DE3576372D1 - Chemisches ersatzfuellsystem. - Google Patents

Chemisches ersatzfuellsystem.

Info

Publication number
DE3576372D1
DE3576372D1 DE8585903147T DE3576372T DE3576372D1 DE 3576372 D1 DE3576372 D1 DE 3576372D1 DE 8585903147 T DE8585903147 T DE 8585903147T DE 3576372 T DE3576372 T DE 3576372T DE 3576372 D1 DE3576372 D1 DE 3576372D1
Authority
DE
Germany
Prior art keywords
chemical
filling system
spare filling
spare
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585903147T
Other languages
English (en)
Inventor
A Lipisko
C Schumacher
E Howard
T Randtke
Adrian Sandu
E Fletcher
Hans-Juergen Graf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JC Schumacher Co
Original Assignee
JC Schumacher Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JC Schumacher Co filed Critical JC Schumacher Co
Application granted granted Critical
Publication of DE3576372D1 publication Critical patent/DE3576372D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Paper (AREA)
  • Fluid-Driven Valves (AREA)
  • Chemical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Medicines That Contain Protein Lipid Enzymes And Other Medicines (AREA)
  • Detergent Compositions (AREA)
  • Fats And Perfumes (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Cultivation Of Plants (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
DE8585903147T 1985-06-21 1985-06-21 Chemisches ersatzfuellsystem. Expired - Lifetime DE3576372D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1985/001100 WO1986007615A1 (en) 1985-06-21 1985-06-21 Chemical refill system

Publications (1)

Publication Number Publication Date
DE3576372D1 true DE3576372D1 (de) 1990-04-12

Family

ID=22188721

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585903147T Expired - Lifetime DE3576372D1 (de) 1985-06-21 1985-06-21 Chemisches ersatzfuellsystem.

Country Status (9)

Country Link
EP (1) EP0229050B1 (de)
JP (1) JPS63500030A (de)
AT (1) ATE50803T1 (de)
AU (2) AU578297B2 (de)
DE (1) DE3576372D1 (de)
DK (1) DK88287A (de)
FI (1) FI870727A (de)
NO (1) NO870646D0 (de)
WO (1) WO1986007615A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4047408A (en) * 1975-12-08 1977-09-13 Johns Eddie D Lock mechanism
JPH04338227A (ja) * 1991-05-15 1992-11-25 Nec Kyushu Ltd ガス供給装置
US5551309A (en) * 1995-01-17 1996-09-03 Olin Corporation Computer-controlled chemical dispensing with alternative operating modes
TW387979B (en) * 1997-07-11 2000-04-21 Advanced Delivery & Chemical S Bulk chemical delivery system
JP5346620B2 (ja) * 1997-07-11 2013-11-20 アドバンスト テクノロジー マテリアルズ，インコーポレイテッド バルク化学物質供給システム
CN101723299B (zh) * 2008-10-27 2013-04-17 中芯国际集成电路制造(上海)有限公司 四乙羟基硅再灌注系统及其净化方法
EP2715781B1 (de) 2011-05-28 2020-07-01 Entegris Inc. Nachfüllbare ampulle mit entlüftungsfähigkeit
US20150259797A1 (en) * 2014-03-17 2015-09-17 Jiangsu Nata Opto-electronic Material Co., Ltd. Liquid-Metal Organic Compound Supply System
CN109200968A (zh) * 2018-11-07 2019-01-15 魏贵英 一种全自动化工反应釜

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1263883A (fr) * 1960-04-28 1961-06-19 Commissariat Energie Atomique Perfectionnement aux dispositifs de jonction de tubes destinés au passage de liquide ne devant pas être mis au contact de l'atmosphère
US3658304A (en) * 1970-05-11 1972-04-25 Anchor Hocking Corp Means for vapor coating
US3827455A (en) * 1973-09-06 1974-08-06 Dow Chemical Co Self-sealing system for storing and dispensing a fluid material
US4134514A (en) * 1976-12-02 1979-01-16 J C Schumacher Co. Liquid source material container and method of use for semiconductor device manufacturing
US4235829A (en) * 1979-05-07 1980-11-25 Western Electric Company, Inc. Vapor delivery system and method of maintaining a constant level of liquid therein

Also Published As

Publication number Publication date
WO1986007615A1 (en) 1986-12-31
ATE50803T1 (de) 1990-03-15
AU578297B2 (en) 1988-10-20
DK88287A (da) 1987-02-20
EP0229050B1 (de) 1990-03-07
FI870727A0 (fi) 1987-02-20
FI870727A (fi) 1987-02-20
AU4496985A (en) 1987-01-13
JPH0553760B2 (de) 1993-08-10
JPS63500030A (ja) 1988-01-07
AU592048B2 (en) 1989-12-21
EP0229050A1 (de) 1987-07-22
NO870646L (no) 1987-02-18
NO870646D0 (no) 1987-02-18
AU2855489A (en) 1989-05-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition