DE3260225D1 - Pressure sensing device - Google Patents

Pressure sensing device

Info

Publication number
DE3260225D1
DE3260225D1 DE8282300600T DE3260225T DE3260225D1 DE 3260225 D1 DE3260225 D1 DE 3260225D1 DE 8282300600 T DE8282300600 T DE 8282300600T DE 3260225 T DE3260225 T DE 3260225T DE 3260225 D1 DE3260225 D1 DE 3260225D1
Authority
DE
Germany
Prior art keywords
sensing device
pressure sensing
pressure
sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282300600T
Other languages
English (en)
Inventor
Ronald Eugene Brown
Lamonte Rea Edison
William David Higdon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motors Liquidation Co
Original Assignee
Motors Liquidation Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motors Liquidation Co filed Critical Motors Liquidation Co
Application granted granted Critical
Publication of DE3260225D1 publication Critical patent/DE3260225D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE8282300600T 1981-02-23 1982-02-08 Pressure sensing device Expired DE3260225D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/237,474 US4400681A (en) 1981-02-23 1981-02-23 Semiconductor pressure sensor with slanted resistors

Publications (1)

Publication Number Publication Date
DE3260225D1 true DE3260225D1 (en) 1984-07-19

Family

ID=22893872

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282300600T Expired DE3260225D1 (en) 1981-02-23 1982-02-08 Pressure sensing device

Country Status (4)

Country Link
US (1) US4400681A (de)
EP (1) EP0059539B2 (de)
JP (1) JPS57159068A (de)
DE (1) DE3260225D1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4696188A (en) * 1981-10-09 1987-09-29 Honeywell Inc. Semiconductor device microstructure
JPS5952727A (ja) * 1982-09-20 1984-03-27 Hitachi Ltd 半導体圧力センサ
JPS6174374A (ja) * 1984-09-19 1986-04-16 Toyota Central Res & Dev Lab Inc 半導体圧力変換器
US4721938A (en) * 1986-12-22 1988-01-26 Delco Electronics Corporation Process for forming a silicon pressure transducer
JPH0197827A (ja) * 1987-07-08 1989-04-17 Ricoh Co Ltd 半導体拡散型力覚センサ
JPH01315172A (ja) * 1988-06-15 1989-12-20 Komatsu Ltd 応力変換素子およびその製造方法
US6142021A (en) * 1998-08-21 2000-11-07 Motorola, Inc. Selectable pressure sensor
US6796396B2 (en) * 1999-06-04 2004-09-28 Deka Products Limited Partnership Personal transporter
US6341528B1 (en) 1999-11-12 2002-01-29 Measurement Specialties, Incorporated Strain sensing structure with improved reliability
WO2002061383A1 (en) * 2001-01-31 2002-08-08 Silicon Valley Sensors, Inc. Triangular chip strain sensing structure and corner,edge on a diaphragm
JP2002286567A (ja) * 2001-03-23 2002-10-03 Denso Corp ダイアフラムセンサ
US20090055033A1 (en) * 2007-08-23 2009-02-26 Segway Inc. Apparatus and methods for fault detection at vehicle startup
US9146164B2 (en) * 2013-03-07 2015-09-29 Sensata Technologies, Inc. Pressure transducer substrate with self alignment feature
CN108604149B (zh) * 2016-02-06 2021-06-18 深圳纽迪瑞科技开发有限公司 压力传感器、电子设备及该压力传感器的制作方法
CN107290099B (zh) 2016-04-11 2021-06-08 森萨塔科技公司 压力传感器、用于压力传感器的插塞件和制造插塞件的方法
EP3236226B1 (de) 2016-04-20 2019-07-24 Sensata Technologies, Inc. Verfahren zur herstellung eines drucksensors
US10545064B2 (en) 2017-05-04 2020-01-28 Sensata Technologies, Inc. Integrated pressure and temperature sensor
US10323998B2 (en) 2017-06-30 2019-06-18 Sensata Technologies, Inc. Fluid pressure sensor
US10724907B2 (en) 2017-07-12 2020-07-28 Sensata Technologies, Inc. Pressure sensor element with glass barrier material configured for increased capacitive response
US10557770B2 (en) 2017-09-14 2020-02-11 Sensata Technologies, Inc. Pressure sensor with improved strain gauge

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3213681A (en) * 1963-05-21 1965-10-26 Fairchild Camera Instr Co Shear gauge pressure-measuring device
DE1816661B2 (de) * 1967-12-27 1971-11-04 Anordnung zum messen von drucken
JPS5624387B2 (de) * 1973-10-09 1981-06-05
US4065970A (en) * 1976-05-17 1978-01-03 Becton, Dickinson Electronics Company Diffused semiconductor pressure gauge
US4133100A (en) * 1976-12-27 1979-01-09 Myhre Kjell E Method of making diaphragm of optimized stress and strain distribution

Also Published As

Publication number Publication date
JPS57159068A (en) 1982-10-01
EP0059539B1 (de) 1984-06-13
EP0059539B2 (de) 1989-03-08
JPS6155265B2 (de) 1986-11-27
US4400681A (en) 1983-08-23
EP0059539A1 (de) 1982-09-08

Similar Documents

Publication Publication Date Title
DE3279864D1 (en) Displacement measuring device
DE3271194D1 (en) Touch sensing device
GB2100002B (en) Fluid pressure sensors
GB2094979B (en) Physical contact sensing device
IL66234A (en) Capacitance pressure sensor
GB2071853B (en) Pressure sensor
JPS56132536A (en) Pressure sensing system
JPS57163841A (en) Sensor device
JPS57148230A (en) Sensor device
GB8523656D0 (en) Pressure sensing device
DE3260225D1 (en) Pressure sensing device
EP0088270A3 (en) Pressure sensor
GB8305851D0 (en) Pressure sensor
GB2112523B (en) Displacement measuring device
JPS57163842A (en) Sensor device
GB2097541B (en) Absolute pressure sensor
DE3275775D1 (en) Specified condition sensing device
GB2102119B (en) Configuration detecting device
DE3370377D1 (en) Pressure sensor
GB8317260D0 (en) Pressure sensor
JPS56142431A (en) Pressure sensor
GB2086053B (en) Sensing device
GB2098737B (en) Pressure sensor
DE3270471D1 (en) Pressure device
GB2109746B (en) Pressure fixing device

Legal Events

Date Code Title Description
8366 Restricted maintained after opposition proceedings
8339 Ceased/non-payment of the annual fee