DE3772084D1 - Geraet zur energieselektiven visualisierung. - Google Patents

Geraet zur energieselektiven visualisierung.

Info

Publication number
DE3772084D1
DE3772084D1 DE8787200401T DE3772084T DE3772084D1 DE 3772084 D1 DE3772084 D1 DE 3772084D1 DE 8787200401 T DE8787200401 T DE 8787200401T DE 3772084 T DE3772084 T DE 3772084T DE 3772084 D1 DE3772084 D1 DE 3772084D1
Authority
DE
Germany
Prior art keywords
energy selective
selective visualization
visualization
energy
selective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787200401T
Other languages
English (en)
Inventor
Poole Jan Bart Le
Der Mast Karel Diederick Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of DE3772084D1 publication Critical patent/DE3772084D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE8787200401T 1986-03-18 1987-03-05 Geraet zur energieselektiven visualisierung. Expired - Lifetime DE3772084D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8600685A NL8600685A (nl) 1986-03-18 1986-03-18 Apparaat voor energie selectieve afbeelding.

Publications (1)

Publication Number Publication Date
DE3772084D1 true DE3772084D1 (de) 1991-09-19

Family

ID=19847731

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787200401T Expired - Lifetime DE3772084D1 (de) 1986-03-18 1987-03-05 Geraet zur energieselektiven visualisierung.

Country Status (5)

Country Link
US (1) US4789780A (de)
EP (1) EP0241060B1 (de)
JP (1) JP2661908B2 (de)
DE (1) DE3772084D1 (de)
NL (1) NL8600685A (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0245734A (ja) * 1988-08-05 1990-02-15 Mitsubishi Heavy Ind Ltd 自動組織解析処理装置
DE4002849A1 (de) * 1990-02-01 1991-08-08 Finnigan Mat Gmbh Verfahren und massenspektrometer zur massenspektroskopischen bzw. massenspektrometrischen untersuchung von teilchen
US5097126A (en) * 1990-09-25 1992-03-17 Gatan, Inc. High resolution electron energy loss spectrometer
US5578823A (en) * 1994-12-16 1996-11-26 Hitachi, Ltd. Transmission electron microscope and method of observing element distribution by using the same
US5640012A (en) * 1995-08-25 1997-06-17 Gatan, Inc. Precision-controlled slit mechanism for electron microscope
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
US6184524B1 (en) 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
JP2006040777A (ja) * 2004-07-29 2006-02-09 Jeol Ltd 電子顕微鏡
EP3065160B1 (de) * 2015-11-02 2017-12-20 FEI Company Nachsäulenfilter mit verbessertem energiebereich

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB961112A (en) * 1962-03-27 1964-06-17 Hitachi Ltd Energy-selecting electron microscopes
JPS5535667B2 (de) * 1972-06-30 1980-09-16
JPS532755B2 (de) * 1973-08-22 1978-01-31
JPS5815732B2 (ja) * 1974-04-22 1983-03-28 株式会社日立製作所 シツリヨウブンセキソウチ
GB1530277A (en) * 1975-01-02 1978-10-25 Commissariat Energie Atomique Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons
US4107526A (en) * 1976-03-22 1978-08-15 Minnesota Mining And Manufacturing Company Ion scattering spectrometer with modified bias
NL7610171A (nl) * 1976-09-14 1978-03-16 Philips Nv Energieanalyserende elektronenmikroskoop.
JPS5442195A (en) * 1977-09-09 1979-04-03 Shimadzu Corp Sample analyzing apparatus by charged particle beams
JPS5673468A (en) * 1979-11-21 1981-06-18 Toshiba Corp Mos type semiconductor device
US4399360A (en) * 1980-08-08 1983-08-16 University Patents, Inc. Transmission electron microscope employing sequential pixel acquistion for display
JPS60138833A (ja) * 1983-12-26 1985-07-23 Jeol Ltd 質量分析装置

Also Published As

Publication number Publication date
EP0241060B1 (de) 1991-08-14
NL8600685A (nl) 1987-10-16
JPS62229749A (ja) 1987-10-08
EP0241060A1 (de) 1987-10-14
US4789780A (en) 1988-12-06
JP2661908B2 (ja) 1997-10-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee