DE3672583D1 - Anordnung fuer das optische messen von oberflaechenprofilen. - Google Patents
Anordnung fuer das optische messen von oberflaechenprofilen.Info
- Publication number
- DE3672583D1 DE3672583D1 DE8686202021T DE3672583T DE3672583D1 DE 3672583 D1 DE3672583 D1 DE 3672583D1 DE 8686202021 T DE8686202021 T DE 8686202021T DE 3672583 T DE3672583 T DE 3672583T DE 3672583 D1 DE3672583 D1 DE 3672583D1
- Authority
- DE
- Germany
- Prior art keywords
- arrangement
- optical measurement
- surface profiles
- measure
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Measuring Cells (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8503182A NL8503182A (nl) | 1985-11-19 | 1985-11-19 | Inrichting voor het langs optische weg meten van een oppervlakteprofiel. |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3672583D1 true DE3672583D1 (de) | 1990-08-16 |
Family
ID=19846892
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686202021T Expired - Lifetime DE3672583D1 (de) | 1985-11-19 | 1986-11-17 | Anordnung fuer das optische messen von oberflaechenprofilen. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4808003A (de) |
EP (1) | EP0227136B1 (de) |
JP (1) | JPH0726821B2 (de) |
KR (1) | KR940003916B1 (de) |
AT (1) | ATE54489T1 (de) |
DE (1) | DE3672583D1 (de) |
NL (1) | NL8503182A (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5113082A (en) * | 1990-09-11 | 1992-05-12 | Moshe Golberstein | Electro-optical instrument with self-contained photometer |
NL9100205A (nl) * | 1991-02-06 | 1992-09-01 | Philips Nv | Inrichting voor het optisch meten van de hoogte van een oppervlak. |
GB9107740D0 (en) * | 1991-04-11 | 1991-05-29 | Atomic Energy Authority Uk | Method of monitoring displacements |
DE69735943T2 (de) * | 1996-11-26 | 2007-01-04 | Assembléon N.V. | Methode zum anordnen von bauteilen auf einem träger mit kalibrierungsverfahren und vorrichtung dafür |
AU5925300A (en) * | 1999-07-10 | 2001-01-30 | Tay Bok Her | Post-seal inspection system and method |
DE202004009727U1 (de) | 2004-06-21 | 2004-10-07 | Trioptics Gmbh | Vorrichtung zur Messung von Winkeln optischer Oberflächen |
JP2016201002A (ja) * | 2015-04-10 | 2016-12-01 | 船井電機株式会社 | 位置検出装置及び空間入力装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2116872A5 (fr) * | 1970-12-10 | 1972-07-21 | Compteurs Comp D | Perfectionnements aux dispositifs palpeurs optiques |
US3692414A (en) * | 1971-02-24 | 1972-09-19 | Harry L Hosterman | Non-contacting measuring probe |
US4379647A (en) * | 1971-10-18 | 1983-04-12 | Paul S. Kempf | Optical comparator and inspection apparatus |
AR205243A1 (es) | 1972-05-11 | 1976-04-21 | Philips Nv | Aparato para la lectura de un portador de grabacion reflector plano |
US3944369A (en) * | 1974-05-24 | 1976-03-16 | Bell Telephone Laboratories, Incorporated | Optical comparator system to separate unacceptable defects from acceptable edge aberrations |
US4017188A (en) * | 1975-02-26 | 1977-04-12 | The Bendix Corporation | Surface profile measuring device and method |
US4158507A (en) * | 1977-07-27 | 1979-06-19 | Recognition Equipment Incorporated | Laser measuring system for inspection |
DE2903529A1 (de) * | 1979-01-31 | 1980-08-07 | Schlatter Ag | Verfahren zum messen von entfernungen und vorrichtung zur durchfuehrung des verfahrens |
US4383168A (en) * | 1980-06-02 | 1983-05-10 | Raytheon Company | Automatic focusing apparatus |
US4427880A (en) * | 1981-06-29 | 1984-01-24 | Westinghouse Electric Corp. | Non-contact visual proximity sensing apparatus |
JPS5963503A (ja) * | 1982-10-02 | 1984-04-11 | Canon Inc | マ−ク位置検出方法 |
DE3315576A1 (de) * | 1983-04-29 | 1984-10-31 | Hommelwerke GmbH, 7730 Villingen-Schwenningen | Einrichtung zur optischen abstandsmessung, insbesondere zur messung von profilen von werkstuecken oder schneidkanten von werkzeugen |
US4627734A (en) * | 1983-06-30 | 1986-12-09 | Canadian Patents And Development Limited | Three dimensional imaging method and device |
-
1985
- 1985-11-19 NL NL8503182A patent/NL8503182A/nl not_active Application Discontinuation
-
1986
- 1986-11-10 US US06/929,234 patent/US4808003A/en not_active Expired - Fee Related
- 1986-11-17 AT AT86202021T patent/ATE54489T1/de active
- 1986-11-17 JP JP61272036A patent/JPH0726821B2/ja not_active Expired - Lifetime
- 1986-11-17 EP EP86202021A patent/EP0227136B1/de not_active Expired - Lifetime
- 1986-11-17 DE DE8686202021T patent/DE3672583D1/de not_active Expired - Lifetime
- 1986-11-18 KR KR1019860009725A patent/KR940003916B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH0726821B2 (ja) | 1995-03-29 |
JPS62121305A (ja) | 1987-06-02 |
EP0227136B1 (de) | 1990-07-11 |
KR940003916B1 (ko) | 1994-05-09 |
ATE54489T1 (de) | 1990-07-15 |
NL8503182A (nl) | 1987-06-16 |
US4808003A (en) | 1989-02-28 |
KR870005235A (ko) | 1987-06-05 |
EP0227136A1 (de) | 1987-07-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL |
|
8339 | Ceased/non-payment of the annual fee |