KR930008564B1 - 레이저빔을 이용한 직선운동 각도 검사장치 - Google Patents
레이저빔을 이용한 직선운동 각도 검사장치 Download PDFInfo
- Publication number
- KR930008564B1 KR930008564B1 KR1019900022065A KR900022065A KR930008564B1 KR 930008564 B1 KR930008564 B1 KR 930008564B1 KR 1019900022065 A KR1019900022065 A KR 1019900022065A KR 900022065 A KR900022065 A KR 900022065A KR 930008564 B1 KR930008564 B1 KR 930008564B1
- Authority
- KR
- South Korea
- Prior art keywords
- linear motion
- laser beam
- laser
- inspection device
- prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (3)
- 고정된 위치에서 일정한 기준의 헬륨네온 레이저를 발생시키는 레이저 발생기(1)와, 상기 레이저 발생기(1)에서 출력되는 빔(Beam)이 이송체(3) 상부에 적재되어 이동되는 검출부(2)에 방사되도록 구성함을 특징으로 하는 레이저빔을 이용한 직선운동 각도 검사장치.
- 제 1 항에 있어서, 상기 검출부(2)는 레이저 발생기(1)로부터 방사된 빔을 직각으로 분리 반사시키기 위한 프리즘(4)과, 상기 프리즘(4)을 통해 반사된 빔을 수광하여 전기적 신호로 변환시키는 수광소자(5), (6)와, 상기 수광소자(5), (6)로부터의 각 전기적인 신호를 각각 증폭기(7), (8)와, 상기 증폭기(7), (8)를 통해 증폭된 출력을 아날로그 또는 디지탈식으로 측정각도를 나타내는 표시기(9), (10)를 상호 연결하여서 구성된 것을 특징으로 하는 레이저빔을 이용한 직선운동 각도 검사장치.
- 제 2 항에 있어서, 상기 프리즘(4)은 제 1 반사면(4a)과 제 2 반사면(4b)을 가지고 입사광을 직각으로 반사시키도록 형성함을 특징으로 하는 레이저빔을 이용한 직선운동 각도 검사장치.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019900022065A KR930008564B1 (ko) | 1990-12-28 | 1990-12-28 | 레이저빔을 이용한 직선운동 각도 검사장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019900022065A KR930008564B1 (ko) | 1990-12-28 | 1990-12-28 | 레이저빔을 이용한 직선운동 각도 검사장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR920012884A KR920012884A (ko) | 1992-07-28 |
| KR930008564B1 true KR930008564B1 (ko) | 1993-09-09 |
Family
ID=19308685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019900022065A Expired - Fee Related KR930008564B1 (ko) | 1990-12-28 | 1990-12-28 | 레이저빔을 이용한 직선운동 각도 검사장치 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR930008564B1 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970022218A (ko) * | 1995-10-30 | 1997-05-28 | 유상부 | 레이저 빔 및 포토-커플러 수광부를 이용한 스웨이각 측정방법 및 그 장치 |
| KR100922142B1 (ko) * | 2007-11-12 | 2009-10-19 | 한국표준과학연구원 | 편광 레이저의 위상차를 이용한 실시간 필름두께 모니터링장치 및 그 방법 |
-
1990
- 1990-12-28 KR KR1019900022065A patent/KR930008564B1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR920012884A (ko) | 1992-07-28 |
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