DE3716241C2 - - Google Patents

Info

Publication number
DE3716241C2
DE3716241C2 DE19873716241 DE3716241A DE3716241C2 DE 3716241 C2 DE3716241 C2 DE 3716241C2 DE 19873716241 DE19873716241 DE 19873716241 DE 3716241 A DE3716241 A DE 3716241A DE 3716241 C2 DE3716241 C2 DE 3716241C2
Authority
DE
Germany
Prior art keywords
frequency
light
superimposed
components
location
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE19873716241
Other languages
German (de)
English (en)
Other versions
DE3716241A1 (de
Inventor
Dirk Dipl.-Phys. Dr. 2800 Bremen De Rathjen
Hubert Dipl.-Phys. Dr. 2806 Oyten De Burggraf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atlas Elektronik GmbH
Original Assignee
Fried Krupp AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fried Krupp AG filed Critical Fried Krupp AG
Priority to DE19873716241 priority Critical patent/DE3716241A1/de
Priority to PCT/EP1988/001013 priority patent/WO1990005279A1/de
Publication of DE3716241A1 publication Critical patent/DE3716241A1/de
Application granted granted Critical
Publication of DE3716241C2 publication Critical patent/DE3716241C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE19873716241 1987-05-15 1987-05-15 Messverfahren zum bestimmen eines oberflaechenprofils Granted DE3716241A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19873716241 DE3716241A1 (de) 1987-05-15 1987-05-15 Messverfahren zum bestimmen eines oberflaechenprofils
PCT/EP1988/001013 WO1990005279A1 (fr) 1987-05-15 1988-11-10 Procede de mesure pour determiner le profil d'une surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19873716241 DE3716241A1 (de) 1987-05-15 1987-05-15 Messverfahren zum bestimmen eines oberflaechenprofils

Publications (2)

Publication Number Publication Date
DE3716241A1 DE3716241A1 (de) 1988-12-01
DE3716241C2 true DE3716241C2 (enExample) 1991-06-13

Family

ID=6327590

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19873716241 Granted DE3716241A1 (de) 1987-05-15 1987-05-15 Messverfahren zum bestimmen eines oberflaechenprofils

Country Status (2)

Country Link
DE (1) DE3716241A1 (enExample)
WO (1) WO1990005279A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5612785A (en) * 1996-01-03 1997-03-18 Servo Robot Inc. Twin sensor laser probe
RU2166748C1 (ru) * 2000-04-10 2001-05-10 Зайцев Павел Анатольевич Способ формирования изображений и определения рельефа объектов сложной формы

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3814943A (en) * 1969-08-26 1974-06-04 Sira Institute Method of and apparatus for analysing patterns and inspecting objects
SE404549B (sv) * 1976-12-07 1978-10-09 Hard Av Segerstad Sverker Anordning for faststellande av konditionen hos en yta eller inhomogeniteter i en transparent volym
DE2658399A1 (de) * 1976-12-23 1978-06-29 Ibm Deutschland Interferometrisches verfahren
US4353650A (en) * 1980-06-16 1982-10-12 The United States Of America As Represented By The United States Department Of Energy Laser heterodyne surface profiler
DE3037622C2 (de) * 1980-10-04 1987-02-26 Theodor Prof. Dr.-Ing. 1000 Berlin Gast Einrichtung zur Bestimmung der Oberflächengüte
DE3318678A1 (de) * 1983-05-21 1984-11-22 Adolf Friedrich Prof. Dr.-Phys. Fercher Verfahren und vorrichtung zur interferometrie rauher oberflaechen

Also Published As

Publication number Publication date
DE3716241A1 (de) 1988-12-01
WO1990005279A1 (fr) 1990-05-17

Similar Documents

Publication Publication Date Title
DE3428593C2 (enExample)
EP0011708B1 (de) Verfahren und Vorrichtung zur Messung der Ebenheit, der Rauhigkeit oder des Krümmungsradius einer Messfläche
EP0777853B1 (de) Vorrichtung zur durchführung spektroskopischer messungen
DE69033111T2 (de) Apparat und Verfahren für die Ausmessung von dünnen mehrschichtigen Lagen
DE69722876T2 (de) Vorrichtung und Verfahren zur optischen Profilmessung
DE4235832B4 (de) Vorrichtung und Verfahren zum Überprüfen eines Dachwinkels eines optischen Elements
DE69719427T2 (de) Optische Vorrichtung zur schnellen Defektanalyse
EP0126475A1 (de) Verfahren und Vorrichtung zum berührungsfreien Messen der Ist-Position und/oder des Profils rauher Oberflächen
WO1990010191A1 (de) Polarisationsinterferometer
DE3800053C2 (enExample)
DE3382706T2 (de) Verfahren und Vorrichtung zur Relativwegmessung.
EP1290485B1 (de) Verfahren zur quantitativen optischen messung der topographie einer oberfläche
DE3751180T2 (de) Abbildender Kohärenzmesser.
DE3716241C2 (enExample)
DE19720330C1 (de) Verfahren und Vorrichtung zur Messung von Spannungen in Glasscheiben mit Hilfe des Streulichtverfahrens
DE4105509C2 (de) Streulichtmeßanordnung zur Untersuchung der Oberflächenrauheit
EP0346601B1 (de) Verfahren und Vorrichtung zur Messung der Strömungsgeschwindigkeit, insbesondere in einem Windkanal
EP0218151B1 (de) Messverfahren und Vorrichtung zur berührungslosen Durchmesserbestimmung dünner Drähte
DE60304222T2 (de) VERFAHREN ZUR MESSUNG VON KONTURVERuNDERUNGEN
DE2447889A1 (de) Interferometer fuer die messung von wellenfrontabschnitten von allgemeinen abbildungssystemen, insbesondere des menschlichen auges
DE2061381A1 (de) Interferometer
DE3002736C2 (de) Anordnung zur Messung der vertikalen Verformung von Informationsträgern
DE3801889C2 (enExample)
DE2623919C2 (de) Laser-Doppler-Geschwindigkeitsmesser
DE3322713A1 (de) Verfahren und vorrichtung zur laufenden messung des rollwinkels eines beweglichen maschinenteiles

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ATLAS ELEKTRONIK GMBH, 2800 BREMEN, DE

8327 Change in the person/name/address of the patent owner

Owner name: STN ATLAS ELEKTRONIK GMBH, 28309 BREMEN, DE

8339 Ceased/non-payment of the annual fee