DE3327159A1 - Sensor zur messung einer dampfkonzentration - Google Patents

Sensor zur messung einer dampfkonzentration

Info

Publication number
DE3327159A1
DE3327159A1 DE19833327159 DE3327159A DE3327159A1 DE 3327159 A1 DE3327159 A1 DE 3327159A1 DE 19833327159 DE19833327159 DE 19833327159 DE 3327159 A DE3327159 A DE 3327159A DE 3327159 A1 DE3327159 A1 DE 3327159A1
Authority
DE
Germany
Prior art keywords
measuring
sensor
layer
vapor
vapor concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19833327159
Other languages
German (de)
English (en)
Other versions
DE3327159C2 (enrdf_load_stackoverflow
Inventor
Josef L. Dr.Rer.Nat. Jostan
Anton 7900 Ulm Knoll
Anita 7906 Blaustein-Dietingen Marten
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Licentia Patent Verwaltungs GmbH
Original Assignee
Licentia Patent Verwaltungs GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Licentia Patent Verwaltungs GmbH filed Critical Licentia Patent Verwaltungs GmbH
Priority to DE19833327159 priority Critical patent/DE3327159A1/de
Publication of DE3327159A1 publication Critical patent/DE3327159A1/de
Application granted granted Critical
Publication of DE3327159C2 publication Critical patent/DE3327159C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02845—Humidity, wetness

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE19833327159 1983-07-28 1983-07-28 Sensor zur messung einer dampfkonzentration Granted DE3327159A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19833327159 DE3327159A1 (de) 1983-07-28 1983-07-28 Sensor zur messung einer dampfkonzentration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833327159 DE3327159A1 (de) 1983-07-28 1983-07-28 Sensor zur messung einer dampfkonzentration

Publications (2)

Publication Number Publication Date
DE3327159A1 true DE3327159A1 (de) 1985-02-07
DE3327159C2 DE3327159C2 (enrdf_load_stackoverflow) 1991-06-06

Family

ID=6205093

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833327159 Granted DE3327159A1 (de) 1983-07-28 1983-07-28 Sensor zur messung einer dampfkonzentration

Country Status (1)

Country Link
DE (1) DE3327159A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3818733A1 (de) * 1987-06-02 1988-12-22 Djorup Robert Sonny Konstanttemperatur-hygrometer
WO2001001110A1 (de) * 1999-06-23 2001-01-04 Avl List Gmbh Anordnung zur quantitativen und qualitativen analyse von partikeln in gasen

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19907743B4 (de) * 1999-02-23 2012-01-05 Volkswagen Ag Ölqualitätssensor sowie Verfahren zu dessen Herstellung

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD36928A (enrdf_load_stackoverflow) *
US3164004A (en) * 1961-05-15 1965-01-05 Exxon Research Engineering Co Coated piezoelectric analyzers
US3392583A (en) * 1967-07-11 1968-07-16 Chace Co W M Laminated humidity responsive element having improved water vapor absorptive qualitie
US3802268A (en) * 1971-05-06 1974-04-09 Johnson Service Co Capacitance humidity sensing element
DE1798335B2 (de) * 1967-09-27 1976-04-29 Johnson Service Co., Milwaukee, Wis. (V.St.A.) Synthetisches feuchtigkeitsmesselement
DE3212831A1 (de) * 1981-04-08 1982-11-11 United Technologies Corp., 06101 Hartford, Conn. Druckfuehler vom balgtyp

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD36928A (enrdf_load_stackoverflow) *
US3164004A (en) * 1961-05-15 1965-01-05 Exxon Research Engineering Co Coated piezoelectric analyzers
US3392583A (en) * 1967-07-11 1968-07-16 Chace Co W M Laminated humidity responsive element having improved water vapor absorptive qualitie
DE1798335B2 (de) * 1967-09-27 1976-04-29 Johnson Service Co., Milwaukee, Wis. (V.St.A.) Synthetisches feuchtigkeitsmesselement
US3802268A (en) * 1971-05-06 1974-04-09 Johnson Service Co Capacitance humidity sensing element
DE3212831A1 (de) * 1981-04-08 1982-11-11 United Technologies Corp., 06101 Hartford, Conn. Druckfuehler vom balgtyp

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3818733A1 (de) * 1987-06-02 1988-12-22 Djorup Robert Sonny Konstanttemperatur-hygrometer
WO2001001110A1 (de) * 1999-06-23 2001-01-04 Avl List Gmbh Anordnung zur quantitativen und qualitativen analyse von partikeln in gasen

Also Published As

Publication number Publication date
DE3327159C2 (enrdf_load_stackoverflow) 1991-06-06

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee