DE3780747D1 - Vorrichtung zur gasabfuhr. - Google Patents

Vorrichtung zur gasabfuhr.

Info

Publication number
DE3780747D1
DE3780747D1 DE8787307347T DE3780747T DE3780747D1 DE 3780747 D1 DE3780747 D1 DE 3780747D1 DE 8787307347 T DE8787307347 T DE 8787307347T DE 3780747 T DE3780747 T DE 3780747T DE 3780747 D1 DE3780747 D1 DE 3780747D1
Authority
DE
Germany
Prior art keywords
gas exhaust
exhaust
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787307347T
Other languages
English (en)
Other versions
DE3780747T2 (de
Inventor
Taylor, Sr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML US Inc
Original Assignee
ASML US Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML US Inc filed Critical ASML US Inc
Publication of DE3780747D1 publication Critical patent/DE3780747D1/de
Application granted granted Critical
Publication of DE3780747T2 publication Critical patent/DE3780747T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
DE8787307347T 1986-10-16 1987-08-19 Vorrichtung zur gasabfuhr. Expired - Fee Related DE3780747T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/919,736 US4711197A (en) 1986-10-16 1986-10-16 Gas scavenger

Publications (2)

Publication Number Publication Date
DE3780747D1 true DE3780747D1 (de) 1992-09-03
DE3780747T2 DE3780747T2 (de) 1993-01-14

Family

ID=25442565

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787307347T Expired - Fee Related DE3780747T2 (de) 1986-10-16 1987-08-19 Vorrichtung zur gasabfuhr.

Country Status (6)

Country Link
US (1) US4711197A (de)
EP (1) EP0264177B1 (de)
JP (1) JP2642936B2 (de)
KR (1) KR930007610Y1 (de)
CA (1) CA1277442C (de)
DE (1) DE3780747T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4909185A (en) * 1988-02-03 1990-03-20 Weiss Scientific Glass Blowing Co. Cantilever and cold zone assembly for loading and unloading an oven
US4992044A (en) * 1989-06-28 1991-02-12 Digital Equipment Corporation Reactant exhaust system for a thermal processing furnace
JPH05326428A (ja) * 1992-05-18 1993-12-10 Nec Yamagata Ltd 拡散炉用スカベンジャ
US5370736A (en) * 1992-10-26 1994-12-06 Texas Instruments Incorporated Horizontal reactor hardware design
CN102732860B (zh) * 2011-04-14 2015-01-14 北京北方微电子基地设备工艺研究中心有限责任公司 反应腔及具有其的化学气相沉积设备
CN103160813B (zh) * 2011-12-14 2015-10-21 北京北方微电子基地设备工艺研究中心有限责任公司 一种反应腔室以及应用该反应腔室的等离子体加工设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3920404A (en) * 1974-09-11 1975-11-18 Ford Motor Co Catalyst converter
US3960509A (en) * 1974-12-30 1976-06-01 Abriany Raymond R Catalytic muffler
US4094644A (en) * 1975-12-08 1978-06-13 Uop Inc. Catalytic exhaust muffler for motorcycles
DE2654083A1 (de) * 1976-11-29 1978-06-01 Siemens Ag Plasmaaetzverfahren
DE3427057A1 (de) * 1984-07-23 1986-01-23 Standard Elektrik Lorenz Ag, 7000 Stuttgart Anlage zum herstellen von halbleiter-schichtstrukturen durch epitaktisches wachstum
JPS62206826A (ja) * 1986-03-06 1987-09-11 Nippon Texas Instr Kk 半導体熱処理装置

Also Published As

Publication number Publication date
EP0264177A2 (de) 1988-04-20
EP0264177A3 (en) 1990-05-23
KR880008706U (ko) 1988-06-30
JPS63134665A (ja) 1988-06-07
EP0264177B1 (de) 1992-07-29
DE3780747T2 (de) 1993-01-14
JP2642936B2 (ja) 1997-08-20
KR930007610Y1 (ko) 1993-11-05
US4711197A (en) 1987-12-08
CA1277442C (en) 1990-12-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee