DE3363269D1 - Pressure-sensitive element and pressure transducer using such an element - Google Patents

Pressure-sensitive element and pressure transducer using such an element

Info

Publication number
DE3363269D1
DE3363269D1 DE8383810281T DE3363269T DE3363269D1 DE 3363269 D1 DE3363269 D1 DE 3363269D1 DE 8383810281 T DE8383810281 T DE 8383810281T DE 3363269 T DE3363269 T DE 3363269T DE 3363269 D1 DE3363269 D1 DE 3363269D1
Authority
DE
Germany
Prior art keywords
pressure
sensitive
pressure transducer
transducer
sensitive element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383810281T
Other languages
English (en)
Inventor
Rudolf Dinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asulab AG
Original Assignee
Asulab AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asulab AG filed Critical Asulab AG
Application granted granted Critical
Publication of DE3363269D1 publication Critical patent/DE3363269D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
DE8383810281T 1982-07-13 1983-06-23 Pressure-sensitive element and pressure transducer using such an element Expired DE3363269D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8212532A FR2530338A1 (fr) 1982-07-13 1982-07-13 Element sensible a la pression et capteur de pression en faisant application

Publications (1)

Publication Number Publication Date
DE3363269D1 true DE3363269D1 (en) 1986-06-05

Family

ID=9276064

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383810281T Expired DE3363269D1 (en) 1982-07-13 1983-06-23 Pressure-sensitive element and pressure transducer using such an element

Country Status (6)

Country Link
US (1) US4507970A (de)
EP (1) EP0099330B1 (de)
JP (1) JPS5924230A (de)
DE (1) DE3363269D1 (de)
FR (1) FR2530338A1 (de)
HK (1) HK49589A (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4644796A (en) * 1983-06-21 1987-02-24 Quartztronics, Inc. Pressure measurement apparatus and method
JPS61201129A (ja) * 1985-03-04 1986-09-05 Toyo Commun Equip Co Ltd ガス圧力センサ
US4734609A (en) * 1986-07-25 1988-03-29 Calogic Corporation Gas density transducer
US4802370A (en) * 1986-12-29 1989-02-07 Halliburton Company Transducer and sensor apparatus and method
US4936147A (en) * 1986-12-29 1990-06-26 Halliburton Company Transducer and sensor apparatus and method
EP0379841B2 (de) * 1989-01-23 1998-11-04 Balzers Aktiengesellschaft Gasdruck-Messgerät
CH687276A5 (de) * 1989-01-23 1996-10-31 Balzers Hochvakuum Stimmgabelquarz-Manometer.
CH687277A5 (de) * 1989-01-23 1996-10-31 Balzers Hochvakuum Stimmgabelquarz-Manometer.
US5012151A (en) * 1989-09-12 1991-04-30 Halliburton Company Thermally matched strip mounted resonator and related mounting method
JPH05117960A (ja) * 1991-10-25 1993-05-14 Koshin Kk 毛布の連続漂白方法
JPH09105U (ja) * 1991-10-29 1997-02-25 東洋通信機株式会社 ガス圧力センサ
US5221873A (en) * 1992-01-21 1993-06-22 Halliburton Services Pressure transducer with quartz crystal of singly rotated cut for increased pressure and temperature operating range
CH685659B5 (fr) * 1994-03-04 1996-03-15 Asulab Sa Montre indiquant une prevision meteorologique.
JP3969442B2 (ja) * 2005-09-26 2007-09-05 エプソントヨコム株式会社 圧力センサ
JP4973718B2 (ja) * 2009-01-27 2012-07-11 セイコーエプソン株式会社 圧力検出ユニット、及び圧力センサー
JP2011232263A (ja) * 2010-04-29 2011-11-17 Seiko Epson Corp 圧電センサー、圧電センサー素子及び圧電振動片
ES2467697T5 (es) * 2010-11-29 2018-02-27 Air Products And Chemicals, Inc. Método y aparato para medir la presión de un gas
EP2458348B1 (de) 2010-11-29 2013-08-14 Air Products And Chemicals, Inc. Verfahren und Vorrichtung zum Messen der Massendurchflussrate eines Gases
EP2458377B1 (de) 2010-11-29 2019-07-31 Air Products And Chemicals, Inc. Verfahren und Vorrichtung zum Messen des Molekulargewichts eines Gases
JP2012120014A (ja) * 2010-12-02 2012-06-21 Seiko Epson Corp 圧電振動素子、その製造方法、圧電振動子及び圧電発振器
PL2667277T3 (pl) 2012-05-24 2018-05-30 Air Products And Chemicals, Inc. Sposób i urządzenia do dostarczania mieszaniny gazu
EP2667159B1 (de) 2012-05-24 2021-12-01 Air Products And Chemicals, Inc. Verfahren und Vorrichtung zum Messen der Massendurchflussrate eines Gases
ES2659146T3 (es) 2012-05-24 2018-03-14 Air Products And Chemicals, Inc. Método y aparato para proporcionar una mezcla de gases
PL2667162T3 (pl) 2012-05-24 2016-03-31 Air Prod & Chem Sposób oraz urządzenie do mierzenia właściwości fizycznych płynów dwufazowych
ES2845173T3 (es) 2012-05-24 2021-07-26 Air Prod & Chem Procedimiento y aparato para regular el caudal másico de un gas
EP2667176B1 (de) 2012-05-24 2015-02-25 Air Products And Chemicals, Inc. Vorrichtung zum Messen des tatsächlichen Inhalts eines unter Druck stehenden Gaszylinders
JP2014240789A (ja) * 2013-06-12 2014-12-25 ソニー株式会社 圧電デバイス及び電子機器
US10110198B1 (en) * 2015-12-17 2018-10-23 Hrl Laboratories, Llc Integrated quartz MEMS tuning fork resonator/oscillator

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3257850A (en) * 1963-11-26 1966-06-28 Rosemount Eng Co Ltd Pressure responsive vibrating tube
US3902355A (en) * 1972-07-31 1975-09-02 Gauting Gmbh Apparatebau Apparatus for the electronic-digital measurement of gas pressure
JPS532711B2 (de) * 1973-07-19 1978-01-31
JPS5323589A (en) * 1976-08-18 1978-03-04 Seiko Epson Corp Crystal vibrator
JPS54113297A (en) * 1978-01-26 1979-09-04 Seiko Epson Corp Tuning fork-type crystal vibrator
US4265124A (en) * 1979-06-04 1981-05-05 Rockwell International Corporation Remote acoustic wave sensors
JPS5679221A (en) * 1979-11-30 1981-06-29 Yokogawa Hokushin Electric Corp Force-frequency converting element
JPS57136130A (en) * 1981-02-17 1982-08-23 Sharp Corp Pressure gage

Also Published As

Publication number Publication date
EP0099330A3 (en) 1984-02-22
JPH047459B2 (de) 1992-02-12
EP0099330B1 (de) 1986-04-30
HK49589A (en) 1989-06-30
EP0099330A2 (de) 1984-01-25
JPS5924230A (ja) 1984-02-07
FR2530338A1 (fr) 1984-01-20
FR2530338B1 (de) 1984-12-14
US4507970A (en) 1985-04-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee