating large area targets |
NL8700620A (nl) * | 1987-03-16 | 1988-10-17 | Hauzer Holding | Kathode boogverdampingsinrichting alsmede werkwijze voor het bedrijven daarvan. |
-
1987
- 1987-06-29 DE DE8787201244T patent/DE3781551T2/de not_active Expired - Fee Related
- 1987-06-29 AT AT87201244T patent/ATE80184T1/de active
- 1987-06-29 EP EP87201244A patent/EP0298157B1/de not_active Expired - Lifetime
-
1988
- 1988-06-28 JP JP63162385A patent/JPS6473072A/ja active Pending
-
1990
- 1990-03-09 US US07/492,252 patent/US5026466A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0298157A1 (de) | 1989-01-11 |
DE3781551T2 (de) | 1993-04-08 |
JPS6473072A (en) | 1989-03-17 |
ATE80184T1 (de) | 1992-09-15 |
US5026466A (en) | 1991-06-25 |
EP0298157B1 (de) | 1992-09-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |