DE3200848C2 - Vorrichtung zum Beschicken von Verdampfern in Aufdampfanlagen - Google Patents

Vorrichtung zum Beschicken von Verdampfern in Aufdampfanlagen

Info

Publication number
DE3200848C2
DE3200848C2 DE3200848A DE3200848A DE3200848C2 DE 3200848 C2 DE3200848 C2 DE 3200848C2 DE 3200848 A DE3200848 A DE 3200848A DE 3200848 A DE3200848 A DE 3200848A DE 3200848 C2 DE3200848 C2 DE 3200848C2
Authority
DE
Germany
Prior art keywords
charging
evaporators
evaporator
axis
pivot axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3200848A
Other languages
German (de)
English (en)
Other versions
DE3200848A1 (de
Inventor
Erwin Dipl.-Ing. 7071 Leinzell Eichinger
Lothar 6450 Hanau Rachor
Peter Dipl.-Ing. 7070 Schwäbisch Gmünd Scheyrer
Rudolf Dr.-Ing. 6454 Bruchköbel Seif
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GFO GESELLSCHAFT fur OBERFLAECHENTECHNIK MBH 7070 SCHWAEBISCH GMUEND DE
Original Assignee
GFO GESELLSCHAFT fur OBERFLAECHENTECHNIK MBH 7070 SCHWAEBISCH GMUEND DE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GFO GESELLSCHAFT fur OBERFLAECHENTECHNIK MBH 7070 SCHWAEBISCH GMUEND DE filed Critical GFO GESELLSCHAFT fur OBERFLAECHENTECHNIK MBH 7070 SCHWAEBISCH GMUEND DE
Priority to DE3200848A priority Critical patent/DE3200848C2/de
Priority to US06/435,601 priority patent/US4470370A/en
Priority to DE8282111605T priority patent/DE3265909D1/de
Priority to AT82111605T priority patent/ATE15233T1/de
Priority to EP82111605A priority patent/EP0084126B1/de
Priority to YU2875/82A priority patent/YU43110B/xx
Priority to NO824403A priority patent/NO161627C/no
Priority to DK002883A priority patent/DK154350C/da
Priority to JP58001248A priority patent/JPS58123871A/ja
Priority to CA000419412A priority patent/CA1195489A/en
Priority to ES518945A priority patent/ES518945A0/es
Publication of DE3200848A1 publication Critical patent/DE3200848A1/de
Application granted granted Critical
Publication of DE3200848C2 publication Critical patent/DE3200848C2/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Processing Of Solid Wastes (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE3200848A 1982-01-14 1982-01-14 Vorrichtung zum Beschicken von Verdampfern in Aufdampfanlagen Expired DE3200848C2 (de)

Priority Applications (11)

Application Number Priority Date Filing Date Title
DE3200848A DE3200848C2 (de) 1982-01-14 1982-01-14 Vorrichtung zum Beschicken von Verdampfern in Aufdampfanlagen
US06/435,601 US4470370A (en) 1982-01-14 1982-10-20 Means for loading vapor coating materials into an evaporator
DE8282111605T DE3265909D1 (en) 1982-01-14 1982-12-14 Equipment for feeding evaporators in vapour-deposition apparatuses
AT82111605T ATE15233T1 (de) 1982-01-14 1982-12-14 Vorrichtung zum beschicken von verdampfern in aufdampfanlagen.
EP82111605A EP0084126B1 (de) 1982-01-14 1982-12-14 Vorrichtung zum Beschicken von Verdampfern in Aufdampfanlagen
YU2875/82A YU43110B (en) 1982-01-14 1982-12-24 Device for charging an evaporator of machineries for the metallization in vacuum
NO824403A NO161627C (no) 1982-01-14 1982-12-29 Innretning til aa mate formstykker av paadampningsmaterialer til fordampere i paadampningsanlegg.
DK002883A DK154350C (da) 1982-01-14 1983-01-06 Apparat til beskikning af fordampere i paadampningsanlaeg
JP58001248A JPS58123871A (ja) 1982-01-14 1983-01-10 蒸着装置の蒸発器に材料を供給するための装置
CA000419412A CA1195489A (en) 1982-01-14 1983-01-13 Apparatus for charging evaporators in coating plants
ES518945A ES518945A0 (es) 1982-01-14 1983-01-13 Dispositivo para cargar evaporadores en instalaciones de revestimiento por evaporacion con piezas conformadas de materiales evaporables.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3200848A DE3200848C2 (de) 1982-01-14 1982-01-14 Vorrichtung zum Beschicken von Verdampfern in Aufdampfanlagen

Publications (2)

Publication Number Publication Date
DE3200848A1 DE3200848A1 (de) 1983-07-21
DE3200848C2 true DE3200848C2 (de) 1984-09-27

Family

ID=6152998

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3200848A Expired DE3200848C2 (de) 1982-01-14 1982-01-14 Vorrichtung zum Beschicken von Verdampfern in Aufdampfanlagen
DE8282111605T Expired DE3265909D1 (en) 1982-01-14 1982-12-14 Equipment for feeding evaporators in vapour-deposition apparatuses

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8282111605T Expired DE3265909D1 (en) 1982-01-14 1982-12-14 Equipment for feeding evaporators in vapour-deposition apparatuses

Country Status (10)

Country Link
US (1) US4470370A (enExample)
EP (1) EP0084126B1 (enExample)
JP (1) JPS58123871A (enExample)
AT (1) ATE15233T1 (enExample)
CA (1) CA1195489A (enExample)
DE (2) DE3200848C2 (enExample)
DK (1) DK154350C (enExample)
ES (1) ES518945A0 (enExample)
NO (1) NO161627C (enExample)
YU (1) YU43110B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4209428C1 (en) * 1992-03-24 1993-04-15 Degussa Ag, 6000 Frankfurt, De Automatic evapn. of large amts. of material without breaking vacuum - by charging moulded evapn. material from containers into recesses in rollers which then move mouldings to evaporators

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4125350A1 (de) * 1991-07-31 1993-02-04 Leybold Ag Vorrichtung zum beschichten von werkstueckflaechen
DE19547650A1 (de) * 1995-12-20 1997-06-26 Henkel Kgaa Verfahren zum Desinfizieren von Flächen
US7232588B2 (en) * 2004-02-23 2007-06-19 Eastman Kodak Company Device and method for vaporizing temperature sensitive materials
US20060099344A1 (en) 2004-11-09 2006-05-11 Eastman Kodak Company Controlling the vaporization of organic material
KR200465407Y1 (ko) * 2011-06-14 2013-02-18 임지홍 냉장유지보조품 보관부가 분리구획된 공기튜브식 보조용기

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE973280C (de) * 1948-10-02 1960-01-07 Siemens Ag Durch unmittelbaren Stromdurchgang beheizter, stabfoermiger Verdampfer
US2635579A (en) * 1949-12-01 1953-04-21 Nat Res Corp Coating by evaporating metal under vacuum
DE1032998B (de) * 1954-04-03 1958-06-26 Standard Elektrik Ag Vorrichtung zur Herstellung von duennen Schichten aus mehreren Komponenten
US2996037A (en) * 1959-01-26 1961-08-15 Nat Res Corp Vacuum coating apparatus
NL291466A (enExample) * 1962-04-13
US3488214A (en) * 1967-03-15 1970-01-06 Sperry Rand Corp Evaporant material control for vapor deposition apparatus
DE1621361A1 (de) * 1967-08-01 1971-05-13 Telefunken Patent Aufdampfvorrichtung
DE1910332A1 (de) * 1969-02-28 1970-09-10 Siemens Ag Hochvakuum-Bedampfungsapparatur
US4226208A (en) * 1977-08-04 1980-10-07 Canon Kabushiki Kaisha Vapor deposition apparatus
JPS5814874B2 (ja) * 1978-06-01 1983-03-22 キヤノン株式会社 真空処理装置の蒸発材供給装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4209428C1 (en) * 1992-03-24 1993-04-15 Degussa Ag, 6000 Frankfurt, De Automatic evapn. of large amts. of material without breaking vacuum - by charging moulded evapn. material from containers into recesses in rollers which then move mouldings to evaporators

Also Published As

Publication number Publication date
US4470370A (en) 1984-09-11
CA1195489A (en) 1985-10-22
YU287582A (en) 1985-10-31
NO161627C (no) 1989-09-06
ATE15233T1 (de) 1985-09-15
EP0084126B1 (de) 1985-08-28
JPH032946B2 (enExample) 1991-01-17
JPS58123871A (ja) 1983-07-23
DK2883D0 (da) 1983-01-06
ES8400496A1 (es) 1983-10-16
ES518945A0 (es) 1983-10-16
NO824403L (no) 1983-07-15
DE3200848A1 (de) 1983-07-21
NO161627B (no) 1989-05-29
DK154350C (da) 1989-04-10
DK154350B (da) 1988-11-07
DK2883A (da) 1983-07-15
EP0084126A1 (de) 1983-07-27
YU43110B (en) 1989-02-28
DE3265909D1 (en) 1985-10-03

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee