DE3412063A1 - Positionsmesseinrichtung - Google Patents

Positionsmesseinrichtung

Info

Publication number
DE3412063A1
DE3412063A1 DE19843412063 DE3412063A DE3412063A1 DE 3412063 A1 DE3412063 A1 DE 3412063A1 DE 19843412063 DE19843412063 DE 19843412063 DE 3412063 A DE3412063 A DE 3412063A DE 3412063 A1 DE3412063 A1 DE 3412063A1
Authority
DE
Germany
Prior art keywords
graduation
scanning
reference mark
scanning unit
marks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19843412063
Other languages
German (de)
English (en)
Other versions
DE3412063C2 (en, 2012
Inventor
Holmer Dipl.-Ing. 8225 Traunreut Dangschat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE19843412063 priority Critical patent/DE3412063A1/de
Priority to EP85102842A priority patent/EP0157239B1/de
Priority to AT85102842T priority patent/ATE50058T1/de
Priority to DE8585102842T priority patent/DE3575781D1/de
Priority to US06/716,395 priority patent/US4667096A/en
Priority to JP60065090A priority patent/JPS60225015A/ja
Publication of DE3412063A1 publication Critical patent/DE3412063A1/de
Application granted granted Critical
Publication of DE3412063C2 publication Critical patent/DE3412063C2/de
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473Circular or rotary encoders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
  • Vehicle Body Suspensions (AREA)
  • Body Structure For Vehicles (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Crushing And Grinding (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Eye Examination Apparatus (AREA)
DE19843412063 1984-03-31 1984-03-31 Positionsmesseinrichtung Granted DE3412063A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE19843412063 DE3412063A1 (de) 1984-03-31 1984-03-31 Positionsmesseinrichtung
EP85102842A EP0157239B1 (de) 1984-03-31 1985-03-13 Positionsmesseinrichtung
AT85102842T ATE50058T1 (de) 1984-03-31 1985-03-13 Positionsmesseinrichtung.
DE8585102842T DE3575781D1 (de) 1984-03-31 1985-03-13 Positionsmesseinrichtung.
US06/716,395 US4667096A (en) 1984-03-31 1985-03-27 Position measuring system comprising at least two scanning units
JP60065090A JPS60225015A (ja) 1984-03-31 1985-03-30 位置測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843412063 DE3412063A1 (de) 1984-03-31 1984-03-31 Positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
DE3412063A1 true DE3412063A1 (de) 1985-11-28
DE3412063C2 DE3412063C2 (en, 2012) 1987-12-23

Family

ID=6232238

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19843412063 Granted DE3412063A1 (de) 1984-03-31 1984-03-31 Positionsmesseinrichtung
DE8585102842T Expired - Fee Related DE3575781D1 (de) 1984-03-31 1985-03-13 Positionsmesseinrichtung.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8585102842T Expired - Fee Related DE3575781D1 (de) 1984-03-31 1985-03-13 Positionsmesseinrichtung.

Country Status (5)

Country Link
US (1) US4667096A (en, 2012)
EP (1) EP0157239B1 (en, 2012)
JP (1) JPS60225015A (en, 2012)
AT (1) ATE50058T1 (en, 2012)
DE (2) DE3412063A1 (en, 2012)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0198846B1 (de) * 1984-10-08 1988-11-02 AG für industrielle Elektronik AGIE Losone bei Locarno Vorrichtung zur bestimmung der relativen position zwischen zwei teilen zwecks steuerung ihrer position oder verschiebung und verfahren zum betrieb dieser vorrichtung
DE3809569A1 (de) * 1988-03-22 1989-10-05 Frankl & Kirchner Positionsgeber
EP0440832B1 (de) * 1990-02-05 1993-06-09 Dr. Johannes Heidenhain GmbH Winkelmesstisch
DE59102126D1 (de) * 1991-05-18 1994-08-11 Heidenhain Gmbh Dr Johannes Interferentielle Positionsmessvorrichtung.
DE9110524U1 (de) * 1991-08-26 1992-09-24 Siemens AG, 8000 München Vorrichtung zur Winkellagebestimmung einer Lastwelle mit einem Meß- und einem Nachlaufzahnrad
DE59105197D1 (de) * 1991-11-04 1995-05-18 Heidenhain Gmbh Dr Johannes Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale.
US5698851A (en) * 1996-04-03 1997-12-16 Placa Ltd. Device and method for precise angular measurement by mapping small rotations into large phase shifts
DE19904471B4 (de) 1999-02-04 2011-03-31 Dr. Johannes Heidenhain Gmbh Drehgeber
DE19907326B4 (de) 1999-02-20 2013-04-04 Dr. Johannes Heidenhain Gmbh Winkelmeßsystem
US7152456B2 (en) * 2004-01-14 2006-12-26 Romer Incorporated Automated robotic measuring system
US7693325B2 (en) 2004-01-14 2010-04-06 Hexagon Metrology, Inc. Transprojection of geometry data
US20060187573A1 (en) * 2005-02-24 2006-08-24 Electro-Sensors, Inc. Sensor equipment guard
WO2007033273A2 (en) * 2005-09-13 2007-03-22 Romer Incorporated Vehicle comprising an articulator of a coordinate measuring machine

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1673887A1 (de) * 1968-01-16 1972-01-20 Heidenhain Gmbh Dr Johannes Anordnung zur Bestimmung der Lage zweier relativ zueinander beweglicher Teile
DE1964381C3 (de) * 1969-07-01 1980-01-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementales Längen- oder Winkelmeßsystem
DE3018527A1 (de) * 1980-05-14 1981-11-19 Walter Dipl.-Ing. Dr.-Ing. 8012 Ottobrunn Mehnert Verfahren und vorrichtung zur messung einer laenge
DE3144334A1 (de) * 1981-11-07 1983-05-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Wegmesseinrichtung mit referenzmarken
DE3311204A1 (de) * 1983-03-26 1984-10-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementale laengen- oder winkelmesseinrichtung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH365231A (fr) * 1959-03-06 1962-10-31 Genevoise Instr Physique Convertisseur analogique numérique
US3483391A (en) * 1969-01-23 1969-12-09 Fred H Jensen Spiral element rotary-sensing mechanism
GB1284641A (en) * 1970-01-08 1972-08-09 Ferranti Ltd Improvements relating to measuring apparatus
DE3018496A1 (de) * 1980-05-14 1981-11-19 Walter Dipl.-Ing. Dr.-Ing. 8012 Ottobrunn Mehnert Verfahren und vorrichtung zur messung eines winkels

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1673887A1 (de) * 1968-01-16 1972-01-20 Heidenhain Gmbh Dr Johannes Anordnung zur Bestimmung der Lage zweier relativ zueinander beweglicher Teile
DE1964381C3 (de) * 1969-07-01 1980-01-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementales Längen- oder Winkelmeßsystem
DE3018527A1 (de) * 1980-05-14 1981-11-19 Walter Dipl.-Ing. Dr.-Ing. 8012 Ottobrunn Mehnert Verfahren und vorrichtung zur messung einer laenge
DE3144334A1 (de) * 1981-11-07 1983-05-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Wegmesseinrichtung mit referenzmarken
DE3311204A1 (de) * 1983-03-26 1984-10-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementale laengen- oder winkelmesseinrichtung

Also Published As

Publication number Publication date
JPH0464407B2 (en, 2012) 1992-10-14
JPS60225015A (ja) 1985-11-09
US4667096A (en) 1987-05-19
EP0157239A3 (en) 1987-08-26
EP0157239A2 (de) 1985-10-09
ATE50058T1 (de) 1990-02-15
DE3575781D1 (de) 1990-03-08
EP0157239B1 (de) 1990-01-31
DE3412063C2 (en, 2012) 1987-12-23

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee