DE3531904A1 - Lateral-shearing-interferometer zur phasendifferenzmessung von zwei wellenflaechen konstanter phase - Google Patents

Lateral-shearing-interferometer zur phasendifferenzmessung von zwei wellenflaechen konstanter phase

Info

Publication number
DE3531904A1
DE3531904A1 DE19853531904 DE3531904A DE3531904A1 DE 3531904 A1 DE3531904 A1 DE 3531904A1 DE 19853531904 DE19853531904 DE 19853531904 DE 3531904 A DE3531904 A DE 3531904A DE 3531904 A1 DE3531904 A1 DE 3531904A1
Authority
DE
Germany
Prior art keywords
propagation
mirrors
parallel
wave
lsi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19853531904
Other languages
German (de)
English (en)
Other versions
DE3531904C2 (de
Inventor
Reinhard 1000 Berlin Thieme
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thieme Reinhard Schoenfelder Thomas Dipl-Ing
Original Assignee
STUDIO S GES fur ELEKTRONIK D
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STUDIO S GES fur ELEKTRONIK D filed Critical STUDIO S GES fur ELEKTRONIK D
Priority to DE19853531904 priority Critical patent/DE3531904C2/de
Publication of DE3531904A1 publication Critical patent/DE3531904A1/de
Application granted granted Critical
Publication of DE3531904C2 publication Critical patent/DE3531904C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE19853531904 1985-09-05 1985-09-05 Lateral-Shearing-Interferometer zur Phasendifferenzmessung von zwei Wellenflächen konstanter Phase Expired DE3531904C2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19853531904 DE3531904C2 (de) 1985-09-05 1985-09-05 Lateral-Shearing-Interferometer zur Phasendifferenzmessung von zwei Wellenflächen konstanter Phase

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853531904 DE3531904C2 (de) 1985-09-05 1985-09-05 Lateral-Shearing-Interferometer zur Phasendifferenzmessung von zwei Wellenflächen konstanter Phase

Publications (2)

Publication Number Publication Date
DE3531904A1 true DE3531904A1 (de) 1986-03-27
DE3531904C2 DE3531904C2 (de) 1987-04-09

Family

ID=6280318

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19853531904 Expired DE3531904C2 (de) 1985-09-05 1985-09-05 Lateral-Shearing-Interferometer zur Phasendifferenzmessung von zwei Wellenflächen konstanter Phase

Country Status (1)

Country Link
DE (1) DE3531904C2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0319923A2 (fr) * 1987-12-07 1989-06-14 Yau Y. Hung Appareil et méthode pour l'analyse électronique d'objets à tester
US7907262B2 (en) 2004-02-11 2011-03-15 Qinetiq Limited Surface shape measurement apparatus and method
US11896303B2 (en) 2017-07-14 2024-02-13 Wavesense Engineering Gmbh Optical apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4413758C2 (de) * 1993-04-21 1998-09-17 Fraunhofer Ges Forschung Vorrichtung und Verfahren zur Prüfung der Gestalt einer Oberfläche eines zu vermessenden Objektes
CN102519609A (zh) * 2011-12-13 2012-06-27 中国科学院光电研究院 双通道横向剪切干涉仪

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3572934A (en) * 1968-09-09 1971-03-30 Ibm Longitudinally reversed shearing interferometry
US3661464A (en) * 1970-03-16 1972-05-09 Jorway Corp Optical interferometer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3572934A (en) * 1968-09-09 1971-03-30 Ibm Longitudinally reversed shearing interferometry
US3661464A (en) * 1970-03-16 1972-05-09 Jorway Corp Optical interferometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Applied Optics, Bd. 19, Nr. 8, 1980, S. 1225 - 1227 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0319923A2 (fr) * 1987-12-07 1989-06-14 Yau Y. Hung Appareil et méthode pour l'analyse électronique d'objets à tester
EP0319923A3 (en) * 1987-12-07 1990-09-12 Yau Y. Hung Apparatus and method for electronic analysis of test objects
US7907262B2 (en) 2004-02-11 2011-03-15 Qinetiq Limited Surface shape measurement apparatus and method
US11896303B2 (en) 2017-07-14 2024-02-13 Wavesense Engineering Gmbh Optical apparatus

Also Published As

Publication number Publication date
DE3531904C2 (de) 1987-04-09

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Legal Events

Date Code Title Description
OAV Applicant agreed to the publication of the unexamined application as to paragraph 31 lit. 2 z1
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: THIEME, REINHARD SCHOENFELDER, THOMAS, DIPL.-ING.,

8339 Ceased/non-payment of the annual fee