DE3529320C2 - Tastvorrichtung für Oberflächen - Google Patents

Tastvorrichtung für Oberflächen

Info

Publication number
DE3529320C2
DE3529320C2 DE3529320A DE3529320A DE3529320C2 DE 3529320 C2 DE3529320 C2 DE 3529320C2 DE 3529320 A DE3529320 A DE 3529320A DE 3529320 A DE3529320 A DE 3529320A DE 3529320 C2 DE3529320 C2 DE 3529320C2
Authority
DE
Germany
Prior art keywords
axis
sliding
sensor
base
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3529320A
Other languages
German (de)
English (en)
Other versions
DE3529320A1 (de
Inventor
Hideo Morita
Kenji Abiko
Tetsuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Manufacturing Co Ltd
Original Assignee
Mitutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Manufacturing Co Ltd filed Critical Mitutoyo Manufacturing Co Ltd
Priority to DE3546889A priority Critical patent/DE3546889C2/de
Publication of DE3529320A1 publication Critical patent/DE3529320A1/de
Application granted granted Critical
Publication of DE3529320C2 publication Critical patent/DE3529320C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE3529320A 1984-08-18 1985-08-16 Tastvorrichtung für Oberflächen Expired - Fee Related DE3529320C2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE3546889A DE3546889C2 (de) 1984-08-18 1985-08-16 Tastervorrichtung für Oberflächen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59172143A JPS6150007A (ja) 1984-08-18 1984-08-18 表面形状測定用トレ−サ

Publications (2)

Publication Number Publication Date
DE3529320A1 DE3529320A1 (de) 1986-02-27
DE3529320C2 true DE3529320C2 (de) 1994-02-10

Family

ID=15936359

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3529320A Expired - Fee Related DE3529320C2 (de) 1984-08-18 1985-08-16 Tastvorrichtung für Oberflächen

Country Status (4)

Country Link
US (1) US4611403A (enExample)
JP (1) JPS6150007A (enExample)
DE (1) DE3529320C2 (enExample)
GB (1) GB2163256B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7788820B2 (en) 2006-05-10 2010-09-07 Carl Zeiss Industrielle Messtechnik Gmbh Method and device for contacting a surface point on a workpiece

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1206842B (it) * 1987-01-15 1989-05-11 Fidia Spa Dispositivo tastatore particolarmente per macchina a copiare
GB2208934B (en) * 1987-08-24 1991-05-15 Mitutoyo Corp Surface contour measuring tracer
US5212646A (en) * 1987-12-19 1993-05-18 Renishaw Plc Method of using a mounting for surface-sensing stylus
US5152072A (en) * 1988-02-18 1992-10-06 Renishaw Plc Surface-sensing device
JPH03502608A (ja) * 1988-10-11 1991-06-13 レニショウ パブリック リミテッド カンパニー 位置決め装置用測定プローブ
DE3842151A1 (de) * 1988-12-15 1990-06-21 Zeiss Carl Fa Tastkopf vom schaltenden typ
GB8908854D0 (en) * 1989-04-19 1989-06-07 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US5189806A (en) * 1988-12-19 1993-03-02 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US4907894A (en) * 1988-12-20 1990-03-13 Bnf Metals Technology Centre Surface-temperature sensing method and apparatus
US5209131A (en) * 1989-11-03 1993-05-11 Rank Taylor Hobson Metrology
GB2238126A (en) * 1989-11-03 1991-05-22 Rank Taylor Hobson Ltd Metrology
GB9001682D0 (en) * 1990-01-25 1990-03-28 Renishaw Plc Position sensing probe
US5390424A (en) * 1990-01-25 1995-02-21 Renishaw Metrology Limited Analogue probe
US5390423A (en) * 1991-01-22 1995-02-21 Renishaw Plc Analogue probe
DE4216215A1 (de) * 1992-05-06 1994-01-20 Max Hobe Tastfühler
JP3000819B2 (ja) * 1993-03-15 2000-01-17 松下電器産業株式会社 三次元測定用プローブ及び形状測定方法
US6640459B1 (en) * 2001-02-15 2003-11-04 Fast Forward Devices, Llc Multidimensional contact mechanics measurement system
GB0201845D0 (en) * 2002-01-26 2002-03-13 Renishaw Plc Analogue probe
US7538960B2 (en) * 2006-03-14 2009-05-26 Quality Vision International, Inc. Air bearing guided zoom lens for metrological measurements
CN101339083B (zh) * 2007-07-06 2010-09-29 鸿富锦精密工业（深圳）有限公司 接触式测量装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3798779A (en) * 1972-07-05 1974-03-26 Ferranti Packard Ltd Probe inspection system
DE2242355C2 (de) * 1972-08-29 1974-10-17 Fa. Carl Zeiss, 7920 Heidenheim Elektronischer Mehrkoordinatentaster
US3855901A (en) * 1973-10-15 1974-12-24 Babcock & Wilcox Co Broaching machine
GB1551218A (en) * 1975-05-13 1979-08-22 Rolls Royce Probe for use in displacement measuring apparatus
DE2718438A1 (de) * 1977-04-26 1978-12-14 Heinrich Prof Dr Ing Frohne Taster zur messung raeumlicher koordinaten
DE3135495C2 (de) * 1981-09-08 1983-11-10 Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf Meßkopf für Meßeinrichtungen, Mehrkoordinatenmeßgeräte und Bearbeitungsmaschinen
DE3234471C1 (de) * 1982-09-17 1983-08-25 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7788820B2 (en) 2006-05-10 2010-09-07 Carl Zeiss Industrielle Messtechnik Gmbh Method and device for contacting a surface point on a workpiece

Also Published As

Publication number Publication date
DE3529320A1 (de) 1986-02-27
GB2163256A (en) 1986-02-19
GB8520629D0 (en) 1985-09-25
GB2163256B (en) 1988-06-15
US4611403A (en) 1986-09-16
JPS6150007A (ja) 1986-03-12
JPH0347688B2 (enExample) 1991-07-22

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