DE3736200C2 - - Google Patents
Info
- Publication number
- DE3736200C2 DE3736200C2 DE19873736200 DE3736200A DE3736200C2 DE 3736200 C2 DE3736200 C2 DE 3736200C2 DE 19873736200 DE19873736200 DE 19873736200 DE 3736200 A DE3736200 A DE 3736200A DE 3736200 C2 DE3736200 C2 DE 3736200C2
- Authority
- DE
- Germany
- Prior art keywords
- temperature
- gas
- sensor
- modulated
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000003054 catalyst Substances 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 230000001419 dependent effect Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 29
- 238000006555 catalytic reaction Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 7
- 238000003909 pattern recognition Methods 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 230000010363 phase shift Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000004868 gas analysis Methods 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
- G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
- G01N27/124—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature varying the temperature, e.g. in a cyclic manner
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19873736200 DE3736200A1 (de) | 1987-10-26 | 1987-10-26 | Verfahren zum betrieb eines nach dem kalorimeterprinzip arbeitenden halbleitergassensors mit mehreren sensorelementen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19873736200 DE3736200A1 (de) | 1987-10-26 | 1987-10-26 | Verfahren zum betrieb eines nach dem kalorimeterprinzip arbeitenden halbleitergassensors mit mehreren sensorelementen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3736200A1 DE3736200A1 (de) | 1989-05-03 |
| DE3736200C2 true DE3736200C2 (cg-RX-API-DMAC7.html) | 1991-08-22 |
Family
ID=6339094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19873736200 Granted DE3736200A1 (de) | 1987-10-26 | 1987-10-26 | Verfahren zum betrieb eines nach dem kalorimeterprinzip arbeitenden halbleitergassensors mit mehreren sensorelementen |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3736200A1 (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19959925A1 (de) * | 1999-12-11 | 2001-06-21 | Daimler Chrysler Ag | Verfahren zur Bestimmung von Gaskonzentrationen mit einem Dünnschicht-Halbleiter-Gassensor |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4001959A1 (de) * | 1990-01-24 | 1991-07-25 | Rump Elektronik Tech | Spezifisch gewichteter gas-partialsummensensor |
| AU1279495A (en) * | 1994-12-13 | 1996-07-03 | Consiglio Nazionale Delle Ricerche | Multiharmonic calorimetric spectroscopy |
| US6095679A (en) * | 1996-04-22 | 2000-08-01 | Ta Instruments | Method and apparatus for performing localized thermal analysis and sub-surface imaging by scanning thermal microscopy |
| US6131438A (en) * | 1996-12-20 | 2000-10-17 | Ford Global Technologies, Inc. | Method of operating a calorimetric gas sensor |
| DE19833454C2 (de) * | 1998-07-24 | 2000-06-08 | Siemens Ag | Verfahren zur Verringerung von Driftverhalten bei resistiven Hochtemperatur-Gassensoren und Vorrichtung zur Durchführung des Verfahrens |
| CN116106374A (zh) * | 2022-12-28 | 2023-05-12 | 交通运输部天津水运工程科学研究所 | 气体传感器系统设计方法、传感器系统及气体检测方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1104209A (en) * | 1978-03-02 | 1981-06-30 | Evgeny F. Karpov | Method for checking thermocatalytic sensors of mine safety systems |
| DE2913659A1 (de) * | 1979-04-05 | 1980-10-16 | J & S Sieger Ltd | Katalytischer messfuehler |
| FR2517062A1 (fr) * | 1981-11-20 | 1983-05-27 | Charbonnages De France | Procede d'interrogation d'un detecteur de teneur en gaz combustible, dispositif pour sa mise en oeuvre et application a la detection de la teneur en methane |
| GB2175399B (en) * | 1985-05-20 | 1989-10-11 | Us Energy | Selective chemical detection by energy modulation of sensors |
| DE3519410A1 (de) * | 1985-05-30 | 1986-12-04 | Siemens AG, 1000 Berlin und 8000 München | Betriebsverfahren und sensor fuer gasanalyse |
| DE3519397A1 (de) * | 1985-05-30 | 1986-12-04 | Siemens AG, 1000 Berlin und 8000 München | Sensor fuer gasanalyse bzw. -detektion |
-
1987
- 1987-10-26 DE DE19873736200 patent/DE3736200A1/de active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19959925A1 (de) * | 1999-12-11 | 2001-06-21 | Daimler Chrysler Ag | Verfahren zur Bestimmung von Gaskonzentrationen mit einem Dünnschicht-Halbleiter-Gassensor |
| DE19959925C2 (de) * | 1999-12-11 | 2003-09-18 | Eads Deutschland Gmbh | Verfahren zur Bestimmung von Gaskonzentrationen mit einem Dünnschicht-Halbleiter-Gassensor und Dünnschicht-Halbleiter-Gassensor |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3736200A1 (de) | 1989-05-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |