DE3586049D1 - Hochtemperaturbestaendiger selektiv entwicklungsfaehiger schutzlack. - Google Patents
Hochtemperaturbestaendiger selektiv entwicklungsfaehiger schutzlack.Info
- Publication number
- DE3586049D1 DE3586049D1 DE8585309413T DE3586049T DE3586049D1 DE 3586049 D1 DE3586049 D1 DE 3586049D1 DE 8585309413 T DE8585309413 T DE 8585309413T DE 3586049 T DE3586049 T DE 3586049T DE 3586049 D1 DE3586049 D1 DE 3586049D1
- Authority
- DE
- Germany
- Prior art keywords
- selective
- resistant
- temperature
- protective lacquer
- developable protective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US68730684A | 1984-12-28 | 1984-12-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3586049D1 true DE3586049D1 (de) | 1992-06-17 |
Family
ID=24759927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585309413T Expired - Fee Related DE3586049D1 (de) | 1984-12-28 | 1985-12-23 | Hochtemperaturbestaendiger selektiv entwicklungsfaehiger schutzlack. |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0187517B1 (de) |
JP (1) | JPS61162039A (de) |
CA (1) | CA1254432A (de) |
DE (1) | DE3586049D1 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1255142A (en) * | 1985-03-11 | 1989-06-06 | Edward C. Fredericks | Method and composition of matter for improving conductor resolution in microelectronic circuits |
US5462840A (en) * | 1987-09-16 | 1995-10-31 | Hoechst Celanese Corporation | Use of poly(35-disubstituted 4-hydroxystyrene/N-substituted maleimide for forming a negative image |
US4927956A (en) * | 1987-09-16 | 1990-05-22 | Hoechst Celanese Corporation | 3,5-disubstituted-4-acetoxystyrene and process for its production |
DE3820699A1 (de) * | 1988-06-18 | 1989-12-21 | Hoechst Ag | Strahlungsempfindliches gemisch und hieraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial |
US5342727A (en) * | 1988-10-21 | 1994-08-30 | Hoechst Celanese Corp. | Copolymers of 4-hydroxystyrene and alkyl substituted-4-hydroxystyrene in admixture with a photosensitizer to form a photosensitive composition |
JP2746413B2 (ja) * | 1989-04-10 | 1998-05-06 | 東洋合成工業株式会社 | 遠紫外光用ホトレジスト組成物 |
DE3940911A1 (de) * | 1989-12-12 | 1991-06-13 | Hoechst Ag | Verfahren zur herstellung negativer kopien |
DE4002397A1 (de) * | 1990-01-27 | 1991-08-01 | Hoechst Ag | Strahlungsempfindliches gemisch und hieraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial |
DE4003025A1 (de) * | 1990-02-02 | 1991-08-08 | Hoechst Ag | Strahlungsempfindliches gemisch, hiermit hergestelltes strahlungsempfindliches aufzeichnungsmaterial und verfahren zur herstellung von reliefaufzeichnungen |
DE4004719A1 (de) * | 1990-02-15 | 1991-08-22 | Hoechst Ag | Strahlungsempfindliches gemisch, hiermit hergestelltes strahlungsempfindliches aufzeichnungsmaterial und verfahren zur herstellung von reliefaufzeichnungen |
DE69422590T2 (de) * | 1993-11-08 | 2000-08-24 | At & T Corp | Verfahren zur Herstellung einer Vorrichtung |
DE19507618A1 (de) * | 1995-03-04 | 1996-09-05 | Hoechst Ag | Polymere und diese enthaltendes lichtempfindliches Gemisch |
WO1998001791A1 (fr) * | 1996-07-10 | 1998-01-15 | Nippon Zeon Co., Ltd. | Composition de photoresine positive |
DE19803564A1 (de) | 1998-01-30 | 1999-08-05 | Agfa Gevaert Ag | Polymere mit Einheiten aus N-substituiertem Maleimid und deren Verwendung in strahlungsempfindlichen Gemischen |
JP4458389B2 (ja) | 2000-05-01 | 2010-04-28 | コダック株式会社 | 感光性組成物および感光性平版印刷版 |
JP2012068357A (ja) | 2010-09-22 | 2012-04-05 | Eastman Kodak Co | 平版印刷版原版 |
JP6213135B2 (ja) * | 2013-10-17 | 2017-10-18 | 東ソー株式会社 | trans−スチルベン−N−置換マレイミド共重合体及びそれを用いた位相差フィルム |
KR102104807B1 (ko) * | 2015-08-19 | 2020-04-27 | 후지필름 가부시키가이샤 | 패턴 형성 방법, 전자 디바이스의 제조 방법, 및 레지스트 조성물 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2462101A1 (de) * | 1974-08-02 | 1976-04-29 | Siemens Ag | Verfahren zur herstellung strahlungsempfindlicher, loeslicher polymerer verbindungen |
US4174326A (en) * | 1975-06-18 | 1979-11-13 | Ciba-Geigy Corporation | Imidyl compounds |
ATE9931T1 (de) * | 1979-05-18 | 1984-11-15 | Ciba-Geigy Ag | Lichtvernetzbare copolymere, sie enthaltendes lichtempfindliches aufzeichnungsmaterial, seine verwendung zur herstellung photographischer abbildungen und verfahren zur herstellung von photographischen abbildungen. |
EP0140273B1 (de) * | 1983-11-01 | 1991-09-11 | Hoechst Celanese Corporation | Tief UV-empfindliche positive Photolackzusammensetzung, lichtempfindliches Element und dasselbe enthaltendes gegen Hitze widerstandsfähiges photochemisches Bild |
US4524121A (en) * | 1983-11-21 | 1985-06-18 | Rohm And Haas Company | Positive photoresists containing preformed polyglutarimide polymer |
ATE68272T1 (de) * | 1984-06-01 | 1991-10-15 | Rohm & Haas | Lichtempfindliche beschichtungszusammensetzung, aus diesem hergestellte thermisch stabile beschichtungen und verfahren zur herstellung von thermisch stabilen polymerbildern. |
-
1985
- 1985-10-29 CA CA000494087A patent/CA1254432A/en not_active Expired
- 1985-12-23 DE DE8585309413T patent/DE3586049D1/de not_active Expired - Fee Related
- 1985-12-23 EP EP19850309413 patent/EP0187517B1/de not_active Expired
- 1985-12-27 JP JP29342785A patent/JPS61162039A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS61162039A (ja) | 1986-07-22 |
EP0187517A2 (de) | 1986-07-16 |
CA1254432A (en) | 1989-05-23 |
EP0187517B1 (de) | 1992-05-13 |
EP0187517A3 (en) | 1987-10-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |