DE3176358D1 - Leakage detection method using helium - Google Patents

Leakage detection method using helium

Info

Publication number
DE3176358D1
DE3176358D1 DE8181900554T DE3176358T DE3176358D1 DE 3176358 D1 DE3176358 D1 DE 3176358D1 DE 8181900554 T DE8181900554 T DE 8181900554T DE 3176358 T DE3176358 T DE 3176358T DE 3176358 D1 DE3176358 D1 DE 3176358D1
Authority
DE
Germany
Prior art keywords
helium
detection method
leakage detection
leakage
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181900554T
Other languages
English (en)
Inventor
Hiroshi Ishii
Kohji Seki
Hiroshi Morishita
Toshiaki Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Oxygen Co Ltd
Nippon Sanso Corp
Original Assignee
Japan Oxygen Co Ltd
Nippon Sanso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=12290145&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3176358(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Japan Oxygen Co Ltd, Nippon Sanso Corp filed Critical Japan Oxygen Co Ltd
Application granted granted Critical
Publication of DE3176358D1 publication Critical patent/DE3176358D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
DE8181900554T 1980-03-10 1981-03-06 Leakage detection method using helium Expired DE3176358D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2994680A JPS56126733A (en) 1980-03-10 1980-03-10 Detecting method for leakage of helium
PCT/JP1981/000048 WO1981002631A1 (en) 1980-03-10 1981-03-06 Leakage detection method using helium

Publications (1)

Publication Number Publication Date
DE3176358D1 true DE3176358D1 (en) 1987-09-17

Family

ID=12290145

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181900554T Expired DE3176358D1 (en) 1980-03-10 1981-03-06 Leakage detection method using helium

Country Status (5)

Country Link
US (1) US4419882A (de)
EP (1) EP0047324B1 (de)
JP (1) JPS56126733A (de)
DE (1) DE3176358D1 (de)
WO (1) WO1981002631A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112638693A (zh) * 2018-06-29 2021-04-09 海柏路普运输技术公司 使用空气和氦气的气体混合物的管道运输系统

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GB2123153A (en) * 1982-06-30 1984-01-25 Boc Group Plc Leak detector
US4558587A (en) * 1984-08-29 1985-12-17 Varian Associates, Inc. Ball-type vacuum valve for leak detection apparatus
US4785666A (en) * 1986-12-19 1988-11-22 Martin Marietta Corporation Method of increasing the sensitivity of a leak detector in the probe mode
DE3870299D1 (de) * 1987-03-31 1992-05-27 Leybold Ag Verfahren und vorrichtung zur leckpruefung an mit fluessigkeiten gefuellten systemen.
US5022265A (en) * 1987-03-31 1991-06-11 Finn-Aqua Method and apparatus for leak testing fluid conducting freeze-drying apparatus
FR2653558B1 (fr) * 1989-10-23 1994-06-10 Cit Alcatel Systeme de detection de fuites a gaz traceur.
DE9202350U1 (de) * 1992-02-24 1992-04-16 Leybold Ag, 6450 Hanau, De
DE4228085A1 (de) * 1992-08-24 1994-03-03 Leybold Ag Verfahren und Vorrichtung zum Nachweis eines leichten Testgases in einer Flüssigkeit
JPH0661680U (ja) * 1993-02-04 1994-08-30 光雄 柳澤 低床荷台付自動自転車
DE4326267A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Lecksuchgerät
DE4326264A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor mit Vakuumpumpe sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
US5375456A (en) * 1993-11-18 1994-12-27 Trw Vehicle Safety Systems Inc. Leak testing apparatus and method
SE502355C2 (sv) * 1994-02-17 1995-10-09 Hans Stymne Sätt jämte anordning för att avge små mängder gas från ett ämne i kondenserad form till omgivningen med kontrollerbar hastighet
ES2192568T3 (es) * 1994-12-23 2003-10-16 Unaxis Balzers Ag Procedimiento para el analisis de gases y analizador de gases.
FR2734633B1 (fr) * 1995-05-24 1997-06-20 Cit Alcatel Installation pour detecter la presence d'helium dans un circuit de fluide
US6401465B1 (en) * 2000-10-19 2002-06-11 Carrier Corporation Absorption chiller leak detection and location and checking hydrogen removing cells
EP1343925A1 (de) * 2000-12-22 2003-09-17 MEMC Electronic Materials, Inc. Verfahren zur überwachung der gasatmosphäre in einer kristallziehvorrichtung zur züchtung von halbleiterkristallen
SE518522C2 (sv) * 2001-03-21 2002-10-22 Sensistor Ab Metod och anordning vid täthetsprovning och läcksökning
DE10324596A1 (de) * 2003-05-30 2004-12-16 Inficon Gmbh Lecksuchgerät
DE102004045803A1 (de) * 2004-09-22 2006-04-06 Inficon Gmbh Leckprüfverfahren und Leckprüfvorrichtung
DE102005021909A1 (de) * 2005-05-12 2006-11-16 Inficon Gmbh Schnüffellecksucher mit Quarzfenstersensor
US7497110B2 (en) * 2007-02-28 2009-03-03 Varian, Inc. Methods and apparatus for test gas leak detection
US20080202210A1 (en) * 2007-02-28 2008-08-28 Varian, Inc. Test gas leak detection using a composite membrane
US7905132B1 (en) 2007-08-14 2011-03-15 LACO Technologies, Inc. Leak testing using tracer gas permeable membrane
US9429494B1 (en) 2012-11-21 2016-08-30 Western Digital Technologies, Inc. Leakage test method for a hermetically sealed disk drive enclosure
CN103175662A (zh) * 2013-03-20 2013-06-26 厦门松芝汽车空调有限公司 大中型汽车空调生产时的检漏方法
RU2560109C2 (ru) * 2013-09-30 2015-08-20 Открытое акционерное общество "Моринформсистема-Агат-КИП" Способ контроля герметичности оболочек твэлов
CN104913193B (zh) * 2015-06-30 2016-10-26 宜昌江峡船用机械有限责任公司 一种夹层低温容器内容器的检漏方法和装置
CN105092182A (zh) * 2015-08-14 2015-11-25 中广核工程有限公司 核电厂功率运行阶段凝汽器真空氦气查漏法
CN107389498B (zh) * 2017-07-07 2024-01-12 金华职业技术学院 一种测量甲烷透过率的方法
CN112098008A (zh) * 2020-08-25 2020-12-18 广东鸿图科技股份有限公司 一种用于工件气密性检测的装置
CN116558730B (zh) * 2023-07-10 2023-09-19 华能淮阴第二发电有限公司 一种便捷式机组真空系统检漏装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1181312A (fr) * 1957-08-20 1959-06-15 Commissariat Energie Atomique Perfectionnement aux méthodes de mesure d'étanchéité
DE1648367A1 (de) * 1967-06-05 1971-04-15 Varian Mat Gmbh Diffusionsmembran-Anordnung,insbesondere fuer Lecksuchroehren
JPS462709Y1 (de) * 1967-08-11 1971-01-29
US3591827A (en) * 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
FR2058661A5 (de) * 1969-09-19 1971-05-28 Commissariat Energie Atomique
FR2082765A5 (de) * 1970-03-26 1971-12-10 Commissariat Energie Atomique
US3867631A (en) * 1972-09-28 1975-02-18 Varian Associates Leak detection apparatus and inlet interface
FR2207598A5 (en) * 1972-11-17 1974-06-14 Veeco Sa Mass spectrometry leak testing - is rapid and does not impose mechanical stresses of vacuum testing
DE2926112A1 (de) * 1979-06-28 1981-01-08 Bosch Gmbh Robert Testleck-sonde

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112638693A (zh) * 2018-06-29 2021-04-09 海柏路普运输技术公司 使用空气和氦气的气体混合物的管道运输系统

Also Published As

Publication number Publication date
US4419882A (en) 1983-12-13
EP0047324A4 (de) 1983-12-23
JPS6249923B2 (de) 1987-10-22
EP0047324A1 (de) 1982-03-17
JPS56126733A (en) 1981-10-05
WO1981002631A1 (en) 1981-09-17
EP0047324B1 (de) 1987-08-12

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation