DE3577495D1 - Praezisionsbewegungsmechanismus. - Google Patents

Praezisionsbewegungsmechanismus.

Info

Publication number
DE3577495D1
DE3577495D1 DE8585301092T DE3577495T DE3577495D1 DE 3577495 D1 DE3577495 D1 DE 3577495D1 DE 8585301092 T DE8585301092 T DE 8585301092T DE 3577495 T DE3577495 T DE 3577495T DE 3577495 D1 DE3577495 D1 DE 3577495D1
Authority
DE
Germany
Prior art keywords
motion mechanism
precision motion
precision
motion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585301092T
Other languages
English (en)
Inventor
Kuniyoshi C O Patent Di Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3577495D1 publication Critical patent/DE3577495D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
DE8585301092T 1984-06-25 1985-02-19 Praezisionsbewegungsmechanismus. Expired - Lifetime DE3577495D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59130539A JPH0614789B2 (ja) 1984-06-25 1984-06-25 テーブル微動方法およびこの方法を用いた微動装置

Publications (1)

Publication Number Publication Date
DE3577495D1 true DE3577495D1 (de) 1990-06-07

Family

ID=15036702

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585301092T Expired - Lifetime DE3577495D1 (de) 1984-06-25 1985-02-19 Praezisionsbewegungsmechanismus.

Country Status (4)

Country Link
US (1) US4585969A (de)
EP (1) EP0166499B1 (de)
JP (1) JPH0614789B2 (de)
DE (1) DE3577495D1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8600785A (nl) * 1986-03-27 1987-10-16 Asm Lithography Bv Positioneerinrichting met een z-manipulator en een o-manipulator.
DE3610540A1 (de) * 1986-03-27 1987-10-01 Kernforschungsanlage Juelich Bewegungseinrichtung zur mikrobewegung von objekten
JPH0648910B2 (ja) * 1987-02-12 1994-06-22 日本電気株式会社 圧電モ−タ
GB8713050D0 (en) * 1987-06-04 1987-07-08 Renishaw Plc Positioning apparatus
DE3844821C2 (en) * 1988-07-03 1993-07-22 Kfa Juelich Gmbh, 5170 Juelich, De Micromanipulator for raster tunnel microscope
JPH0295180A (ja) * 1988-09-29 1990-04-05 Canon Inc 尺取り虫型駆動機構
US4968914A (en) * 1989-03-24 1990-11-06 Quanscan, Inc. High resolution electromechanical translation device
ATE121565T1 (de) * 1989-12-16 1995-05-15 Teldix Gmbh Schrittmotor zum antrieb eines körpers, insbesondere einer welle, um kleine drehwinkel pro schritt.
US5631824A (en) * 1994-05-26 1997-05-20 Polytechnic University Feedback control apparatus and method thereof for compensating for changes in structural frequencies
US6154000A (en) * 1994-09-07 2000-11-28 Omnitek Research & Development, Inc. Apparatus for providing a controlled deflection and/or actuator apparatus
US5604413A (en) * 1994-09-07 1997-02-18 Polytechnic University Apparatus for improving operational performance of a machine or device
US5751090A (en) * 1995-05-17 1998-05-12 Burleigh Instruments Inc Peristaltic driver apparatus
TW360115U (en) * 1998-03-12 1999-06-01 Ind Tech Res Inst Micro-positioning platform
GB2369489B (en) * 2000-11-23 2004-03-10 Khaled Karrai Inertial rotation device
DE10224019B4 (de) * 2002-05-24 2006-02-23 Leibniz-Institut für Festkörper- und Werkstoffforschung e.V. Drehbare Probenträgeraufnahmevorrichtung
NL1022886C2 (nl) * 2003-03-10 2004-09-14 Fei Co Deeltjes optische inrichting voor het bestralen van een object.
EP1619468A1 (de) * 2004-07-22 2006-01-25 Leica Geosystems AG Geodätisches Messgerät mit Piezo-Antrieb
DE102004054359B4 (de) * 2004-11-10 2015-11-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Erzeugung einer Torsionsbewegung und Verwendung derselben
WO2010051797A2 (de) * 2008-11-10 2010-05-14 Richter, Berta Elektrischer piezomotor-universalantrieb
JP2010162487A (ja) * 2009-01-16 2010-07-29 Sony Corp 圧電振動機器システムおよび電子機器
CN102141739B (zh) * 2011-04-01 2013-01-16 清华大学 光刻机硅片台双台交换系统
CN102508414B (zh) * 2011-11-12 2013-09-18 哈尔滨工业大学 一种基于转台齿轮同步调向的双工件台回转交换方法与装置
KR102396865B1 (ko) * 2021-12-08 2022-05-12 주식회사 미코세라믹스 정전척

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3684904A (en) * 1969-04-24 1972-08-15 Gennady Vasilievich Galutva Device for precision displacement of a solid body
JPS5112497B1 (de) * 1971-04-21 1976-04-20
JPS5315060A (en) * 1976-07-28 1978-02-10 Hitachi Ltd Inching device
SU871845A1 (ru) * 1980-02-19 1981-10-15 За витель А. П. Плешко Пъезоэлектрический вибратор
US4455501A (en) * 1982-02-09 1984-06-19 Tokyo Shibaura Denki Kabushiki Kaisha Precision rotation mechanism
JPS58139681A (ja) * 1982-02-09 1983-08-19 Toshiba Corp 回転微動機構
US4399386A (en) * 1982-02-11 1983-08-16 Rca Corporation Rotative motor using plural arrays of piezoelectric elements
JPS5976184A (ja) * 1982-10-22 1984-05-01 Hitachi Ltd アクチユエ−タ

Also Published As

Publication number Publication date
JPS6110971A (ja) 1986-01-18
JPH0614789B2 (ja) 1994-02-23
EP0166499A3 (en) 1987-05-13
EP0166499B1 (de) 1990-05-02
EP0166499A2 (de) 1986-01-02
US4585969A (en) 1986-04-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee