DE3568594D1 - Method for plating from an electroless plating bath - Google Patents
Method for plating from an electroless plating bathInfo
- Publication number
- DE3568594D1 DE3568594D1 DE8585106819T DE3568594T DE3568594D1 DE 3568594 D1 DE3568594 D1 DE 3568594D1 DE 8585106819 T DE8585106819 T DE 8585106819T DE 3568594 T DE3568594 T DE 3568594T DE 3568594 D1 DE3568594 D1 DE 3568594D1
- Authority
- DE
- Germany
- Prior art keywords
- plating
- bath
- temperature
- electroless
- electroless plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1617—Purification and regeneration of coating baths
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/1676—Heating of the solution
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/168—Control of temperature, e.g. temperature of bath, substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
- C23C18/405—Formaldehyde
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/187—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/626,961 US4554184A (en) | 1984-07-02 | 1984-07-02 | Method for plating from an electroless plating bath |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3568594D1 true DE3568594D1 (en) | 1989-04-13 |
Family
ID=24512589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585106819T Expired DE3568594D1 (en) | 1984-07-02 | 1985-06-03 | Method for plating from an electroless plating bath |
Country Status (5)
Country | Link |
---|---|
US (1) | US4554184A (de) |
EP (1) | EP0173003B1 (de) |
JP (1) | JPS6115979A (de) |
AT (1) | ATE41177T1 (de) |
DE (1) | DE3568594D1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4967690A (en) * | 1986-02-10 | 1990-11-06 | International Business Machines Corporation | Electroless plating with bi-level control of dissolved oxygen, with specific location of chemical maintenance means |
US4684545A (en) * | 1986-02-10 | 1987-08-04 | International Business Machines Corporation | Electroless plating with bi-level control of dissolved oxygen |
US4808431A (en) * | 1987-12-08 | 1989-02-28 | International Business Machines Corp. | Method for controlling plating on seeded surfaces |
JPH069309B2 (ja) * | 1989-09-22 | 1994-02-02 | 株式会社日立製作所 | プリント回路板、その製造方法および製造装置 |
US5419821A (en) * | 1993-06-04 | 1995-05-30 | Vaughan; Daniel J. | Process and equipment for reforming and maintaining electroless metal baths |
JP4482744B2 (ja) * | 2001-02-23 | 2010-06-16 | 株式会社日立製作所 | 無電解銅めっき液、無電解銅めっき方法、配線板の製造方法 |
US6875691B2 (en) * | 2002-06-21 | 2005-04-05 | Mattson Technology, Inc. | Temperature control sequence of electroless plating baths |
JP3985864B2 (ja) * | 2002-08-27 | 2007-10-03 | 株式会社荏原製作所 | 無電解めっき装置及び方法 |
US20050016201A1 (en) * | 2003-07-22 | 2005-01-27 | Ivanov Igor C. | Multi-staged heating system for fabricating microelectronic devices |
US20160040292A1 (en) * | 2014-08-08 | 2016-02-11 | Gary P. Wainwright | Roll-to-roll electroless plating system with low dissolved oxygen content |
CN104785328A (zh) * | 2015-04-28 | 2015-07-22 | 铜陵海源超微粉体有限公司 | 一种矿渣立磨的耐磨磨盘和磨辊 |
KR20220052967A (ko) * | 2019-08-27 | 2022-04-28 | 도쿄엘렉트론가부시키가이샤 | 기판 액 처리 방법, 기판 액 처리 장치 및 컴퓨터 판독 가능한 기록 매체 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2658839A (en) * | 1951-04-21 | 1953-11-10 | Gen Am Transport | Process of chemical nickel plating |
US2717218A (en) * | 1952-07-19 | 1955-09-06 | Gen Am Transport | Chemical nickel plating methods and apparatus |
US2872353A (en) * | 1954-01-12 | 1959-02-03 | Gen Am Transport | Processes of continuous chemical nickel plating |
US2819188A (en) * | 1954-05-18 | 1958-01-07 | Gen Am Transport | Processes of chemical nickel plating |
US2872354A (en) * | 1954-12-31 | 1959-02-03 | Gen Am Transport | Processes of continuous chemical nickel plating |
US2941902A (en) * | 1957-07-02 | 1960-06-21 | Gen Am Transport | Chemical nickel plating methods and systems |
US2955959A (en) * | 1958-09-22 | 1960-10-11 | Rose Arthur H Du | Chemical nickel plating |
US4152467A (en) * | 1978-03-10 | 1979-05-01 | International Business Machines Corporation | Electroless copper plating process with dissolved oxygen maintained in bath |
-
1984
- 1984-07-02 US US06/626,961 patent/US4554184A/en not_active Expired - Lifetime
-
1985
- 1985-04-18 JP JP60081514A patent/JPS6115979A/ja active Granted
- 1985-06-03 EP EP85106819A patent/EP0173003B1/de not_active Expired
- 1985-06-03 AT AT85106819T patent/ATE41177T1/de active
- 1985-06-03 DE DE8585106819T patent/DE3568594D1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0173003A3 (en) | 1986-11-26 |
JPH0218388B2 (de) | 1990-04-25 |
JPS6115979A (ja) | 1986-01-24 |
EP0173003B1 (de) | 1989-03-08 |
ATE41177T1 (de) | 1989-03-15 |
US4554184A (en) | 1985-11-19 |
EP0173003A2 (de) | 1986-03-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |