DE3545385A1 - Verfahren zur herstellung einer solarzellenanordnung - Google Patents
Verfahren zur herstellung einer solarzellenanordnungInfo
- Publication number
- DE3545385A1 DE3545385A1 DE19853545385 DE3545385A DE3545385A1 DE 3545385 A1 DE3545385 A1 DE 3545385A1 DE 19853545385 DE19853545385 DE 19853545385 DE 3545385 A DE3545385 A DE 3545385A DE 3545385 A1 DE3545385 A1 DE 3545385A1
- Authority
- DE
- Germany
- Prior art keywords
- electrode layer
- layer
- areas
- semiconductor layer
- large area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 238000002604 ultrasonography Methods 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 claims 2
- 230000005670 electromagnetic radiation Effects 0.000 claims 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- OMZSGWSJDCOLKM-UHFFFAOYSA-N copper(II) sulfide Chemical compound [S-2].[Cu+2] OMZSGWSJDCOLKM-UHFFFAOYSA-N 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- -1 ferrous metals Chemical class 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000007649 pad printing Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/206—Electrodes for devices having potential barriers
- H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
- H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photovoltaic Devices (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853545385 DE3545385A1 (de) | 1985-12-20 | 1985-12-20 | Verfahren zur herstellung einer solarzellenanordnung |
| GB08630193A GB2184601B (en) | 1985-12-20 | 1986-12-17 | A process for producing a solar cell arrangement |
| FR8617835A FR2592223A1 (fr) | 1985-12-20 | 1986-12-19 | Procede de fabrication d'un agencement de cellules solaires en montage serie et en technique integree a couches minces |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853545385 DE3545385A1 (de) | 1985-12-20 | 1985-12-20 | Verfahren zur herstellung einer solarzellenanordnung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3545385A1 true DE3545385A1 (de) | 1987-06-25 |
| DE3545385C2 DE3545385C2 (enrdf_load_stackoverflow) | 1988-07-14 |
Family
ID=6289137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19853545385 Granted DE3545385A1 (de) | 1985-12-20 | 1985-12-20 | Verfahren zur herstellung einer solarzellenanordnung |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE3545385A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2592223A1 (enrdf_load_stackoverflow) |
| GB (1) | GB2184601B (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3727823A1 (de) * | 1987-08-20 | 1989-03-02 | Siemens Ag | Tandem-solarmodul |
| DE3937442A1 (de) * | 1989-11-10 | 1991-05-16 | Nokia Unterhaltungselektronik | Verfahren zum bereichsweisen entfernen von schichten von einem substrat |
| DE102012017483A1 (de) | 2012-09-04 | 2014-03-06 | Hochschule für angewandte Wissenschaften München | Verfahren zur Laserstrukturierung von dünnen Schichtsystemen |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3712589A1 (de) * | 1987-04-14 | 1988-11-03 | Nukem Gmbh | Verfahren zur herstellung von in reihe verschalteten duennschicht-solarzellen |
| FR3096833B1 (fr) * | 2019-05-29 | 2022-03-04 | Rosi | procédé de recyclage de l’argent présent sur une cellule photovoltaïque |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3210742A1 (de) * | 1981-03-31 | 1982-10-21 | RCA Corp., 10020 New York, N.Y. | Solarzellenbatterie und verfahren zum herstellen der batterie |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59103383A (ja) * | 1982-12-03 | 1984-06-14 | Sanyo Electric Co Ltd | 光起電力装置の製造方法 |
-
1985
- 1985-12-20 DE DE19853545385 patent/DE3545385A1/de active Granted
-
1986
- 1986-12-17 GB GB08630193A patent/GB2184601B/en not_active Expired
- 1986-12-19 FR FR8617835A patent/FR2592223A1/fr active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3210742A1 (de) * | 1981-03-31 | 1982-10-21 | RCA Corp., 10020 New York, N.Y. | Solarzellenbatterie und verfahren zum herstellen der batterie |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3727823A1 (de) * | 1987-08-20 | 1989-03-02 | Siemens Ag | Tandem-solarmodul |
| US4914044A (en) * | 1987-08-20 | 1990-04-03 | Siemens Aktiengesellschaft | Method of making tandem solar cell module |
| DE3937442A1 (de) * | 1989-11-10 | 1991-05-16 | Nokia Unterhaltungselektronik | Verfahren zum bereichsweisen entfernen von schichten von einem substrat |
| DE102012017483A1 (de) | 2012-09-04 | 2014-03-06 | Hochschule für angewandte Wissenschaften München | Verfahren zur Laserstrukturierung von dünnen Schichtsystemen |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2184601A (en) | 1987-06-24 |
| GB8630193D0 (en) | 1987-01-28 |
| DE3545385C2 (enrdf_load_stackoverflow) | 1988-07-14 |
| GB2184601B (en) | 1988-12-14 |
| FR2592223A1 (fr) | 1987-06-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: TOTAL ENERGIE DEVELOPPEMENT + MESSERSCHMITT-BOELKO |
|
| 8339 | Ceased/non-payment of the annual fee |