DE3574902D1 - Vorrichtung zur verbrennung von gasfoermigen silan-enthaltenden abgasen. - Google Patents
Vorrichtung zur verbrennung von gasfoermigen silan-enthaltenden abgasen.Info
- Publication number
- DE3574902D1 DE3574902D1 DE8585302919T DE3574902T DE3574902D1 DE 3574902 D1 DE3574902 D1 DE 3574902D1 DE 8585302919 T DE8585302919 T DE 8585302919T DE 3574902 T DE3574902 T DE 3574902T DE 3574902 D1 DE3574902 D1 DE 3574902D1
- Authority
- DE
- Germany
- Prior art keywords
- combustion
- exhaust gases
- shaped exhaust
- gas shaped
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/46—Details, e.g. noise reduction means
- F23D14/72—Safety devices, e.g. operative in case of failure of gas supply
- F23D14/82—Preventing flashback or blowback
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
- F23G2209/142—Halogen gases, e.g. silane
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Incineration Of Waste (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/604,720 US4555389A (en) | 1984-04-27 | 1984-04-27 | Method of and apparatus for burning exhaust gases containing gaseous silane |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3574902D1 true DE3574902D1 (de) | 1990-01-25 |
Family
ID=24420744
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585302919T Expired - Fee Related DE3574902D1 (de) | 1984-04-27 | 1985-04-25 | Vorrichtung zur verbrennung von gasfoermigen silan-enthaltenden abgasen. |
Country Status (3)
Country | Link |
---|---|
US (1) | US4555389A (de) |
EP (1) | EP0160524B1 (de) |
DE (1) | DE3574902D1 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3514283A1 (de) * | 1985-04-19 | 1986-10-23 | ESPE Fabrik pharmazeutischer Präparate GmbH, 8031 Seefeld | Verfahren zum aufbringen von retentionskoerpern auf gussmodelle von dentalen, prothetischen metallkonstruktionen |
US4801437A (en) * | 1985-12-04 | 1989-01-31 | Japan Oxygen Co., Ltd. | Process for treating combustible exhaust gases containing silane and the like |
US4661056A (en) * | 1986-03-14 | 1987-04-28 | American Hoechst Corporation | Turbulent incineration of combustible materials supplied in low pressure laminar flow |
JPS6387519A (ja) * | 1986-09-29 | 1988-04-18 | Mitsubishi Jushi Eng Kk | 半導体製造装置の排ガス燃焼方法 |
FR2612606B1 (fr) * | 1987-03-18 | 1990-09-14 | Air Liquide | Procede et dispositif de destruction d'effluents gazeux toxiques |
FR2616884B1 (fr) * | 1987-06-19 | 1991-05-10 | Air Liquide | Procede de traitement d'effluents gazeux provenant de la fabrication de composants electroniques et appareil d'incineration pour sa mise en oeuvre |
JPH0195214A (ja) * | 1987-10-06 | 1989-04-13 | Toyo Sanso Kk | 特殊材料ガスの燃焼方法 |
US4973451A (en) * | 1988-05-20 | 1990-11-27 | Hoechst Celanese Corporation | Flame arresting conduit section, combustor and method |
US5123836A (en) * | 1988-07-29 | 1992-06-23 | Chiyoda Corporation | Method for the combustion treatment of toxic gas-containing waste gas |
US5183646A (en) * | 1989-04-12 | 1993-02-02 | Custom Engineered Materials, Inc. | Incinerator for complete oxidation of impurities in a gas stream |
US5271908A (en) * | 1992-04-07 | 1993-12-21 | Intel Corporation | Pyrophoric gas neutralization chamber |
US5534069A (en) * | 1992-07-23 | 1996-07-09 | Canon Kabushiki Kaisha | Method of treating active material |
DE4320044A1 (de) * | 1993-06-17 | 1994-12-22 | Das Duennschicht Anlagen Sys | Verfahren und Einrichtung zur Reinigung von Abgasen |
DE19501914C1 (de) * | 1995-01-23 | 1996-04-04 | Centrotherm Elektrische Anlage | Vorrichtung zur Reinigung von Abgasen |
TW342436B (en) | 1996-08-14 | 1998-10-11 | Nippon Oxygen Co Ltd | Combustion type harm removal apparatus (1) |
US6759018B1 (en) * | 1997-05-16 | 2004-07-06 | Advanced Technology Materials, Inc. | Method for point-of-use treatment of effluent gas streams |
US20040101460A1 (en) * | 1997-05-16 | 2004-05-27 | Arno Jose I. | Apparatus and method for point-of-use treatment of effluent gas streams |
KR100694903B1 (ko) * | 1998-12-01 | 2007-03-13 | 가부시키가이샤 에바라 세이사꾸쇼 | 폐기가스처리장치 |
CN1167497C (zh) * | 1998-12-15 | 2004-09-22 | 高级技术材料公司 | 现场处理废气流的装置和方法 |
FR2802615B1 (fr) * | 1999-12-07 | 2002-02-15 | Atofina | Injecteur utilisable dans un dispositif pour la combustion de produits corrosifs |
TW496764B (en) * | 2001-03-23 | 2002-08-01 | Winbond Electronics Corp | Highly efficient cleaning device for reducing waste gas in the atmosphere |
US7569193B2 (en) * | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
GB0406748D0 (en) * | 2004-03-26 | 2004-04-28 | Boc Group Plc | Vacuum pump |
US7736599B2 (en) | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
US7682574B2 (en) * | 2004-11-18 | 2010-03-23 | Applied Materials, Inc. | Safety, monitoring and control features for thermal abatement reactor |
US8095240B2 (en) * | 2004-11-18 | 2012-01-10 | Applied Materials, Inc. | Methods for starting and operating a thermal abatement system |
GB0509163D0 (en) * | 2005-05-05 | 2005-06-15 | Boc Group Plc | Gas combustion apparatus |
GB0509944D0 (en) * | 2005-05-16 | 2005-06-22 | Boc Group Plc | Gas combustion apparatus |
WO2007053626A2 (en) | 2005-10-31 | 2007-05-10 | Applied Materials, Inc. | Process abatement reactor |
EP2037002B1 (de) * | 2007-09-11 | 2011-03-30 | Centrotherm Photovoltaics AG | Vorrichtung zur Abscheidung von Chalkogenen |
GB2481144B (en) * | 2008-12-23 | 2014-06-18 | Mks Instr Inc | Reactive chemical containment system |
CN103090399B (zh) * | 2011-10-28 | 2015-05-13 | 无锡华润华晶微电子有限公司 | 硅烷尾气处理装置以及方法 |
JP6151945B2 (ja) * | 2013-03-28 | 2017-06-21 | 株式会社荏原製作所 | 除害機能付真空ポンプ |
JP2014206297A (ja) * | 2013-04-11 | 2014-10-30 | 小池酸素工業株式会社 | 排ガスの処理装置 |
JP6734821B2 (ja) * | 2017-07-13 | 2020-08-05 | 大陽日酸株式会社 | 燃焼ノズル、燃焼筒、及び燃焼除害装置 |
WO2020076602A1 (en) * | 2018-10-11 | 2020-04-16 | Corning Incorporated | Abatement systems including an oxidizer head assembly and methods for using the same |
CN110671708A (zh) * | 2019-09-24 | 2020-01-10 | 南通亚泰工程技术有限公司 | 一种用于处理voc的多功能惰气系统 |
DE102021103365B4 (de) * | 2021-02-12 | 2024-02-15 | Das Environmental Expert Gmbh | Verfahren und Brenner zur thermischen Entsorgung von Schadstoffen in Prozessgasen |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2333948A (en) * | 1941-04-25 | 1943-11-09 | Pittsburgh Plate Glass Co | Preparation of pigments |
GB796735A (en) * | 1955-07-25 | 1958-06-18 | British Titan Products | Production of silicon dioxide |
US3086851A (en) * | 1957-10-10 | 1963-04-23 | Degussa | Burner for production of finely divided oxides |
US3361525A (en) * | 1961-11-03 | 1968-01-02 | Laporte Titanium Ltd | Manufacture of oxides of the elements titanium, zirconium, iron, aluminum and silicon |
US3772427A (en) * | 1971-06-14 | 1973-11-13 | Gen Electric | Combustion process for producing high surface area silica |
BE790704A (fr) * | 1971-10-28 | 1973-02-15 | Degussa | Procede pour la fabrication d'oxydes finement |
US3820510A (en) * | 1972-12-26 | 1974-06-28 | Siderurgie Fse Inst Rech | Method and apparatus for treatment of gases |
JPS521719B2 (de) * | 1973-06-28 | 1977-01-17 | ||
GB2054822B (en) * | 1979-06-15 | 1983-04-07 | Urquhart Eng Co Ltd | Controlled combustion of gases |
-
1984
- 1984-04-27 US US06/604,720 patent/US4555389A/en not_active Expired - Fee Related
-
1985
- 1985-04-25 EP EP85302919A patent/EP0160524B1/de not_active Expired
- 1985-04-25 DE DE8585302919T patent/DE3574902D1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0160524A2 (de) | 1985-11-06 |
EP0160524A3 (en) | 1987-01-07 |
EP0160524B1 (de) | 1989-12-20 |
US4555389A (en) | 1985-11-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |