DE3772219D1 - Apparatur fuer pulsierende elektronenstrahlen. - Google Patents

Apparatur fuer pulsierende elektronenstrahlen.

Info

Publication number
DE3772219D1
DE3772219D1 DE8787400284T DE3772219T DE3772219D1 DE 3772219 D1 DE3772219 D1 DE 3772219D1 DE 8787400284 T DE8787400284 T DE 8787400284T DE 3772219 T DE3772219 T DE 3772219T DE 3772219 D1 DE3772219 D1 DE 3772219D1
Authority
DE
Germany
Prior art keywords
channel
electron beams
varying
transmission line
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787400284T
Other languages
English (en)
Inventor
Neil Richardson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schlumberger Technologies Inc
Original Assignee
Schlumberger Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger Technologies Inc filed Critical Schlumberger Technologies Inc
Application granted granted Critical
Publication of DE3772219D1 publication Critical patent/DE3772219D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
DE8787400284T 1986-02-10 1987-02-09 Apparatur fuer pulsierende elektronenstrahlen. Expired - Fee Related DE3772219D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/828,157 US4721909A (en) 1985-08-16 1986-02-10 Apparatus for pulsing electron beams

Publications (1)

Publication Number Publication Date
DE3772219D1 true DE3772219D1 (de) 1991-09-26

Family

ID=25251051

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787400284T Expired - Fee Related DE3772219D1 (de) 1986-02-10 1987-02-09 Apparatur fuer pulsierende elektronenstrahlen.

Country Status (4)

Country Link
US (1) US4721909A (de)
EP (1) EP0233123B1 (de)
CA (1) CA1256597A (de)
DE (1) DE3772219D1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2196175B (en) * 1986-10-03 1990-10-17 Trialsite Ltd Production of pulsed electron beams
DE68928162T2 (de) * 1988-11-23 1998-01-29 Schlumberger Technologies Inc Verfahren und Gerät zum Verdichten von Bildern hoher Auflösung
US5054097A (en) * 1988-11-23 1991-10-01 Schlumberger Technologies, Inc. Methods and apparatus for alignment of images
DE3904280A1 (de) * 1989-02-14 1990-08-16 Joachim Dipl Ing Fehr Subpikosekunden - elektronenstrahlaustastsystem
US5144225A (en) * 1989-03-31 1992-09-01 Schlumberger Technologies, Inc. Methods and apparatus for acquiring data from intermittently failing circuits
DE3938221A1 (de) * 1989-11-17 1991-05-23 Messer Griesheim Gmbh Verfahren zum schutz einer blende beim erzeugen von elektronenstrahlimpulsen
US5140164A (en) * 1991-01-14 1992-08-18 Schlumberger Technologies, Inc. Ic modification with focused ion beam system
EP0504944B1 (de) * 1991-03-22 1998-09-23 Nec Corporation Verfahren zur Fehleranalyse unter Verwendung eines Elektronenstrahles
US5210487A (en) * 1991-06-04 1993-05-11 Schlumberger Technologies Inc. Double-gated integrating scheme for electron beam tester
US5392222A (en) * 1991-12-30 1995-02-21 Schlumberger Technologies Inc. Locating a field of view in which selected IC conductors are unobscured
US5604819A (en) * 1993-03-15 1997-02-18 Schlumberger Technologies Inc. Determining offset between images of an IC
US5530372A (en) * 1994-04-15 1996-06-25 Schlumberger Technologies, Inc. Method of probing a net of an IC at an optimal probe-point
FR2807539B1 (fr) * 2000-04-11 2002-06-07 Centre Nat Etd Spatiales Procede et installation de localisation optimale automatique d'une operation sur un circuit integre
GB2414857B (en) * 2004-06-03 2009-02-25 Nanobeam Ltd Apparatus for blanking a charged particle beam
US9697982B2 (en) * 2015-04-06 2017-07-04 Euclid Techlabs, Llc Apparatus for GHz rate high duty cycle pulsing and manipulation of low and medium energy DC electron beams
US10319556B2 (en) 2015-12-03 2019-06-11 Euclid Techlabs, Llc Ultra broad band continuously tunable electron beam pulser
DE102016223664B4 (de) 2016-11-29 2024-05-08 Carl Zeiss Smt Gmbh Strahlaustaster und Verfahren zum Austasten eines geladenen Teilchenstrahls
US10515733B1 (en) 2019-04-24 2019-12-24 Euclid Techlabs, Llc Broad band tunable energy electron beam pulser
US10804001B1 (en) 2019-04-24 2020-10-13 Euclid Technlabs, LLC Broad band tunable energy electron beam pulser

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1246744A (en) * 1969-01-02 1971-09-15 Graham Stuart Plows Electron beam apparatus
US3628012A (en) * 1969-04-03 1971-12-14 Graham Stuart Plows Scanning stereoscopic electron microscope
US3949228A (en) * 1973-09-19 1976-04-06 Ibm Corporation Method for controlling an electron beam
CA1044374A (en) * 1976-05-17 1978-12-12 Joseph Mckeown Charged particle beam deflector
US4169244A (en) * 1978-02-03 1979-09-25 Plows Graham S Electron probe testing, analysis and fault diagnosis in electronic circuits
FR2520553A1 (fr) * 1982-01-22 1983-07-29 Cameca Appareil d'optique electronique comportant des elements en graphite pyrolytique
US4434371A (en) * 1982-03-04 1984-02-28 Hughes Aircraft Company Electron beam blanking apparatus and method

Also Published As

Publication number Publication date
US4721909A (en) 1988-01-26
EP0233123A2 (de) 1987-08-19
EP0233123A3 (en) 1988-09-14
CA1256597A (en) 1989-06-27
EP0233123B1 (de) 1991-08-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee