GB8713050D0 - Positioning apparatus - Google Patents

Positioning apparatus

Info

Publication number
GB8713050D0
GB8713050D0 GB878713050A GB8713050A GB8713050D0 GB 8713050 D0 GB8713050 D0 GB 8713050D0 GB 878713050 A GB878713050 A GB 878713050A GB 8713050 A GB8713050 A GB 8713050A GB 8713050 D0 GB8713050 D0 GB 8713050D0
Authority
GB
United Kingdom
Prior art keywords
positioning apparatus
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB878713050A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Priority to GB878713050A priority Critical patent/GB8713050D0/en
Publication of GB8713050D0 publication Critical patent/GB8713050D0/en
Priority to JP50450088A priority patent/JPH01503491A/en
Priority to PCT/GB1988/000433 priority patent/WO1988009945A1/en
Priority to EP19880904596 priority patent/EP0316396A1/en
Pending legal-status Critical Current

Links

GB878713050A 1987-06-04 1987-06-04 Positioning apparatus Pending GB8713050D0 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB878713050A GB8713050D0 (en) 1987-06-04 1987-06-04 Positioning apparatus
JP50450088A JPH01503491A (en) 1987-06-04 1988-06-03 Positioning devices especially used in vacuum environments
PCT/GB1988/000433 WO1988009945A1 (en) 1987-06-04 1988-06-03 Positioning apparatus particularly for use in a vacuum environment
EP19880904596 EP0316396A1 (en) 1987-06-04 1988-06-03 Positioning apparatus particularly for use in a vacuum environment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB878713050A GB8713050D0 (en) 1987-06-04 1987-06-04 Positioning apparatus

Publications (1)

Publication Number Publication Date
GB8713050D0 true GB8713050D0 (en) 1987-07-08

Family

ID=10618343

Family Applications (1)

Application Number Title Priority Date Filing Date
GB878713050A Pending GB8713050D0 (en) 1987-06-04 1987-06-04 Positioning apparatus

Country Status (4)

Country Link
EP (1) EP0316396A1 (en)
JP (1) JPH01503491A (en)
GB (1) GB8713050D0 (en)
WO (1) WO1988009945A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI20051272A0 (en) * 2005-12-09 2005-12-09 Iprbox Oy Detector system for studying particles
CN102903593B (en) * 2012-10-11 2015-03-11 中国地质科学院地质研究所 Sample stage in sealed cavity
CN113109949B (en) * 2021-04-09 2022-09-02 长春长光格瑞光电技术有限公司 Pinhole adjusting method of wide-spectrum high-resolution echelle grating monochromator

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870416A (en) * 1974-01-09 1975-03-11 Bell Telephone Labor Inc Wafer alignment apparatus
US4019109A (en) * 1974-05-13 1977-04-19 Hughes Aircraft Company Alignment system and method with micromovement stage
JPS51123565A (en) * 1975-04-21 1976-10-28 Nippon Telegr & Teleph Corp <Ntt> Three-dimention-position differential adjustment of processing article
US4516029A (en) * 1983-04-28 1985-05-07 Control Data Corporation E beam stage with below-stage X-Y drive
US4694477A (en) * 1983-12-21 1987-09-15 Hewlett-Packard Company Flexure stage alignment apparatus
JPH0614789B2 (en) * 1984-06-25 1994-02-23 株式会社東芝 Table fine movement method and fine movement apparatus using this method
US4585337A (en) * 1985-01-14 1986-04-29 Phillips Edward H Step-and-repeat alignment and exposure system
JPS61244432A (en) * 1985-04-19 1986-10-30 Matsushita Electric Ind Co Ltd Turning apparatus
JPH0648213B2 (en) * 1985-10-31 1994-06-22 株式会社島津製作所 Wavelength feeding mechanism of spectroscope
JPS61159349A (en) * 1985-12-06 1986-07-19 Hitachi Ltd Minute distance moving device

Also Published As

Publication number Publication date
EP0316396A1 (en) 1989-05-24
WO1988009945A1 (en) 1988-12-15
JPH01503491A (en) 1989-11-22

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