DE3743952C2 - - Google Patents
Info
- Publication number
- DE3743952C2 DE3743952C2 DE3743952A DE3743952A DE3743952C2 DE 3743952 C2 DE3743952 C2 DE 3743952C2 DE 3743952 A DE3743952 A DE 3743952A DE 3743952 A DE3743952 A DE 3743952A DE 3743952 C2 DE3743952 C2 DE 3743952C2
- Authority
- DE
- Germany
- Prior art keywords
- cylinder
- heat insulating
- carbon
- crucible
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31557986A JPH0751472B2 (ja) | 1986-12-26 | 1986-12-26 | シリコン単結晶引上装置 |
JP61315600A JPH0751475B2 (ja) | 1986-12-26 | 1986-12-26 | シリコン単結晶引上装置 |
JP61315581A JPH0751474B2 (ja) | 1986-12-26 | 1986-12-26 | シリコン単結晶引上装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3743952A1 DE3743952A1 (de) | 1988-07-07 |
DE3743952C2 true DE3743952C2 (US08066781-20111129-C00013.png) | 1991-06-27 |
Family
ID=27339483
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19873743952 Granted DE3743952A1 (de) | 1986-12-26 | 1987-12-23 | Einrichtung zum ziehen von siliziumeinkristallen mit einem waermeisolierzylinder und verfahren zur herstellung des materials desselben |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR910009131B1 (US08066781-20111129-C00013.png) |
DE (1) | DE3743952A1 (US08066781-20111129-C00013.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4130253C2 (de) * | 1991-09-12 | 2001-10-04 | Sgl Carbon Ag | Mehrteiliger Stütztiegel und Verfahren zu seiner Herstellung |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3444178B2 (ja) * | 1998-02-13 | 2003-09-08 | 信越半導体株式会社 | 単結晶製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2817822B2 (ja) * | 1992-05-14 | 1998-10-30 | 富士電機株式会社 | 電子写真用感光体 |
-
1987
- 1987-12-23 DE DE19873743952 patent/DE3743952A1/de active Granted
- 1987-12-26 KR KR1019870015147A patent/KR910009131B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4130253C2 (de) * | 1991-09-12 | 2001-10-04 | Sgl Carbon Ag | Mehrteiliger Stütztiegel und Verfahren zu seiner Herstellung |
Also Published As
Publication number | Publication date |
---|---|
KR910009131B1 (ko) | 1991-10-31 |
KR880008414A (ko) | 1988-08-31 |
DE3743952A1 (de) | 1988-07-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE2853397C3 (de) | Wärmeisolierungsmaterial auf der Basis einer gasdurchlässigen Filzbahn aus Kohlenstoffasern und Verfahren zu dessen Herstellung | |
DE69634562T2 (de) | Hochreine zusammensetzung für ofenteile | |
DE944209C (de) | Verfahren zur Herstellung von Halbleiterkoerpern | |
DE3743951C2 (US08066781-20111129-C00013.png) | ||
DE2654063A1 (de) | Verfahren zum herstellen eines bandes aus polykristallinem halbleitermaterial | |
EP1748464B1 (de) | Drehanode sowie Verfahren zum Herstellen eines Kühlkörpers einer Drehanode | |
DE112020000646T5 (de) | Einrichtung zum Halbleiterkristallwachstum | |
DE2702189A1 (de) | Kuevette fuer die flammenlose atom- absorptions-spektroskopie | |
DE3874219T2 (de) | Vorrichtung zur zuechtung von kristallen aus halbleitermaterialien. | |
EP0557480B1 (de) | Mehrteiliger stütztiegel | |
DE10219387B4 (de) | Aus Kohlenfaser-verstärktem Kohlenstoffkompositmaterial hergestellter Schmelztiegel für ein Einkristallziehgerät | |
DE3743952C2 (US08066781-20111129-C00013.png) | ||
EP0031576B1 (de) | Verfahren zum Umgiessen eines elektrischen Gerätes | |
EP0304551A1 (de) | Spülstein und Verfahren zu dessen Herstellung | |
DE3111657C2 (de) | Verfahren zur Herstellung von Magnetschichten auf Substraten mit Granatstruktur | |
DE102009004751B4 (de) | Thermisch isolierte Anordnung und Verfahren zur Herstellung eines SiC-Volumeneinkristalls | |
DE3441707C2 (de) | Tiegel zum Herstellen von Kristallen und Verwendung des Tiegels | |
DE10321785A1 (de) | Dauerhafter CFC-Stütztiegel für Hochtemperaturprozesse beim Ziehen von Halbleiterkristallen | |
DE3120902C1 (de) | Ablationsschicht sowie Verfahren und Vorrichtung zu ihrer Herstellung | |
DE2358583A1 (de) | Gitterelektrode fuer elektronenroehre und verfahren zu deren herstellung | |
DE1191336B (de) | Zonenschmelzverfahren zum Umwandeln von mindestens einem polykristallinen Stab in einen Einkristall | |
CH648962A5 (de) | Verfahren zur herstellung einer stuetzeinrichtung fuer die wickelkoepfe einer elektrischen maschine. | |
DE9111315U1 (de) | Mehrteiliger Stütztiegel | |
DE3210289C2 (de) | Anwendung und Ausbildung eines Herstellungsverfahrens für einen mit einem Oberflächenüberzug zu versehenden Formkörper auf kohlefaserverstärkte Kohlenstoffkörper | |
DE10327095A1 (de) | Träger für Bauteile sowie Verfahren zum Herstellen eines solchen |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |