DE3585708D1 - Foerdersystem vom typ mit schwebendem traeger. - Google Patents
Foerdersystem vom typ mit schwebendem traeger.Info
- Publication number
- DE3585708D1 DE3585708D1 DE8585105026T DE3585708T DE3585708D1 DE 3585708 D1 DE3585708 D1 DE 3585708D1 DE 8585105026 T DE8585105026 T DE 8585105026T DE 3585708 T DE3585708 T DE 3585708T DE 3585708 D1 DE3585708 D1 DE 3585708D1
- Authority
- DE
- Germany
- Prior art keywords
- type
- conveyor system
- floating carrier
- floating
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
- 
        - F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
 
- 
        - B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
- B60L13/00—Electric propulsion for monorail vehicles, suspension vehicles or rack railways; Magnetic suspension or levitation for vehicles
- B60L13/04—Magnetic suspension or levitation for vehicles
- B60L13/06—Means to sense or control vehicle position or attitude with respect to railway
 
- 
        - F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/10—Arrangements for locking the bearings
 
- 
        - F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0472—Active magnetic bearings for linear movement
 
- 
        - H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
 
- 
        - H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/025—Asynchronous motors
 
- 
        - B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
- B60L2200/00—Type of vehicles
- B60L2200/26—Rail vehicles
 
- 
        - F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2326/00—Articles relating to transporting
- F16C2326/10—Railway vehicles
 
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Combustion & Propulsion (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Transportation (AREA)
- Non-Mechanical Conveyors (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
- Linear Motors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP59135987A JPS6115557A (ja) | 1984-06-30 | 1984-06-30 | 浮上式搬送装置 | 
Publications (1)
| Publication Number | Publication Date | 
|---|---|
| DE3585708D1 true DE3585708D1 (de) | 1992-04-30 | 
Family
ID=15164542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date | 
|---|---|---|---|
| DE8585105026T Expired - Lifetime DE3585708D1 (de) | 1984-06-30 | 1985-04-25 | Foerdersystem vom typ mit schwebendem traeger. | 
Country Status (4)
| Country | Link | 
|---|---|
| US (1) | US4690066A (OSRAM) | 
| EP (1) | EP0169983B1 (OSRAM) | 
| JP (1) | JPS6115557A (OSRAM) | 
| DE (1) | DE3585708D1 (OSRAM) | 
Families Citing this family (48)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| JP2553043B2 (ja) * | 1986-05-14 | 1996-11-13 | 株式会社東芝 | 浮上式搬送装置 | 
| US4793263A (en) * | 1986-08-01 | 1988-12-27 | The Boeing Company | Integrated linear synchronous unipolar motor with controlled permanent magnet bias | 
| US4894909A (en) * | 1987-10-28 | 1990-01-23 | Mazda Motor Corp. | Apparatus for assembling wheel attaching unit for use in vehicle assembly line | 
| US5170714A (en) * | 1988-06-13 | 1992-12-15 | Asahi Glass Company, Ltd. | Vacuum processing apparatus and transportation system thereof | 
| EP0346815A3 (en) * | 1988-06-13 | 1990-12-19 | Asahi Glass Company Ltd. | Vacuum processing apparatus and transportation system thereof | 
| US5105110A (en) * | 1989-11-08 | 1992-04-14 | Utdc Inc. | Linear induction motor secondary | 
| US5118055A (en) * | 1990-07-05 | 1992-06-02 | Utdc, Inc. | Reduced voltage braking system in a linear motor in-track transit system | 
| US5127599A (en) * | 1990-07-05 | 1992-07-07 | Utdc, Inc. | Deceleration zone in a linear motor in-track transit system | 
| US5116002A (en) * | 1990-07-05 | 1992-05-26 | Utdc, Inc. | Stopping zones in a linear motor in-track transit system | 
| IT1254106B (it) * | 1991-11-13 | 1995-09-07 | Prosit Di Poletto Luigi E C | Impianto per la distribuzione di prodotti da una unita' centrale a piu' unita' periferiche | 
| JP3010129B2 (ja) * | 1995-02-06 | 2000-02-14 | 財団法人鉄道総合技術研究所 | 上下非対称8字型コイル | 
| JP2000191140A (ja) * | 1998-12-26 | 2000-07-11 | Minebea Co Ltd | リニアモ―タを用いた搬送システム | 
| US6533083B1 (en) * | 2000-02-15 | 2003-03-18 | Magnetar Technologies, Inc | Eddy current braking apparatus | 
| WO2001060654A1 (en) * | 2000-02-15 | 2001-08-23 | Magnetar Technologies Ltd. | Eddy current braking apparatus | 
| WO2001086700A1 (de) * | 2000-05-09 | 2001-11-15 | Siemens Aktiengesellschaft | Längsförderer | 
| JP4831719B2 (ja) * | 2001-08-06 | 2011-12-07 | 学校法人日本大学 | 磁気浮上式xy面リニア同期モータ | 
| EP1792331A1 (en) * | 2004-09-10 | 2007-06-06 | OC Oerlikon Balzers AG | Substrate processing system | 
| EP1915273A2 (en) * | 2005-06-30 | 2008-04-30 | Magnetar Technologies Corporation | Axial rotary eddy current brake with adjustable braking force | 
| EP2263063B1 (de) * | 2008-04-10 | 2011-08-10 | Draka Cable Wuppertal GmbH | Verfahren und vorrichtung zum berührungslosen messen eines versatzes der funktionskomponenten eines fahrweges einer mit einem linearmotor angetriebenen magnetschwebebahn | 
| KR100984488B1 (ko) * | 2008-06-04 | 2010-10-01 | 한국과학기술연구원 | 리니어 모터 | 
| CA2754560C (en) | 2009-03-03 | 2019-04-09 | Ats Automation Tooling Systems Inc. | Multi-mode and multi-pitch conveyor system | 
| NZ575464A (en) | 2009-03-10 | 2010-07-30 | Holmes Solutions Ltd | Improvements in and relating to braking mechanisms | 
| CN102175168B (zh) * | 2011-01-20 | 2012-10-03 | 中国人民解放军国防科学技术大学 | 中低速磁悬浮f型轨的轨道动态检测设备 | 
| CA2831332C (en) | 2011-03-31 | 2021-01-26 | Ats Automation Tooling Systems Inc. | Pallet-based position adjustment system and method | 
| DE102011113000A1 (de) * | 2011-09-09 | 2013-03-14 | Weiss Gmbh | Transportvorrichtung | 
| JP6261967B2 (ja) * | 2013-12-03 | 2018-01-17 | 株式会社ディスコ | 加工装置 | 
| NZ619034A (en) | 2013-12-16 | 2015-03-27 | Eddy Current Ltd Partnership | An assembly to control relative speed of movement between parts | 
| DE102014003882B4 (de) * | 2014-03-19 | 2017-07-13 | Applied Materials, Inc. (N.D.Ges.D. Staates Delaware) | Transportvorrichtung zum Bewegen und/oder Positionieren von Objekten | 
| RU2569812C1 (ru) * | 2014-07-23 | 2015-11-27 | федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Южно-Российский государственный политехнический университет (НПИ) имени М.И. Платова" | Способ автоматического контроля перемещения складских грузовых платформ и устройство для его осуществления | 
| CN110932523B (zh) | 2014-08-18 | 2022-09-06 | 涡流有限合伙公司 | 构件之间的运动关系的调整 | 
| AU2015304095B2 (en) | 2014-08-18 | 2020-05-07 | Eddy Current Limited Partnership | Tuning of a kinematic relationship between members | 
| BR112017003080B1 (pt) | 2014-08-18 | 2022-10-25 | Eddy Current Limited Partnership | Dispositivos de travamento | 
| CN107206978B (zh) | 2014-08-20 | 2020-06-02 | 特鲁布鲁有限公司 | 用于旋转系统的涡流制动设备 | 
| BR112017010692B1 (pt) | 2014-12-04 | 2022-03-03 | Eddy Current Limited Partnership | Engate de ativação entre elementos | 
| AU2015355674A1 (en) | 2014-12-04 | 2017-06-08 | Eddy Current Limited Partnership | Eddy current brake configurations | 
| CA2969423C (en) | 2014-12-04 | 2024-01-02 | Eddy Current Limited Partnership | Energy absorbing apparatus | 
| EP3912685A1 (en) | 2014-12-04 | 2021-11-24 | Eddy Current Limited Partnership | Methods of altering eddy current interactions | 
| BR112017010687A2 (pt) | 2014-12-04 | 2017-12-26 | Eddy Current Lp | transmissões que incorporam frenagem de corrente parasita | 
| EP3029723B1 (en) | 2014-12-05 | 2020-09-16 | Robert Bosch GmbH | Transport device and transport method for transporting a fragile object | 
| CN105346970B (zh) * | 2015-12-10 | 2017-11-24 | 重庆凯西驿电子科技有限公司 | 转动式三极管运输装置 | 
| MX384701B (es) | 2015-12-18 | 2025-03-14 | Eddy Current Lp | Un mecanismo de control de comportamiento variable para un sistema motriz. | 
| KR102155758B1 (ko) * | 2017-08-24 | 2020-09-14 | 어플라이드 머티어리얼스, 인코포레이티드 | 진공 프로세싱 시스템에서 디바이스를 비접촉식으로 운송하기 위한 장치 및 방법 | 
| JP2019046836A (ja) * | 2017-08-30 | 2019-03-22 | パナソニックIpマネジメント株式会社 | 生産システムおよび生産方法ならびに生産ライン管理装置 | 
| CN108650879B (zh) * | 2018-08-21 | 2020-05-01 | 安徽广晟德自动化设备有限公司 | 一种适用于贴片机的视觉识别装置和方法 | 
| WO2020126040A1 (en) * | 2018-12-21 | 2020-06-25 | Applied Materials, Inc. | Magnetic levitation system, carrier for a magnetic levitation system, vacuum system, and method of transporting a carrier | 
| WO2020221414A1 (en) | 2019-04-29 | 2020-11-05 | Applied Materials, Inc. | Magnetic levitation system, base and carrier of a magnetic levitation system, and method of levitating a carrier | 
| CN113767464B (zh) * | 2019-06-17 | 2025-05-27 | 应用材料公司 | 磁悬浮系统和悬浮载体的方法 | 
| EP4031254B1 (en) | 2019-09-20 | 2025-07-09 | Trublue LLC | Lock-off descent control systems and devices | 
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| US3233559A (en) * | 1964-10-27 | 1966-02-08 | Lor Corp | Transportation means | 
| FR2102628A5 (OSRAM) * | 1970-08-12 | 1972-04-07 | Compteurs Comp D | |
| DE2157011A1 (de) * | 1971-11-17 | 1973-05-24 | Krauss Maffei Ag | Abstandsmessanordnung fuer elektromagnetische trag- oder fuehrungssysteme fuer schwebefahrzeuge | 
| DE2202027C3 (de) * | 1972-01-17 | 1979-01-11 | Krauss-Maffei Ag, 8000 Muenchen | Fahrbahnschiene für ein magnetisch frei schwebendes Fahrzeug | 
| US3785475A (en) * | 1972-03-09 | 1974-01-15 | Magna Matic Systems Inc | Magnetically controlled non-synchronous conveyor system | 
| GB1373054A (en) * | 1972-05-25 | 1974-11-06 | Tracked Hovercraft Ltd | Electromagnetic levitation | 
| JPS5345564B2 (OSRAM) * | 1972-06-15 | 1978-12-07 | ||
| US3937148A (en) * | 1973-01-02 | 1976-02-10 | Cambridge Thermionic Corporation | Virtually zero power linear magnetic bearing | 
| US3899979A (en) * | 1973-02-22 | 1975-08-19 | Buryan Associates | Magnetic suspension systems for vehicles | 
| GB1457262A (en) * | 1973-04-10 | 1976-12-01 | Brentford Electric Ltd | Magnetic positional control systems | 
| JPS5041007A (OSRAM) * | 1973-08-15 | 1975-04-15 | ||
| CA1044774A (en) * | 1974-07-26 | 1978-12-19 | Gotz Heidelberg | Magnetic system for supporting and propelling a vehicle along a roadway | 
| JPS5135610U (OSRAM) * | 1974-09-09 | 1976-03-17 | ||
| JPS5277314A (en) * | 1975-12-23 | 1977-06-29 | Japanese National Railways<Jnr> | Guide system for linear motor car | 
| JPS5810921B2 (ja) * | 1977-02-26 | 1983-02-28 | 日本航空株式会社 | 浮上式走行体の電磁浮上案内制御装置 | 
| JPS5613325A (en) * | 1979-07-04 | 1981-02-09 | Nordson Kk | Method of sealing up container | 
| JPS5854871Y2 (ja) * | 1979-11-30 | 1983-12-14 | 富士通株式会社 | リニアモ−タの停止位置決め機構 | 
| JPS573588A (en) * | 1980-06-06 | 1982-01-09 | Fujitsu Ltd | Stopping-positioning apparatus for linear induction motor | 
| JPS5744560A (en) * | 1980-08-28 | 1982-03-13 | Akebono Brake Ind | Sliding track for suction type floating car | 
| US4395165A (en) * | 1980-12-19 | 1983-07-26 | International Business Machine Corp. | Chip shuttle track | 
| JPS5931216A (ja) * | 1982-08-11 | 1984-02-20 | Hitachi Kiden Kogyo Ltd | リニアモ−タ用リアクシヨンプレ−トと搬送装置 | 
- 
        1984
        - 1984-06-30 JP JP59135987A patent/JPS6115557A/ja active Granted
 
- 
        1985
        - 1985-04-25 EP EP85105026A patent/EP0169983B1/en not_active Expired - Lifetime
- 1985-04-25 DE DE8585105026T patent/DE3585708D1/de not_active Expired - Lifetime
- 1985-04-25 US US06/726,982 patent/US4690066A/en not_active Expired - Fee Related
 
Also Published As
| Publication number | Publication date | 
|---|---|
| EP0169983A2 (en) | 1986-02-05 | 
| EP0169983B1 (en) | 1992-03-25 | 
| JPH0423508B2 (OSRAM) | 1992-04-22 | 
| JPS6115557A (ja) | 1986-01-23 | 
| EP0169983A3 (en) | 1988-08-17 | 
| US4690066A (en) | 1987-09-01 | 
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Legal Events
| Date | Code | Title | Description | 
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |