DE3690558T1 - - Google Patents

Info

Publication number
DE3690558T1
DE3690558T1 DE19863690558 DE3690558T DE3690558T1 DE 3690558 T1 DE3690558 T1 DE 3690558T1 DE 19863690558 DE19863690558 DE 19863690558 DE 3690558 T DE3690558 T DE 3690558T DE 3690558 T1 DE3690558 T1 DE 3690558T1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19863690558
Other languages
German (de)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE3690558T1 publication Critical patent/DE3690558T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
DE19863690558 1985-10-31 1986-10-23 Withdrawn DE3690558T1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US79370785A 1985-10-31 1985-10-31

Publications (1)

Publication Number Publication Date
DE3690558T1 true DE3690558T1 (fr) 1987-12-10

Family

ID=25160592

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19863690558 Withdrawn DE3690558T1 (fr) 1985-10-31 1986-10-23

Country Status (4)

Country Link
JP (1) JPS63501585A (fr)
DE (1) DE3690558T1 (fr)
GB (1) GB2191247B (fr)
WO (1) WO1987002743A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe
DE4392772B4 (de) * 1992-06-12 2006-05-04 Helix Technology Corp., Mansfield Cryopumpe und Cryoplatte, die eine reifkonzentrierende Einrichtung hat

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
JP6031451B2 (ja) * 2011-02-09 2016-11-24 ブルックス オートメーション インコーポレイテッド クライオポンプ
JP5460644B2 (ja) * 2011-05-12 2014-04-02 住友重機械工業株式会社 クライオポンプ
JP6013886B2 (ja) 2012-11-13 2016-10-25 住友重機械工業株式会社 クライオポンプ
JP5669895B2 (ja) * 2013-07-22 2015-02-18 住友重機械工業株式会社 クライオポンプ及びその製造方法
CN103742389B (zh) * 2013-10-18 2015-12-23 石狮市台瑞精密机械有限公司 一种真空低温泵中的组合冷板

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2455712A1 (de) * 1974-11-25 1976-08-12 Eckhard Kellner Cryo-sorptionspumpe
CH652804A5 (en) * 1981-03-10 1985-11-29 Balzers Hochvakuum Method for regenerating the low-temperature condensation surfaces of a cryopump and cryopump appliance for implementing the method
IL71403A (en) * 1983-04-04 1991-01-31 Helix Tech Corp Cryopump with rapid cooldown and increased pressure stability
US4494381A (en) * 1983-05-13 1985-01-22 Helix Technology Corporation Cryopump with improved adsorption capacity
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4392772B4 (de) * 1992-06-12 2006-05-04 Helix Technology Corp., Mansfield Cryopumpe und Cryoplatte, die eine reifkonzentrierende Einrichtung hat
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe

Also Published As

Publication number Publication date
JPS63501585A (ja) 1988-06-16
WO1987002743A1 (fr) 1987-05-07
GB2191247A (en) 1987-12-09
GB2191247B (en) 1989-10-11
GB8713719D0 (en) 1987-07-15

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Legal Events

Date Code Title Description
8141 Disposal/no request for examination