DE3613112C2 - - Google Patents

Info

Publication number
DE3613112C2
DE3613112C2 DE19863613112 DE3613112A DE3613112C2 DE 3613112 C2 DE3613112 C2 DE 3613112C2 DE 19863613112 DE19863613112 DE 19863613112 DE 3613112 A DE3613112 A DE 3613112A DE 3613112 C2 DE3613112 C2 DE 3613112C2
Authority
DE
Germany
Prior art keywords
coil
magnetic
vacuum chamber
measuring
properties
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19863613112
Other languages
German (de)
English (en)
Other versions
DE3613112A1 (de
Inventor
Karl Dipl.-Ing. Eberle (Fh), 8501 Cadolzburg, De
Horst Dipl.-Ing. Gukkenberger (Fh), 8502 Zirndorf, De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Grundig EMV Elektromechanische Versuchsanstalt Max Grundig GmbH
Original Assignee
Grundig EMV Elektromechanische Versuchsanstalt Max Grundig GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Grundig EMV Elektromechanische Versuchsanstalt Max Grundig GmbH filed Critical Grundig EMV Elektromechanische Versuchsanstalt Max Grundig GmbH
Priority to DE19863613112 priority Critical patent/DE3613112A1/de
Publication of DE3613112A1 publication Critical patent/DE3613112A1/de
Application granted granted Critical
Publication of DE3613112C2 publication Critical patent/DE3613112C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
DE19863613112 1986-04-18 1986-04-18 Einrichtung zum messen der magnetischen eigenschaften von durch sputtern oder bedampfen aufgebrachten schichten waehrend des bearbeitungsvorganges Granted DE3613112A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19863613112 DE3613112A1 (de) 1986-04-18 1986-04-18 Einrichtung zum messen der magnetischen eigenschaften von durch sputtern oder bedampfen aufgebrachten schichten waehrend des bearbeitungsvorganges

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863613112 DE3613112A1 (de) 1986-04-18 1986-04-18 Einrichtung zum messen der magnetischen eigenschaften von durch sputtern oder bedampfen aufgebrachten schichten waehrend des bearbeitungsvorganges

Publications (2)

Publication Number Publication Date
DE3613112A1 DE3613112A1 (de) 1987-10-22
DE3613112C2 true DE3613112C2 (enrdf_load_stackoverflow) 1989-02-09

Family

ID=6298986

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19863613112 Granted DE3613112A1 (de) 1986-04-18 1986-04-18 Einrichtung zum messen der magnetischen eigenschaften von durch sputtern oder bedampfen aufgebrachten schichten waehrend des bearbeitungsvorganges

Country Status (1)

Country Link
DE (1) DE3613112A1 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05209263A (ja) * 1992-01-13 1993-08-20 Nec Corp スパッタ合金膜の製造方法及びその装置
DE19951015C1 (de) * 1999-10-22 2001-01-25 Bosch Gmbh Robert Verfahren zur Charakterisierung von Metallelektroden keramischer Sensorelemente
ES2247219T3 (es) * 2002-05-10 2006-03-01 Siemens Aktiengesellschaft Procedimiento para la determinacion in situ del espesor de una capa.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2630780A (en) * 1946-12-21 1953-03-10 Falck Hakan Fredrik Device for depositing thin metallic layers
US4207836A (en) * 1977-07-01 1980-06-17 Hitachi, Ltd. Vacuum vapor-deposition apparatus
DE3004149A1 (de) * 1980-02-05 1981-08-13 Siemens AG, 1000 Berlin und 8000 München Verfahren zur reproduzierbaren herstellung metallischer schichten

Also Published As

Publication number Publication date
DE3613112A1 (de) 1987-10-22

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8320 Willingness to grant licenses declared (paragraph 23)
8327 Change in the person/name/address of the patent owner

Owner name: GRUNDIG E.M.V. ELEKTRO-MECHANISCHE VERSUCHSANSTALT

8339 Ceased/non-payment of the annual fee
8327 Change in the person/name/address of the patent owner

Owner name: GRUNDIG AG, 90762 FUERTH, DE